5 Port Solenoid Valve Series SY3000/5000/7000/9000

VQ5 Rated voltage For DC VQC 5 24 VDC 6 12 VDC Electrical entry for D, Y VQZ V 6 VDC Nil Without light/surge voltage suppressor S Z With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) S 5 VDC R 3 VDC SQ For AC ( Hz) 50 60 DOZ and YOZ are not available. For AC voltage valves there is no S option.

LX

Brake Without brake With brake Nil B Home position switch None Yes (cable length 0.3m) Nil S Specifications 2 phase stepper motor (with/without brake) 5 phase stepper motor (with/without brake) Motor Lead screw Positioning repeatability Lead Speed Note 1) Slide screw 8mm 0.05mm 6mm 3 to 100mm/s 6kg 5kg 12mm 6 to 200mm/s 2kg 2kg 6mm 3 to 100mm/s 4kg 4kg 12mm 6 to 200mm/s 3kg 3kg Horizontal

ZP

Form w 1 Material e Vacuum inlet r Connection thread 10 13 16 04 A5 A6 4 20.6 10.4 3 N S U F GN GS 06 6 21.6 12.8 4 04 4 23.3 10.4 3 06 6 24.3 12.8 4.5 08 8 26.2 15.2 6 40 50 06 6 24.3 12.8 4.5 08 8 26.2 15.2 6 20 25 32 ZP R U A6 A8 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber 2 Indicates the minimum hole size of the adapter

Air Slide Table

V = mm/s V = 100 V = 100 6 6 Load mass m [kg] Load mass m [kg] 5 5 4 4 3 3 V = 200 V = 200 2 2 1 1 0 0 20 40 60 80 100 120 0 0 20 40 60 80 100 120 140 160 180 200 L3: Overhang Allowable range: 120 mm L3: Overhang Allowable range: 200 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ20B-100Z MXQ20B-125, 150Z 7 7 V = mm/s V = mm/s V = 100 V = 100 Max. operating pressure: 200 mm/s 6

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Table of Contents

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Table of Contents

Weight (g) End boss type (Symbol) Model H E M K MHZA2-6 28 28 28 28 MHZAJ2-6 29 29 29 29 12-2-24 24 Parallel Style Air Gripper Standard Type Series MHZ2 Size: 6, 10, 16, 20, 25, 32, 40 How to Order MHZ 6 MHZ2 D 6 M9B MHF MHL Number of auto switches Number of fingers 2 2 fingers Nil S 2 pcs. 1 pc.

CV/MVGQ

40 5.5 13 19.5 33.5 10 22 63.5 17 32 37 6 8 45 75 60 4 7 40 5.5 13 19.5 37.5 12 22 68 17 32 37 6 8 50 82 36 66 5 7 52 7 16 21 46.5 14 24 76 22 41 47.3 8 10 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Bore size (mm) Z NN NA N MM Symbol Q QY Bore (mm) 20 25 32 40 ZZ S ZZ S ZZ S ZZ S ZZ S 20 25 32 40 20 25 32

CV/MVGQ

26 0 0.033 32 0 0.039 15.5 M10 x 1.25 5.5 33.5 45 10 63.5 22 13 M26 x 1.5 17 32 6 8 15 30 19.5 M10 x 1.25 5.5 37.5 45 12 68 22 13 M26 x 1.5 17 32 6 8 15 34.5 19.5 M14 x 1.5 7 46.5 50 14 76 24 16 M32 x 2 22 41 8 10 21.5 42.5 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX QY Q Symbol S ZZ S ZZ ZZ S ZZ S ZZ

CJ2

0.8 Rod end nut CJ1 H + Stroke S + Stroke Rod section CJP Z + 2 x Stroke CJ2 Refer to page 6-3-11 for details of the mounting nut.

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Table of Contents

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Stability of suction position,

53 50 6 Width across flats 6 43 40 6 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-T32UMl-AL14 49.1 48.8 51.6 ZP3E-T40UMl-AL14 50.2 49.7 53.2 ZP3E-T50UMl-AL14 60.8 60.0 66.2 ZP3E-T63UMl-AL16 ZP3E-T80UMl-AL16 Width across flats 22 Rc1/8 M16 x 1.5 Width across flats 22 Rc1/8 M16 x 1.5 6 6 6 6 38.1 25 21.1

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

ISO Cylinder

38 20 13 10 4 26 6 38 20 13 12 6 38 8 58 25 18 16 6 38 8 58 25 18 20 6 46 8 66 32 20 25 6 46 8 66 32 24 Auto Switch Made to Order Refer to page 12 of Standard Type Single Rod for details of accessories (rod end, double knuckle joint, floating joint). 18 Air Cylinder: Standard Single Acting, Spring Return/Extend ISO Standards C85 Series 8, 10, 12, 16, 20, 25 How to Order C D S N S L V B 40

Air Cylinder

10.5 8 45 6 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 9 10 40 40 60 32 22 19.5 17 32 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 9 10 40 40 60 40 24 21 22 41 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 10 11 53 53 77 Dimensions by Stroke (mm) Stroke Bore size Symbol 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 S Z ZZ S Z ZZ S Z ZZ S Z

MY1

F FC FB For MY1M50, 63 SMC EY EC FH W 58 58 70 88 104 128 152 TT 5.4 (max. 11) 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 6 6 7 12 12 15 15 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FW 66 80 91 FH 13 16 17.5 FC 14 14 13 17 17 26 31 FB 54 67 78 F 4 4 6 6 6 6 6 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14

V100

voltage suppressor (Non-polar type) 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) DOZ is not available.

MY1

RB1412 6 6 7 12 12 10 12 14 17 MY1M25 MY1M32 MY1M40 66 80 91 6 6 6 54 67 78 13 16 17.5 MY1M50 MY1M63 6 6 40 52 20 26 66 77 26 31 5.5 5.5 73.2 73.2 15 15 13 (Max. 33) 13 (Max. 38) 128 152 RB2015 RB2015 With high load shock absorber + Adjusting bolt h TT h h MY1M H Stroke Bore size E F EA F EB MY1M16/20 W FC FB FW Stroke adjusting unit F (Shock absorber stroke) S Shock absorber Workpiece