VXF

Pressure 0.7 MPa PM: Raised up to 0.43 MPa 6 x 6 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 8 pcs. 6 x 10 pcs. 6 x 10 pcs. Flow rate Q (Nl) Flow rate Q (Nl) Tube 2,000 Tube 2,000 mm 500 mm 6 x 8 pcs. 6 x 8 pcs. 500 mm 500 mm mm 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs. 6 x 6 pcs.

ZX

VJ10-20-4A-6 2 pcs. Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

RSQ

6 e !0 !3 !2 !1 w o @0 !7 i !9 !

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Compact Slide Series MXH

20 1 MXS 20 16 16 0.1 0.01 MXQ 10 10 6 6 MXF 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 MXW Overhang L (mm) Overhang L (mm) Overhang L (mm) MXJ Graph (5) Load Eccentricity 100 mm Graph (8) Load Eccentricity 100 mm Graph (11) Load Eccentricity 100 mm MXP 1 10 10 MXY Mass m (kg) 0.1 MTS 1 Mass m (kg) Mass m (kg) 20 16 10 6 1 20 20 16 10 16 0.01 0.1 10 6 6 0.001 0.1

AC Servo Motor Driver (Pulse input type/Positioning type)

Travel amount per 1 command pulse (P=10m) 1000 P: Travel amount per 1 command pulse [m] *1 n1/n2: Pulley ratio *2 Actuator lead (L = 6mm) Pulley ratio (n1/n2 = 1/1) [PA05] = 100 (Initial value) 1 [PA06] 10010010 1001000.01 1000 = = [PA07] 6 1/1 6 [PA06] 100 = [PA07] 6 *1 In case position control mode, "Travel amount per 1 command pulse"P = 10[um] In case positioning mode, "Travel amount per

MLGP

1 !2 !3 !4 !5 !6 !7 !8 !

MLGP

1 !2 !3 !4 !5 !6 !7 !8 !

RB/RBL/RBQ

C J G5-S Material: Carbon steel Material: Polyurethane (mm) (mm) (mm) CV MM A B M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 B 3.5 4.5 5 6 6.6 C 22 27 32 41 41 h1 25.4 31.2 37 47.3 47.3 C 4 8 8.3 11.3 13.1 h M16 x 1.5 M20 x 1.5 M25 x 1.5 M30 x 1.5 M32 x 1.5 MM B 6 6 6 6 6 C 22 27 32 41 41 Part no. Part no. Part no.

RB/RBL/RBQ

76 27 37.5 44 53 63 25.4 31.2 37 47.3 47.3 6 6 6 6 6 RS H A RZQ MI W S Replacement Parts Hexagon Nut Option CEP1 (2 pcs. standard equipment) Stopper nut Bumper CE1 CE2 ML2B ) ( These are the replacement part for the cap type.

3 Port Air Operated Valve Series SYJA300

Bottom Side 1/4 1/8 1/8 1/4 1/4 P, R port 1/8 Port size 1/8 1/8 6 one-touch fitting 1/8 1/8 A port C6 8 one-touch fitting C8 X port Note) M5 x 0.8 M5 x 0.8 M3 x 0.8 Note) Only for external pilot Flow Characteristics Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv Type SS3YJ7-20 1/8 2.2 2.2 2.1 2.2 2.0 1.6 2.1

ZQ-OM01301

0.5 d 1.0 1.0 d 5.0 point(oC) 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000 3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 3.3.2 Air pressure 1) Operation with a pressure exceeding the maximum operating pressure leads to breakage of the product. 13 - Doc.

LEC-OM032xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 29 - 8.

AIR COMBINATION

149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 3/4 AC50-B 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 3/41 AC55-B 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 1 1 AC60-B 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional specifications Semi-standard specifications With barb With Metal bowl Metal bowl Square type Digital Round

EXxx-OMZ0016

System setting parameters (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) Classification Parameter Set value Initial value Note (1) I/O mapping Fixed mapping Fixed mapping (2) Diagnostic mapping Details Details (3) Analog output update time*1 0.1/0.2/0.5/1/2/5/10/30/60 s 1 s Output while upper communication is not established Output action setting for when the upper communication is abnormal (4)

EXxx-OMN0027CN

0 Byte 7 Bit No. 0 1 1 1 2 1 3 1 4 1 5 1 6 1 7 1 System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No. 0 1 1 1 2 Reserved 3 1() 4 1() 5 Reserved 6 1 7 1 -73No.EX-OMN0027CN-D System diag.3 7 6 5 4 3 2 1 0 Byte 9 Bit No. 07 Reserved System diag.4 7 6 5 4 3 2 1 0 Byte 10 Bit No. 0 1 1 1 2 1 3 1 4 1SI 5 Reserved 6 Reserved 7 Reserved -74No.EX-OMN0027CN-D Header 7 6 5 4 3 2 1 0 Byte 19 0 1 0 0 1

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

1 !2 !3 !6 !7 !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

1 !1 !2 !2 !3 !3 !4 !4 !5 !5 M5 port M5 port y y u u !7 !7 q w e r t q w e r t o o !0 !0 !1 !1 i i !4 !4 !2 !2 !3 !3 !6 !6 Component Parts Description Material Description Material No.

EXxx-OMU0020EN

No error or not connected, 1: Module 5 has an error 5 Module 6 error 0: No error or not connected, 1: Module 6 has an error 6 Module 7 error 0: No error or not connected, 1: Module 7 has an error 7 Module 8 error 0: No error or not connected, 1: Module 8 has an error 5.1.1.3.

IDX-OM-W016

6 References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 3 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 4 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specification. 7 1 7 3 Air piping . 7 1 7 4 Dryer specifications . 7 1 Chapter 8 Specification for Option C 8 1 Precautions