Ｖ cylinder

socket head bolts 4 3 Cylinder tube 1 21 Needle guide head bolts 2 4 Piston rod 1 22 Speed control needle 2 5 Piston 1 23 Lock nut 2 6 Cushion ring 1 24 Wear ring 1 7 Cushion ring B 1 25 Rod seal 1 8 Bushing 1 26 Piston seal 1 9 Cushion valve 2 27 Cushion seal 2 10 Snap ring 2 28 Cylinder tube gasket 2 11 Tie rod 4 29 Cushion valve seal 2 12 Tie rod nut 8 30 Pipe gasket 2 13 Spring washer 8 31

SI unit for DeviceNet TM

PRODUCT NAME SI unit for DeviceNetTM MODEL / Series / Product Number EX120-SDN1(-X2/-X26/-X77) EX121-SDN1(-X2/-X26/-X77) EX122-SDN1(-X2/-X26/-X77) EX124U/D-SDN1(-X2/-X26/-X77) Contents Safety Instructions 2 How to Order 8 Summary of Product elements 9 Installation and wiring 11 Installation 11 Wiring 11 LED indication and settings 14 DeviceNetTM Objects 22 Troubleshooting and Maintenance 31

SI unit (CC-Link compatible)

No.14 3 E5H RX5F to RX50 165H RY5F to RY50 RX0F RY0F Output No.15 E6H RX6F to RX60 166H RY6F to RY60 RX10 RY10 Output No.16 4 E7H RX7F to RX70 167H RY7F to RY70 RY11 Output No.17 E8H RX8F to RX80 168H RY8F to RY80 RY12 Output No.18 5 Unused E9H RX9F to RX90 169H RY9F to RY90 : : EAH RXAF to RXA0 16AH RYAF to RYA0 RY1E Output No.30 6 EBH RXBF to RXB0 16BH RYBF to RYB0 RX1F RY1F Output No.31

EtherNet/IP TM Compatible Fieldbus System

. *: Slave information is not available for the Gateway distribution system (64 point) mode. 31 No.EX-OMS0014-A Diagnostic error Example below shows Slave information when a diagnostic error is generated. Diagnostic error name is displayed in Message space.

Fieldbus Device Handheld Terminal

(Refer to page 31) 5. Parameter Default Parameters of each unit are reset to the default values. (Refer to page 32) 6. Clear Error Log All error logs are cleared. (Refer to page 32) -27No.EX-OML0011-C 1. Tag Input It is possible to set an arbitrary name for each unit. 1. Select [1. Tag Input] and press the button. 2. Select the unit with the and buttons and press the button. 3.

IDX-OM-W013

specification] Terminal block C3 Ventilation direction Ventilation direction Ventilation air outlet J M K L2 N2 H Drain tube (O.D. 10,length approx.0.8m) 4 13 [100V AC specification] [200V AC specification] Power cable outlet( 17) Power cable(Length:approx.1.9m) measuremm Model Port size A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 32 230 802 355 3001 80 2402 15 422 31

Electrostatic Sensor Monitor

Measurement mode 15 Function selection mode 18 Default setting 18 F0 Select connect sensor 19 F1 Operation of OUT1 20 F2 Operation of OUT2 22 F3 Measured distance setting 22 F4 Setting of switch output response time 23 F5 Select analog output filter 24 F6 Setting of security code 25 F98 Setting of all functions 26 F99 Reset to the default setting 27 Other settings 28 Error Indication Function 31

Fieldbus system (CC-Link compliant)

Contents Safety Instructions 3 Model Indication and How to Order 8 Summary of Product Parts 9 Definition and terminology 10 Common Specifications 12 EX510 GW Unit Summary of Product Parts 13 Mounting and Installation 14 Installation 14 Wiring 15 Setting 20 Specifications 26 Specifications 26 Dimensions 27 SI Unit Summary of Product Parts 28 Mounting and Installation 30 Installation 30 Wiring 31

Fieldbus system (DeviceNet compliant)

series Power consumption SY3000/5000/7000/9000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) SYJ3000/5000/7000 Standard: 0.4 W (approx. 17 mA) With power saving circuit: 0.1 W (approx. 4 mA) VQZ1000/2000/3000 Standard: 1.0 W (approx. 42 mA) Low wattage: 0.5 W (approx. 21 mA) Refer to "Wiring of the branch cable and connector for connecting load" on page 31

SI unit for CC-Link

RX6F to RX60 166H RY6F to RY60 RY0D Output No.13 4 E7H RX7F to RX70 167H RY7F to RY70 RY0E Output No.14 E8H RX8F to RX80 168H RY8F to RY80 RX0F RY0F Output No.15 5 E9H RX9F to RX90 169H RY9F to RY90 RX10 RY10 Output No.16 EAH RXAF to RXA0 16AH RYAF to RYA0 RY11 Output No.17 6 EBH RXBF to RXB0 16BH RYBF to RYB0 RY12 Output No.18 Unused RY1D Output No.29 RY1E Output No.30 RX1F RY1F Output No.31

VFR5000 Series

Set pressure range 0.1 to 0.83 MPa (2) Terminal block -5 to 60 (No freezing) (3) Ambient and fluid temperature marking Model A B + B Port size fo connection of pressure gauge Rc 1/8 VFR5100 A side COM Weight (kg) 0.83 Effective area at supply side (mm 2) PA 44 38 32 VFR5200 A side COM B side VFR5400 3 5 A side COM B side S at P 1=0.7 MPa/P 2=0.5 MPa PB 38 40 31 Effective area at exhaust side

Digital Flow Switch

. -70No.PF-OMS0002-B Dimensions PFMC7501/7102/7202 Symbol Model Piping port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Bracket dimensions Symbol Model S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 -71No.PF-OMS0002-B Lead

POWER CLAMP CYLINDER

Use M12-4 pin socket (female) A cord. 28 - Refer to page 15 and 16 for procedures for changing the stopper bolt and switch positions and for top cover replacement instructions. 29 - 30 - 31 - 32 - 33 - Troubleshooting Trouble Possible cause Countermeasures Operation has lost smoothness. 1. Insufficient pressure. Supply appropriate pressure. 1. Insufficient air pressure..

LA-OMP0023

April 2013 Addition to note Correction of words Correction of timing chart C: Revised in November 2015 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012-2013 SMC Corporation All Rights Reserved 31

IZ-OMK0015

Installation 10 45 distance 25 100 Detection port 50 180 Detection range 30 Doc.No.IZ-OMK0015D Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved 31

Programless controller Step motor (servo 24 VDC)

(g) 31 No. JXC-OMU0029-A 4) Move the electric actuator to required position with external force. Lock in the position by pressing the set button (g). (g) (f) (g) At this point, the position is not stored. If the power supply is cut, it is necessary to started from procedure (1) Supply of power.

Solenoid Valve

No.SQ1000V-OMQ0002-B 15 No.SQ1000V-OMQ0002-B 16 No.SQ1000V-OMQ0002-B 17 No.SQ1000V-OMQ0002-B 18 No.SQ1000V-OMQ0002-B 19 No.SQ1000V-OMQ0002-B 20 No.SQ1000V-OMQ0002-B 21 No.SQ1000V-OMQ0002-B 22 No.SQ1000V-OMQ0002-B 23 No.SQ1000V-OMQ0002-B 24 No.SQ1000V-OMQ0002-B 25 No.SQ1000V-OMQ0002-B 26 No.SQ1000V-OMQ0002-B 27 No.SQ1000V-OMQ0002-B 28 No.SQ1000V-OMQ0002-B 29 No.SQ1000V-OMQ0002-B 30 No.SQ1000V-OMQ0002-B 31

High Vacuum L Type Valve

Construction / Operation Retainer 1 Coil assembly (maintenance service part) Control power supply 2 Core assembly (maintenance service part) Armature assembly (maintenance service part) Cover 6 4 5 Core O-ring external seal (maintenance service part) 31 Bonnet O-ring external seal (maintenance service part) 32 7 Spring 8 Bellows 9 Valve Body 1 0 Armature assembly includes (7), (8), and (9

10-my3m-e

MY3B25-16A-Stroke MY3B40-16AStroke MY3B63-16AStroke Polyamide Dust seal band 10 MY3B16-16BStroke MY3B25-16BStroke MY3B40-16B-Stroke MY3B63-16BStroke 1 Stainless steel 15 Tubing gasket RMB-16 RMB-25 RMB-40 RMB-63 2 NBR 16 Piston seal RMY-16 RMY-25 RMY-40 RMY-63 2 NBR KA00020 KA00048 KA00156 KA00036 O-ring 28 4 NBR (6.2 x 3 x 1.6) (10.5 x 8.5 x 1) KA00309 KA00309 KA00320 KA00402 O-ring 31

Compact Guide Cylinder

H 12 42 29 7 6 80 89 18 25 4.5 5 26 58 16 46 33 7 6 88 98 22 32 5.5 5 30 64 20 53 37 8 8 102 112 24 38 5.5 6 36 83 25 53.5 37.5 9 7 114 126 30 40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198 46 65 11 10 64 148 63 77 49 12 16 192 212 58 75 11 10 78 162 80 96.5 56.5 16 24 238 262 54 90 13.5 16 91.5 202 100 116 66 19 31