Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 03, Type: Common Exhaust, Thread: NPT

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 05, Type: Common Exhaust, Thread: NPT

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 04, Type: Common Exhaust, Thread: NPT

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 07, Type: Common Exhaust, Thread: NPT

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 06, Type: Common Exhaust, Thread: NPT

Series: VFA5000, Manifold: P.R Port Size 3/8, Stations: 10, Type: Common Exhaust, Thread: NPT

Piping: Common SUP/Common EXH, Stations: 4 Stations, Bracket: None, Thread: NPT, CE Approval: -

Piping: Common SUP/Common EXH, Stations: 8 Stations, Bracket: None, Thread: NPT, CE Approval: -

Piping: Common SUP/Common EXH, Stations: 3 Stations, Bracket: None, Thread: NPT, CE Approval: -

Speed Controller: Standard Type Large Flow In-line Type AS Series

20 Caution L (2) Note 1) AS800 is available as special.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Fittings & Tubing Air Cylinders Rotary Actuators Size: 50 Single shaft Double shaft 8 x M8 x 1.25 depth 8 (Opposite side 4 locations) 118 44 62 4 x 9 (Mounting hole) 48 20 15 11 0 0.2 15 (g6) 14 0 0.2 25 (h9) 17 M5 x 0.8 (Vacuum suction port) 15 (g6) 25 5 Auto switch 2 x Cushion valve (Width across flats 3) 9.5 9.5 0 0.030 5 36 2.5 98 7.5 6 7.5 6 108 5 33 14.5 41 A port 2 x Rc1/8 B port 8.5

XLAQ/XLDQ

20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

1

Tightening of Fitting Face seal fitting 1/8 turn after tightening by hand Compression fitting 1 1/4 turns after tightening by hand Tightening of Female Thread NPT, Rc1/8 7 to 9 Nm NPT, Rc1/4 12 to 14 Nm NPT, Rc3/8 22 to 24 Nm Electrical Connections Caution 4. Connection of piping to products When connecting piping to a product, avoid mistakes regarding the supply port, etc.

99

Test dust: ACFTD / Flow rate: 35 L/min Dust concentration: 10 mg/L / Temperature: 20C Element: EJ801S Schematic diagram of filtration efficiency data measuring circuit FQ1 EJ-2 m FN 100 99 Dust feeder Initial filtration efficiency (%) EJ-4 m EB ES Tank Flow meter EJ-6 m Differential pressure gauge EJ-13 m 95 Pressure gauge Downstream side sampling Upstream side sampling 90 0 2 4 6 8 10 12 14

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

EX600-SEN3_4_eng

(M4 x 20) Tightening torque: 0.7 to 0.8 Nm. The tightening torque at the valve side depends on the valve type. Refer to the operation manual of the corresponding valve manifold.

EX600-SEC_eng

The output rating is tested as a DC output for General use. : Refer to "Parameter Setting", for the further details. (2)Mount the end plate bracket (EX600-ZMA2) to the end plate at the opposite end to the valves, using 2-M4 x 14 screws. Tightening torque: 0.7 to 0.8 Nm.

EX600-SPN_eng

(M4 x 20) Tightening torque: 0.7 to 0.8 Nm. The tightening torque at the valve side depends on the valve type. Refer to the operation manual of the corresponding valve manifold.

10-my2h_my2ht-e

5 are shipped as single units, a grease pack (20 g) is included. Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g) , GR-S-020 (20 g) 104

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.