Use the manifold specification sheet to specify. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.
Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 4 6 4 6 1/4 1/4 1/4 5/16 5/16 5/32 5/32 Symbol Symbol 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76
1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !
6.5 4 0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note) Adjust the auto switch after confirming the operating
Switch No. 0 (Default) 1 2 3 4 5 6 7 8 9 Slower (Speeds up gradually.) Faster 6-4-1.
S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 B 15m (3
Deflection Data Page 94 Part Number Designations 100 LTF 6 P S2 F 2 R A1 R Photo micro switch Series Without switch/mounting rail Nil 6 8 1 2 3 4 5 6 NPN 1pc.
Measures . 1-6 1.5.1 Safety Instructions for Use . 1-6 1.5.2 Personal Protective Equipment . 1-7 1.6 Emergency Measures. 1-8 1.7 Waste disposal . 1-9 1.7.1 Disposal of refrigerant and compressor oil. 1-9 1.7.2 Disposal of product . 1-9 1.8 Material Safety Data Sheet (MSDS) . 1-9 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2
V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N o r m a l Fig. 6-3 Alarm indication in the event temp. upper and lower limit occurs LIGHT W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E Remote off Fig. 6-4 Alarm indication in the event Remote off occurs 6.2 Alarm indication 6-2 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.3 Content of Alarms Table 6-2 Content of alarm (1/2) Temp.
Color Color Page Page M Metric size (mm) Inch size (inch) Metric size (mm) Inch size (inch) 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 " (3.2) " (3.2) 6 10 12 16 6 10 12 16 General tubing 1.5 MPa max. at 20C Use in spatter generating atmosphere flame resistant material H Black Black 15-6-10 Nylon Tubing Series T White
5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.
1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !
1 !5 u !9 t !4 w !7 @0 e r y @1 q i !6 !3 !0 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Note Bore size (mm) Kit no.
Measures . 1-6 1.5.1 Safety Instructions for Use . 1-6 1.5.2 Personal Protective Equipment . 1-7 1.6 Emergency Measures. 1-8 1.7 Waste disposal . 1-9 1.7.1 Disposal of refrigerant and compressor oil. 1-9 1.7.2 Disposal of product . 1-9 1.8 Material Safety Data Sheet (MSDS) . 1-9 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2
RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8
(FD) D side Filter regulator SMC AP: Auto-drain (INA-13-854DG) Blanking plate (MP3-1) 212.5 (191: MP) MP: Manual drain (INA-13-854G) Plate assembly (VVQ4000 60A-1) 106 17 Drain port 6 AP: 10 MP: 6 Rc 1/2 (Supply port: Po) 4-Rc 1/2 17.5 42 70.5 119 " 185 5(R1), 3(R2) port P0 SMC R2 R1 5 1 P 3 30 PE 18 18 2-Rc 1/8 (Pilot EXH port) 70 (91) 29 38 163 L n Dimensions Formula L1 = 25n + 63, L2
5 @1 !4 e High precision type Basic type !6 !6 u !7 y !1 Component Parts Component Parts No. Material Note Description No.
Brown 2 A B-1 Cable length (L) Red 1 A A-1 Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A/COM B-3 A 10m *1) Blue 4 COM-B/ A-3 B 15m *1) Shield Cable color Terminal no. C 20m *1) Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 *1) Produced upon receipt of order. A A-5 Black 6 Only Robotic type cable can be selected.
6 !7 o !0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.
6 !7 o !0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.