AC Servo Motor Driver (MECHATROLINK-II type)

After removing the cause of the alarm or warning, the alarm or warning can be deactivated in any of the methods marked in the alarm / warning deactivation column. "6" of the figure, "B" of the alphabet, and "D" are displayed as follows. 6 B D 7.1 Alarms List This section provides list of alarms.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

P (Port size) Operation P (Port size) Model CYV15 CYV32 Caution 5/16-24 UNF 7/16-20 UNF 1. The maximum operating pressure for the vacuum rodless cylinder is 0.3 MPa.

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override 2-4.6 mounting holes Manual override 37 34 M8 connector M8 connector 74.5 74.5 66.5 23 23 66.5 PE port PE port PE port PE port 13.5 13.5 8.5 8.5 SMC SMC 16 16 1/8-2 ports 3, 5 port 1/8 1 port 16 16 1/8-2 ports 3, 5 port 1/8 1 port 5 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Industrijska Avtomatika d.o.o.

Electro-Pneumatic Positioner Series IP8000/8100

D. 7 to 9:P368010-26 Applicable cable O.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" Flow rate l/min (ANR) 1000 680 440 480 420 210 150 INOUT Effective area mm 15.2 10.4 6.7 7.3 6.4 3.2 2.3 Note 1) Flow rate values are at a pressure of 0.5MPa and temperature of 20C.

ZL3-OM00801

0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2), 3) 1 (2/V) 1 (G) 40

Shuttle Valve/AND Valve with One-Touch Fittings

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" 1000 680 440 480 420 210 150 Flow rate l/min ANR (SCFM) INOUT (35.0) (23.8) (15.4) (16.8) (14.7) (7.35) (5.25) Effective area mmCv 15.2 10.4 6.7 7.3 6.4 3.2 2.3 (0.84) (0.58) (0.37) (0.41) (0.36) (0.18) (0.13) Note 1) Flow rate values are at a pressure of 0.5MPa (72 psi) and temperature of 20C (68F).

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Specification Specification AMH450 to AMH850 Applicable model AMH150 to AMH850 Applicable model How to Order Refer to "How to Order" for standard type (p.4.6-16). How to Order Refer to "How to Order" for standard type (p.4.6-16).

Floating Joint/Stainless Steel Type Series JS

Example: Nut for JS40 2 Series JS Dimensions JS10, 16 M M U D J U F B G H C E P A Use a 4mm precision watch wrench to attach the JS10 male threads.

Nozzle Diameter: ø2.0, Body Style: Body Ported, Vacuum Pressure: -48KPa{-360mmHg}, SUP: One-touch Fitting Ø12, VAC: One-touch Fitting Ø16, EXH: One-touch Fitting Ø16

Nozzle Diameter: ø2.0, Body Style: Body Ported, Vacuum Pressure: -660mmHg, SUP: One-touch Fitting Ø12, VAC: One-touch Fitting Ø16, EXH: One-touch Fitting Ø16

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

265 255 241 14 284 274 260 15 303 293 279 16 322 312 298 17 341 331 317 18 360 350 336 19 379 369 355 20 398 388 374 6 3 Port Direct Operated Poppet Series VKF300 Base Mounted Type Common SUP, Common EXH/Side Ported Type 42 Manifold Grommet: G DIN terminal: D Manual override (non-locking) Applicable cord O.D. 4 to 6.5 4Rc(PT) 1/8 (ports P, R) 83 71.5 Max .10 2-4.5 (mounting holes) 75.5

HRS100/150

Facility water temperature 32C 18 Facility water temperature 32C 16 16 Cooling capacity [kW] Cooling capacity [kW] 14 14 12 12 10 10 8 8 Facility water temperature 40C 6 Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature [C] 104 Thermo-chiller Standard Type HRS100/150 Series Pump Capacity HRS100

CEx-OMQ0011

M6x1 11 54 6.5 M6x1 12 84 32 15 M8x1.25 14 64 8.5 M8x1.25 12 102 41.5 19 M10x1.5 R S T U V W X Y Z 22 63.5 23.5 22 41 16 9 30 34.5 26 77.5 32.5 27 56 19 10 37 42 37.5 95 50.5 35 68 23 23 45 51 I J K L M N O P Q 76.5 40 46 28 11 14.5 28 15 16 91 46.5 58 32 15 16 30.5 16 21.5 110 55 68 36 16.5 22 37.5 17.5 24.5 A B C D E F G H ML2B25 110 220 206 42 138 93.5 16 73 ML2B32 140 280 264 51 168

Thermo-chiller

Operation Display Panel Page 16 List of Function Page 16 Alarm Page 17 Communication Function Options Page 18 With Caster Adjuster-Foot Page 18 With Earth Leakage Breaker Page 18 With Fluid Fill Port Optional Accessories Page 19 q Piping Conversion Fitting Page 19 w Caster Adjuster-foot Kit Page 20 e Electric Conductivity Control Set Page 20 r Bypass Piping Set Page 21 t Relief Valve Set

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

For D-A93, only outward electrical entry (D dimension) is available. Dimensions in parentheses apply to 12-CXSJ6. CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

VCS

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 Fig. 8 D-F8 0.10 to 0.20 Set screw Auto switch 29 - Auto switch proper mounting position at rotation end Table 11 Auto Switch Rotation range / Actuation / most sensitive position A A A A B B B B D-M9 D-F8 Magnet Operation range at optimum set position (

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.