Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

VFA3000

Lubrication Not required Mounting orientation Impact/Vibration resistance (m/s2) Note) Free 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

Actuator Position Sensor D-MP Series

range Symbol Specifications 025 25 mm 050 50 mm 100 100 mm 200 200 mm Lead wire Symbol Specifications A Separate line, 2.0 m B M8-4 pin, 0.3 m C M12-4 pin, 0.3 m 4

Standard strokes range from 50 to 500mm.  Series 10/11-C(D)A2, available for clean environment, prevent particle generation in a clean room. 21/22-C(D)A2 series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDA2 clean series is auto switch capable.

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

Serial Network

Positive Y EX210-SAS2 4 out Negative Y EX210-SAS3 VQ2000/4000 4 out Positive Y EX210-SAS4 8 out Negative Y EX210-SAS5 8 out Positive Y EX210-SAS6 LonWorks SEMI, Echelon Special Order ** VQ, SX, SY & SV 16 out N Negative 16 out Positive N VQ, SX, SY & SV EX120/121/122-SMJ1 CC-Link CLPA & Mitsubishi 16 out Positive Y VQ2000/4000/5000 EX124 (U, D)-SMJ1 16 out Positive N SQ1000/2000, SZ3000/50

SYJA3000

3 position pressure center (A) 4 (B) 2 Not required Lubrication Free 300/50 Mounting position Impact/Vibration resistance (m/s2) (1) 1 (P) 5 (R1) 3 (R2) Base monted Note 1) Impact resistance: No malfunction resulted from the impact test using a drop impact tester.

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG60Compressed air0.3 to 1.0 5 to 50 5 to 50 207256001250.72525251 L/min [ANR] {In case of Inlet air

capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure

5 to 60, Rated Voltage: 24 VDC Din Connection, Power Consumption W DC: 4.5, Coil Temperature Rise °C: DC: 50 , DC: 50, Allowable Voltage Fluctuation: ± 10% or less of the rated voltage, Allowable Leakage Voltage: DC: 2% or less of the rated voltage , DC: 2% or less of the rated voltage, Coil Insulation Type: Class B Stocked Configurations Below Can Ship Same

5 to 60, Rated Voltage: 24 VDC Din Connection, Power Consumption W DC: 4.5, Coil Temperature Rise °C: DC: 50 , DC: 50, Allowable Voltage Fluctuation: ± 10% or less of the rated voltage, Allowable Leakage Voltage: DC: 2% or less of the rated voltage , DC: 2% or less of the rated voltage, Coil Insulation Type: Class B Stocked Configurations Below Can Ship Same

5 to 60, Rated Voltage: 24 VDC Din Connection, Power Consumption W DC: 4.5, Coil Temperature Rise °C: DC: 50 , DC: 50, Allowable Voltage Fluctuation: ± 10% or less of the rated voltage, Allowable Leakage Voltage: DC: 2% or less of the rated voltage , DC: 2% or less of the rated voltage, Coil Insulation Type: Class B Stocked Configurations Below Can Ship Same

I/O Configurator (NFC version)

Changed wireless units names to Base and Remote. 2.6.0 -123No.EX-OMV0017-C Revision history A: Contents revised in several places. [August 2018] B: Contents are added. [August 2018] C: Contents revised in several places.

Air preparation filter

AMX-OMU0058-C Revision history A Service parts addition. October 2017 B Change unit of water droplet. September 2018 C Change Flow capacity.

MGP

MGP-A 25 16 25 16 50 2025 50 50 20 1 2 21 22 NBR 23 24 25 63100 26 NBR 27 NBR 28 29 A NBR 30 B NBR 31 C NBR 1625 32100 1663 80100 5 1625 32100 7 8 9 10 11 12 13 16 20100 15 16 17 18 19 3 16 1650 4 6 / (mm) (mm) 16 MGP16-A-PS 50 MGP50-A-PS 20 MGP20-A-PS 63 MGP63-A-PS 25 MGP25-A-PS 80 MGP80-A-PS 32 MGP32-A-PS 100 MGP100-A-PS 40 MGP40-A-PS

SFOD-OMT0012

Refer to section "4.1 (1-1-2) View (V)" for how to display the Teaching window. c) How to command a Return to Origin operation. c-1) To perform a Return to Origin for each axis Select the button for the axis to be operated. c-2) To perform a Return to Origin for all axes Select the All axes Return to Origin button. d) The Return to Origin operation is completed when SETON is turned on.