Compact Cylinder

F 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N Q W Z A B A B 12 5 to 30 19.5 16 23

No more element replacement!

q A (43) OUT IN e e 150 r t B 120 327 188 (519) w w 84 OUT 2 x R1 r IN 53 DRAIN G1/4 Note Component Parts Dimensions (mm) A B Model Bore size (Nominal size B) No.

Pressure Switch/Reed Switch Type

Place them in alphanumerical order. q e w Switch Characteristics Description Symbol Example) IS10-N01-6PZ Nil N Rc NPT q q Thread type Max. contact capacity AC 2 A, DC 2 W 24 V or less Note 1) Set pressure range of 6P(L, Z) is 0.2 to 0.6 MPa (30 to 90 psi). This product is for overseas use only according to the new Measurement Law.

VHS

0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Fluoropolymer Piping Equipment

P0.01MPa 2 0 2 4 6 8 10 0 Number of needle rotations 939 B LVN Series Construction t r w e q With reducer i y u Part lists Material Description No.

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Valve Single Unit

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

High Purity Fluoropolymer

1 1 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" 1" x 7/8" 3/4" x 5/8"

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

rep-modular-e

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

High-Precision Digital Pressure Switch

)/ISE20C(H) Series How to Order Rated pressure range ISE20C 0.1 to 1 MPa ISE20CH 0.1 to 2 MPa M For positive pressure ISE20C 02 X For vacuum/ compound pressure ZSE20C X M 02 q w e r t y u i q Rated pressure range w Output specification u Option 2 * Note that the optional parts that can be used vary depending on the piping direction.

Plug-in/Plug Lead: Single Unit

VQ5151 VQ5150 (A) 4 (B) 2 (A) 4 (B) 2 VQ5 VQZ 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD q w e q w VQ5251 (A) 4 (B) 2 VQ5250 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w r q w e VQ5350 VQ5450 VQ5351 VQ5451 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ5550 VQ5551 (A) 4 (B) 2 (A) 4 (B) 2 1

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Compact Vacuum Unit

3 u w q e i !4 !5 r t y !2 !2 o !0 Manifold/Pressure Sensor Single Unit/Vacuum Pressure Switch Component Parts Description No. 1 2 3 4 5 6 Material Note Resin/HNBR Resin/Brass/HNBR Resin Aluminum Aluminum Resin Valve body assembly Needle assembly Body Nozzle Diffuser Silencer cover White White Vacuum pump system: Spacer Vacuum pump system: None White Replacement Parts Description No.

3

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

Mini Free Mount Cylinder

Grease part no.: GR-L-005 (5 g) 11 Resin Damper B 12 Steel wire Nickel plated Rod end nut 13 NBR Piston seal 14 NBR Rod seal 15 NBR O-ring 14 Series CUJ Dimensions: 12, 16, 20 Double Acting; Single Acting, Spring Return Lateral Mounting Without Magnet: CUJB 2 x P (Port size) N Element (for 12, 16) Plug (for 20) NN GB GA Width across flats V K C J R D H 2 x Q 2 x 2 x QA F + Stroke E (E) B