Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: M5 (Body Ported M5X0.8), Thread

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Rated Voltage: 6 (12VDC), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note) M5 size: S (with seal) is not necessary. 611 A AS Series Construction AS1201-M5 AS2201/3201/4201 AS3201-02 o !1 w r u y e t !5 !2 !4 q !0 !3 i Component Parts No.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 65 lb

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

2/3 Port Solenoid Valve for Chemicals

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 22.00000 lb. N59.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

JXCx-OMU0004

(P.50 40 No.JXC-OMU0004-A 8.2 () OUT0 to OUT3 M 8.3 10. (P.50) (1) M 41 No.JXC-OMU0004-A 2 * M (3) () M () ON M 42 No.JXC-OMU0004-A 8.4 1 1 1 1 1 1 1 10.

Bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 12 & 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M

Bore sizes (mm): 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M) +/-0.03

Bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 12 & 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M

Bore sizes (mm): 16, 20, 25, 32, 40, 50, 63, 80, 100; Non-rotating accuracy all bore sizes: +/-0.01° (Type A); Non-rotating accuracy 16mm bore: +/-0.07° (Type M) +/-0.05 (Type L); Non-rotating accuracy 20 & 25mm bore: +/-0.06° (Type M) +/-0.04 (Type L); Non-rotating accuracy 32 & 40mm bore: +/-0.05° (Type M) +/-0.03 (Type L); Non-rotating accuracy 50 & 63mm bore: +/-0.04° (Type M) +/-0.03

T (w/o Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: T (w/o

VGA342

Supply side wOthers M5 size hole at the left side of the adopter plate is bleed port for spool valve. Do not plug or tighten it. 3.4-10

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)