m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateOption80.18
m (95% filtered particle size)Max. 0.1 mg/m3 (ANR) (Before saturated with oil: 0.01 mg/m3 (ANR) or less, approx. 0.008 ppm) (2)PolycarbonateStandard450.44
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s
Adapter Material: Brass, Pad Diameter: ø1.5, Pad Type: U (Flat), Pad Material: S (Silicone Rubber), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)
Adapter Material: Brass, Pad Diameter: ø2, Pad Type: U (Flat), Pad Material: S (Silicone Rubber), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)
Adapter Material: Brass, Pad Diameter: ø3.5, Pad Type: U (Flat), Pad Material: N (NBR), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)
Adapter Material: Brass, Pad Diameter: ø2, Pad Type: U (Flat), Pad Material: GS (Conductive Silicone Rubber), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)
Adapter Material: Brass, Pad Diameter: ø1.5, Pad Type: U (Flat), Pad Material: GS (Conductive Silicone Rubber), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)
Adapter Material: Brass, Pad Diameter: ø1.5, Pad Type: U (Flat), Pad Material: N (NBR), Mounting Thread Size: B3 (M3 x 0.5, Female Thread), Vacuum Inlet: B3 (M3 x 0.5, Female Thread)
Size: 1 (M3, M5 Basis), Thread: Rc (Metric thread, M3, M5), Port Size: M5 (M5 x 0.8), Option: N (w/Nipple)
Size: 1 (M3, M5 Basis), Thread: Rc (Metric thread, M3, M5), Port Size: M5 (M5 x 0.8)
Size: 1 (M3, M5 Basis), Thread: Rc (Metric thread, M3, M5), Port Size: M5 (M5 x 0.8), Option: None, Lock Nut: J (Round)
Size: 1 (M3, M5 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: M5 (M5X0.8)
Size: 1 (M3, M5 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: M5 (M5X0.8), Option: None, Lock Nut: J (Round)
Size: 1 (M3, M5 Basis), Style: 2 (Elbow), Control Method: 1 (Meter-in), Thread: Rc (Metric M3, M5; Unified 10-32UNF), Port Size: M5 (M5X0.8)