High Purity Fluoropolymer

L L H A M W E N A LQ2H21-M LQ2H22-M LQ2H23-M LQ2H24-M LQ2H31-M LQ2H32-M LQ2H33-M LQ2H34-M LQ2H35-M LQ2H36-M LQ2H41-M LQ2H42-M LQ2H43-M LQ2H44-M LQ2H51-M LQ2H52-M LQ2H53-M LQ2H54-M 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 W 39 1/8" 42.5 19 19.9 16 18 36.5 1/4" (M) H 49 43 H (E) 1/4" Class 2, 3 48.5 42.5 Port size 22 26.2 24 24 R (NPT) 49 42.5 3/8" 48.5 59 58 59 58 68 67 68 67 42 53

MHL2

groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38 54 72 24 39 57 100 142 180 76 118 156 56 78 96 26 42

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

MK

Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-8 Rotary Clamp Cylinder/Standard Series MK Rear flange/MKG Rear boss mounting MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B ML1C REA Ah9 B Model MKl20-llF MKl25-llF D E 0 0.043 0 0.043 C Model MKG20 MKG25 REC 0.1 0.15 13 39 60 0.1 25.5 0.15 48 15 42 64 28 52 RHC MTS Rod end width across flats

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

n QL Model 50 100 150 200 250 300 350 400 50 100 150 200 250 300 350 400 Stroke MXY6 2 3 3 4 39 34 59 54 MXY8 5 5 34 59 2 2 3 4 39 64 54 44 MXY12 2 4 4 5 5 37 67 47 72 52 77 2 3 3 62 42 8-9-12 12 Air Slide Table Long Stroke Type Series MXY Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V), D-A93(V), D-A96(V) (mm) Lead wire entries outside A A

VP3145/3165/3185

Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) (Mounting hole) 2-8.5 EXH 205.1 196.1 PA PE 156 103 119 112 93 IN EXH OUT 65 62 42 42 25 (EXH port) Rc 3/4 (IN, OUT port) 2-Rc 3/8, 1/2, 3/4 36 71 36 When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Model: 42 (Dual AC), Bar Length: 16 (160mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 3 (3m), One-touch Fitting: 6H (ø6 Straight), Plug Position: Q (High-voltage Cable Side), Input, Output Specification: Nil (40); NPN (41, 42), Power Supply Cable Length: 15 (15m), Bar Bracket: w/o Bracket, DIN Rail Bracket for Controller &

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

Toggle Type Air Gripper

port Rc (G , NPT ) 1 8 1 8 1 8 Finger opening port O 34 S 7.5 30 20 4 x M6 x 1 bottom hole dia. 5.1 through Thread for mounting attachment MHT2-40DZ 2 x M8 x 1.25 thread depth 12 Mounting thread 20 40 4 x M6 x 1 thread depth 10 Mounting thread 18 37 48 10 4 x M8 x 1.25 thread depth 10 Mounting thread (Both sides) 7 7 Open 27 Closed 3 40 0.2 96 82 52 5 24 60 74 40 0.2 29 54.5 (136.5) 42

Rotary Table/Rack & Pinion Style Series MSQ

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Stroke A Stroke B Bore size [mm] L8 ZZ NA NB GC 32 198 294 67.8 10 36 40 220 328 75.2 10 38 ZZ + Stroke (A + B) L8 + Stroke (A + B) NA GC NB 50 222 360 74 10 38 63 252 390 87.2 10 42 80 270 442 90.8 14 46 100 290 472 99.8 14 50 151 Made to Order CP96 Series Symbol -XC11 Dual Stroke Cylinder/Single Rod Type 5 Two cylinders can be integrated by connecting them in line, and the cylinder stroke

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

1.00.28/0.31 (at 42/53 l/min, total lifting height 25/25 m)42/5360Rc 3/4Stainless steel, Brass, PVC, Nylon 12, Polyurethane, Copper brazing (Heat exchanger)????Stainless steel, Brass, Synthetic rubber, Copper brazing (Heat exchanger)3-phase 200 VAC 50 Hz, 3-phase 200 to 220 VAC 60 Hz Allowable voltage fluctuation ?

PF2D

View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-42 7 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Functions/PF2D Refer to the operation manual how to set and to operate. Output types Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected.

Vacuum Equipment

49 60 78 101 33 42 49 60 78 102 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13-1-19

XL

In the case of gases which cause a large amount of deposits, heat the valve body or use a model with heater to prevent deposits in the valve. 42 Specific Product Precautions 2 Series XL Be sure to read before handling. Mounting Operating Environment & Vacuum Characteristics Caution Caution All models 1.