SMC Corporation of America
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Description Material w e Bronze Element 11352-5B Bowl assembly AF11-4 AF11-4 JIS B2401 G130 r O-ring NBR 630332 t NBR 113136 113136 O-ring 11217 112310 NBR u Gasket for element Bowl (polycarbonate), drain cock, bowl guard and clamp ring are assembled. Assembly part no. for bowl (polycarbonate) and drain cock is 11316A (for AF800/900).

C1 Specifications Max. display pressure M48 x 2 Symbol Specifications Symbol Unit: MPa Option E Oil-free, external parts copper-free 0.2 0.4 0.7 1.0 1.5 2 4 7 10 15 Symbol Nil M With M5 (Female thread) Specifications For mounting method, refer to page 14-11-15.

N.C. 125 AC 250 AC 30 DC 125 DC 1.3 0.8 2.5 1.5 0.7 0.5 1.5 1 3 0.05 2 0.05 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 1500 VAC, Hz for 1 min.

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. 4 ' C ' C 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) ) D G C D, T S S L, Z 3 ) E E 3 0 ( 2 17-3-69 2 The VX series will be revised shortly. Series VXH Construction/Dimensions Material C3771 Note No.

For other voltages, special order request will have to be submitted. 2 Base Mounted Configurations Series DXT474 How to Order Solenoid Operated Valve DXT474 * * * * * * Type of Actuation Manual Override 1 Normally Closed Nil Non-locking push type 2 Normally Open B Locking slotted type D Push-locking slotted type E Push-locking lever type Valve Type P Supply Valve E Exhaust Valve Light and

Do nol loosen the recessed head screw on the top of the sensitivity adiusting screw because ii is lor prelenting the screw trom slipping otf. @ World Wide QS\E Support... North American Branch Offices For a branch office near you call: 1-800-SMC-SMC1 (762-7621) SMC Pneumatics lnc. (Milwaukee) SMC Pneumatics lnc. (Richmond) SMC Pneumatics Inc.

The base color of the new AC-A series is urban white, maintaining a clean, modern look.The E*00-A series will end production in March 2025. -- Please select the E*00-D series for new applications Piping adapter: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, 3/4, 1" ; Easy maintenance; Detach equipment without removing piping; Assembles to FRL's by simply tightening screws

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Year Month 2015 2016 2017 2025 2026 2027 T U V D E F Bore Size (mm) Torque 10% (N.m) Jan O TO UO VO DO EO FO Instruction Manual CG1*N25&100-*Z-X2992 Air Reservoir 32 2.9 Feb P TP UP VP DP EP FP 40 4.9 Mar Q TQ UQ VQ DQ EQ FQ 50 11.8 Apr R TR UR VR DR ER FR 63, 80 24.5 Do not service or attempt to remove product and May S TS US VS DS ES FS machinery/equipment until safety

When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

100 100 60 25 25 Vacuum pressure Vacuum pressure Vacuum pressure Vacuum pressure Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] 50 80 80 80 20 20 Vacuum pressure [kPa] Vacuum pressure [kPa] Air consumption Vacuum pressure [kPa] Vacuum pressure [kPa] 40 60 60 60 15 15 Suction flow rate 30 Air consumption Suction flow

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

Table 8-1 Quality standard for fresh water (tap water) Item Product Standard value For circulating fluid For facility water pH (at 25oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness

OUT() DC(-) DC(+) PSE57--28 420 mA N.C. 500 (24 V ) 100 (12 V ) OUT() DC(-) -13No.PS-OMS0004CN-D (A/D ) () 20 2030 -14No.PS-OMS0004CN-D PSE570 PSE573 PSE574 01MPa -100100 kPa 0500 kPa 3.0MPa 600 kPa 1.5MPa oC) oC) (25 ) 2F.S.(050 3F.S.(050 oC) oC) 3F.S.(-1060 4F.S.(-1060 PSE57PSE57--28 DC1224 V1010% 10 mA 420 mA 15 V 1 k 500 (24 V ) 100 (12 V ) (25 oC) 1.0F.S. 0.5F.S. oC)

CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !