Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 1 6.2 x 3 x 1.6 O-ring NBR C-14 10.5 x 8.5 x 1 C-5 @3 4 8-14-16 16 Mechanically Jointed Rodless Cylinder Series MY3A/3B Construction MY3B w e t u i @1 @6 @9 !3 !5 !6 !7 !8 MX MTS y q MY !0 @8 @7 !4 !9 r CY !

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

MLGP

1 !2 !3 !4 !5 !6 !7 !8 !

MLGP

1 !2 !3 !4 !5 !6 !7 !8 !

240

6N LECP6 (Step data input type) NPN 6P PNP 1N LECP1 (Programless type) NPN 1P PNP 1 1.5 A 10 1 1.5 3 32 3 3 B 15 LER 5 5 C 20 5 52 S Straight type communication plug connector3 LEH Produced upon receipt of order (Robotic cable only) Refer to the specifications Note 6) on page 380.

EXxx-OMU0020EN

Valve diagnostics 1 Table. 5-4 Valve diagnostics 1 Bit Description Explanation 0 Valve 0, 1 diagnostics 0: No error, 1: Short circuit 1 Valve 2, 3 diagnostics 0: No error, 1: Short circuit 2 Valve 4, 5 diagnostics 0: No error, 1: Short circuit 3 Valve 6, 7 diagnostics 0: No error, 1: Short circuit 4 Valve 8, 9 diagnostics 0: No error, 1: Short circuit 5 Valve 10, 11 diagnostics 0: No error

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

5 6 7 8 9 1 0 1 11 2 1 31 41 5 7 8 9 10 11 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R40 500 200 300 100 200 50 100 20 30 40 50 30 10 Useable range 10 5 5 Useable range 1 0 1 2 3 4 5 6 1 7 8 9 10111213 0 1 2 3 4 5 6 7 8 9 1 0 1 11 2 1 31 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R25

LEC-T1_C

(3-3) LECPLECA .59 (3-3-1) LECPLECA . 61 (3-3-2) LECPLECA . 62 (3-3-3) LECPLECA . 64 2 - (4) .68 (4-1) .68 (4-2) .68 (4-3) .69 (4-3-1) . 69 (5) .70 (5-1) .70 (5-2) .70 (5-3) .70 (5-3-1) . 70 (5-3-2) . 72 (5-3-3) . 73 (5-3-4) . 76 (6) .79 (6-1) .79 (6-2) .79 (6-3) .79 (6-3-1) . 79 (6-3-2) . 80 (6-3-3) . 82 (6-3-4) . 83 (6-3-5) . 83 (7) .84 (7-1) .84 (7-2) .84 (7-3) .85 (7-3-1) . 85 (7-3-

E-MY2_E_D

positions General A 1 2 5 7 State of indicator light D B C E 8 3 4 6 Switch No.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 1/8 88 64 62 62 143 113 111 107 42.5 34.5 30 24 13.5 10.5 10.5 10.5 47.3 37 37 30 M26 x 1.5 M26 x 1.5 M20 x 1.5 21 19.5 19.5 15.5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 26-0.033 0 32-0.039 0 82 36 10 8 M32 x 2 The bracket is shipped together.

SI Unit for Vacuum Manifold

of channel 0 ejector 1 Release confirmation of channel 1 ejector 2 Release confirmation of channel 2 ejector 3 Release confirmation of channel 3 ejector 0: No release 1: During release 1 4 Release confirmation of channel 4 ejector 5 Release confirmation of channel 5 ejector 6 Release confirmation of channel 6 ejector 7 Release confirmation of channel 7 ejector -23No.EX-OMY0014-A 5.1.2.

AC Servo Motor Driver (SSCNET /H Type)

Select 'MR-J4-B' through Model" "New" and "Project". -5- 1.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

time*1 1.5 ms or less (with anti-chattering function: 20, 100, 500, 1000, 2000, 5000 ms) Hysteresis Hysteresis mode Variable from 0*2 Window comparator mode Short circuit protection Yes Voltage output Output type Voltage output: 1 to 5 V Voltage output: 0.6 to 5 V Voltage output: 0.8 to 5 V Output impedance Approx. 1 k Output type Current output: 4 to 20 mA Current output: 2.4 to 20 mA Current

MLGP

Ball Bushing MLGPL20, 25 1 7 30mm stroke or less V = 200mm/s 1 8 Over 30mm stroke V = 200mm/s 5 5 25 25 Load weight m (kg) Load weight m (kg) 20 20 1 10 100 200 1 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 9 50mm stroke or less V = 200mm/s 20 Over 50mm stroke V = 200mm/s 200 200 100 100 100 100 100 80 80 80 63 63 63 50 40 50 50 40 Load weight m

MLGP

Ball Bushing MLGPL20, 25 1 7 30mm stroke or less V = 200mm/s 1 8 Over 30mm stroke V = 200mm/s 5 5 25 25 Load weight m (kg) Load weight m (kg) 20 20 1 10 100 200 1 10 50 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MLGPL32 to 100 1 9 50mm stroke or less V = 200mm/s 20 Over 50mm stroke V = 200mm/s 200 200 100 100 100 100 100 80 80 80 63 63 63 50 40 50 50 40 Load weight m

IDX-OM-W026

-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5-1 . 5-1 5-2 . 5-3 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 1 6-5 . 6-4 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 11 M 11-1 . 11-1 11-2 .

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Multi-Axis Step Motor Controller

1 !2 w e !3 !4 r t y u i !5 !6 No.

IDX-OM-W032

1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4