Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 20mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: CT (Metal Stopper Retraction End), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m, M8-3 Pin)

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m, M8-3 Pin)

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: CS (Metal Stopper Extension End), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 15mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: w/Magnet & Switch Rail, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m, M8-3 Pin)

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 5mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: A90--Reed, AC Volt, Horizontal

Specification: Standard Type (Not Clean Room), Bore Size: 8 mm, Symmetric Type: L (Symmetric), Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: w/Magnet & Switch Rail, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

LG1H

20 30 0 Transfer load m (kg) L2 600 400 L2 (mm) Mer m Rolling Yawing 200 L2 Mer m 10 20 30 0 Transfer load m (kg) 4000 a =1 000 L3 (mm) L3 a = 2000 2000 a = 3000 Mey m a 10 20 30 0 Transfer load m (kg) Refer to page 183 for deflection data. 156 11 Standard Motor/Horizontal Mount Specification Series LG1H20 Dimensions/LG1H202SC 110 4-M6 x 1 thread depth 10 67 4-M8 x 1.25 thread depth 10 20

IIIIIIIIII

FLOW CAPACITY . 10-32 port 1/8" NPT port 2.0 CFM (56 LPM) with supply 10 PSI above set-point 2.3 CFM (65 LPM) with supply 10 PSI above set-point Operating characteristics are influenced by flow and outlet restriction Part Number Description S-5200-10S-5200-30S-5200-60S-5200-1000-10 PSI, 10-32 ports 0-30 PSI, 10-32 ports 0-60 PSI, 10-32 ports 0-100 PSI, 10-32 ports XX XX XX XX 0-10 PSI, 1/

air-filter-e

NBR FKM KA00809 KA00725 Quantity 1 1 1A-P85 4D-P85 FNR100N-10 1.1 L Rc1 Stainless steel 304 FNR100V-10 FNR101N-10 FNR101V-10 Model Tank capacity Port size 1.8 L KA00809 4 O-ring Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Air Preparation Equipment

NBR FKM KA00809 KA00725 Quantity 1 1 1A-P85 4D-P85 FNR100N-10 1.1 L Rc1 Stainless steel 304 FNR100V-10 FNR101N-10 FNR101V-10 Model Tank capacity Port size 1.8 L KA00809 4 O-ring Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024

180

-6 = 9.0 x 10-6 (kgm2) Moment of inertia around Z axis IA = IZ1 + m1r12 X 10-6 z r2 z2 B part r2 = 47(mm) Calculation of weight m2 = d x e x f x Specific gravity m2 = 5 x 10 x 12 x 2.7 x 10-6 = 0.002 (kg) Moment of inertia around Z2 axis IZ2 = {m2 (d2 + e2)/12} x 10-6 IZ2 = {0.002 x (52 + 102)/12} x 10-6 = 0.02 x 10-6 (kgm2) IB = 0.02 x 10-6 + 0.002 x 472 x 10-6 = 4.4 x 10-6 (kgm2) I =

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Series AK1000

volume Mass 4500 psig (30.7 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 1 x 10-10 Pam3/sec NPT female, Compression 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.4 lbs (1.09 kg) 3) 1) Max 300 psig (2.1 MPa) for PTFE seat. 2) 14 to 194F (10 to 90C) for Vespel and PEEK

5 Port Solenoid Valve SY Series

SY7120-02 SY7140-03 AS3001F-06 AS4001F-10 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 SY9120-03 SY9140-04 AS3001F-06 AS4001F-10 AS4001F-12 AN202-02 AN200-02 AN200-02 Conditions [When using SGP (steel pipe)] Conditions [When using SGP (steel pipe)] Body ported Base mounted Series CS1 SGP10A x 1 m AS420