Model Selection 1

/N.O. 1/8 to 3/4 0 to 3 (1) 17-2-57 VV2CW2/3/4 N.C./N.O. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-64 VDW10/20/30 Single unit N.C. M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

NCQ8

+0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.002 0 +0.016 +0.008 075(3/4") 075(3/4") #10-32UNF #10-32UNF 5/16 0.31 5/16 0.31 +0.002 0 +0.020 +0.012 106(1 1/16") 106(1 1/16") 5/16-24UNF 5/16-24UNF 3/8 0.71 3/8 0.71 +0.002 0 +0.020 +0.012 150(1 1/2") 150(1 1/2") 3/8-24UNF 3/8-24UNF 3/8 0.71 3/8 0.71 +0.002 0 +0.020 +0.012 1/2-20UNF 1/2-20UNF 1/2 0.87 1/2 0.87 200(2"), 250(2 1/2") 200(2")

EX180-SDN3_4_5_6_eng

Read and understand this operation manual carefully before assembling, operating or providing maintenance to the product. 4 Display LED diagnostic display. 0 0 0 0 0 0 #0 Switch setting part Configures the MAC ID/communication speed. 5 #1 0 0 0 0 0 1 0 #2 0 0 0 1 0 : : : : : : : Solenoid valve power supply 24 VDC 1 1 1 1 #62 1 0 24 VDC 1 1 1 1 #63 1 1 The default setting is all switches ON

EX250-SPR_eng

Offset 3: Power supply connector Supplies power to the solenoid valve, the Output block, SI unit and the Input block. 2 30 28 26 24 22 16 0 4 6 4 2 0 6 20 18 4 2 0 4 0 4 0 Input No. Bit No.

Cylinder with Lock Series MNB

+0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 11

Modular Type Regulator Series AR

When the knob is not easily locked, turn it left and right a little and then push it (when the knob is locked, the "orange mark", i.e., the gap will disappear). 0.1 0.1 0 0 0 0 1000 2000 3000 4000 5000 200 400 600 800 Flow rate L/min (ANR) Flow rate L/min (ANR) AR25 Rc 3/8 AR50 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 0 500 1000 1500

Modular Type Filter Regulator Series AW

Refer to Features 1 for details. 57 Filter Regulator AW10 to 40 Flow Characteristics (Representative values) Condition: Inlet pressure 0.7MPa AW10 AW30 Rc 3/8 AW40-06 Rc 3/4 M5 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 150 125 100 75 50 25 0 1000 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 0 0 500

Digital Flow Switch Series PFA For Air Series PFW For Water

to 0.5MPa 1.0MPa 10kPa (at 200l/min) 30kPa (at 500l/min) 3kPa (at 50l/min) 3kPa (at 100l/min) 0 to 9l 0 to 50C (with no condensation) 5% F.S. or less Accumulated flow range Operating temperature range Linearity Repeatability 1% F.S. or less 2% F.S. or less Temperature characteristics 3% F.S. or less (15 to 35C), 5% F.S. or less (0 to 50C) Maximum load current: 80mA, Internal voltage drop

Ejector Valve Unit, Series ZYY/ZYX

0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics

ChemicalThermo-con

Clear water HED005 HED007 HED003 0 2 1 3 4 5 gpm 2 1 3 4 5 gpm 0 35 kPa 35 kPa HED005-HW13 HED007-HW13 5 psi 5 psi HED003-HW13 30 30 4 25 Pressure loss (kPa) Pressure loss (kPa) 25 3.5 3.5 20 20 3 15 15 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2 10 HED005-HW19 HED007-HW19 10 1.5 1.5 HED003-HW19 5 0.7 0.7 0 0 0 5 10 15 20 0 5 10 15 20 Flow rate (L/min)

AR Series Modular Type Regulator

(ANR) AR25-A Rc3/8 AR30-A Rc3/8 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 500 1000 1500 0 500 1000 1500 Flow rate L/min (ANR) Flow rate L/min (ANR) AR40-A Rc1/2 AR40-06-A Rc3/4 0.6 0.6 0.5 0.5 Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 0 0 1000 2000 3000 Flow rate L/min (ANR)

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

+0.1 A NA B 0 0.3 S + Stroke H U CZ 0 0.3 Z + Stroke R ZZ + Stroke (mm) * A clevis pin and retaining rings are included.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 23 23 20 20 20 163 173 175 187 218 218 264 264 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/

Micro Mechanical Valve Series VM1000

Other parts and actuator cannot be replaced. 2290 Series VM1000 Micro Mechanical Valve How to Order R 00 4N 0 0 0 VM1 Color of push button Actuator type Red Green Black Basic Roller lever One way roller lever Toggle lever Push button G R Applicable tubing (Material/Size) Nylon 4/2.5 (T0425) Nylon 4/3 (T0403) 00 01 02 08 32 B 4N 4NU Polyurethane 4/2.5 (TU0425) Soft Nylon 4/2.5 (TS0425) 1 0

RSH

Refer to p.0-44 and 0-46 for common precautions of auto switches.

Pressure Sensor Controller

to -101 kPa 0 -101 kPa 10.1 kPa For compound -100 kPa to 100 kPa -100 kPa 100 kPa For low pressure 0 to 100 kPa 0 100 kPa -10 kPa 0 to 1 MPa 0 1 MPa -0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa -50 kPa Range Rated pressure range C D F For low differential pressure 0 to 2 kPa 0 2 kPa -0.2 kPa -32No.PS-OMG0002-G Dimensions Body dimensions Mounting using mounting option Mounting by

Digital Flow Switch (Remote type monitor unit)

to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min Accumulated Setting/display flow range 3 0 to 19 L flow Min. setting/display unit 1 L Accumulated flow volume per pulse 0.1 L/Pulse 0.1 L/Pulse 0.1 L/Pulse 1 L/Pulse Display unit

PFxx-OMS0001CN

cfm 0.874.2 cfm 0.218.6 cfm 3 0999,999,999 ft 0.1 cfm 3 1 ft 3/pulse 1 ft 3/pulse 0.1 ft -0.918.6 cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm 3 1 ft -28No.PF-OMS0001CN-A [F 1] OUT1 OUT1 ( )OUT2 H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) 0 ON 0 OFF () 0 ON 0 OFF () -29No.PF-OMS0001CN-A ( )OUT2 3 3 3

Output block / Power block

LED 0 or LED 1 does not turn ON. LED 0 or LED 1 does not turn OFF. EX9-PE1 (Power block) Error Countermeasures Check external power supply (24 VDC). Check the operating load capacity. Replace Power block.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

to 5mm on one side only 0 to 6mm on one side only Rubber stopper 0 to 3 mm at both ends Stroke adjustment range 0 to 5 mm at both ends 0 to 4 mm at both ends Metal stopper +1 0 mm Stroke length tolerance 11-: Fluorine grease Grease 22-: Lithium soap base grease Grade 1 Grade 1 Without adjuster Particle generation grade (Refer to front matter pages 13 to 22 for details.)