SMC Corporation of America
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Auto switch operating range (mm) Auto switch model D-M9/D-M9W 12 16 20 25 32 40 50 63 3.5 5 5 5 6 6 6 6.5 7 9 9 9 9.5 9.5 9.5 11 D-A9 Values whitch include hysteresis are for guideline purposes only. They are not a guarantee (assuming approximately 30% dispersion) and may change substantially depending on the ambient environment. 14-5.

BBA4: D-C7/C8/H7 "D-H7BAL" switch is set on the cylinder with the screws above when shipped.

56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0009CN-F PF3W504/520/540(+) A AA D K S PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71 105.5 90 89 -45No.PF-OMN0009CN-F PF3W511-U25/PF3W521-U30(PVC ) 2X A B D E F J K L N P Q 25 A 154 46 77 57.6 23 77 63 28 18 3.5 14 32 30 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 14 38 S T U V W Y Z 25 A 59

System construction status No.0 No.1 No.2 No.3 No.4 No.5 No.6 No.7 No.8 No.9 End EX600 EX600 EX600 EX600 EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -SEN3 plate -LAB1 -LAB1 -LBB1 -LBB1 -127No.EX-OMX1011 (6) When unit diagnostics is generated, the diagnostic information is displayed on the [SYSTEM CONFIGURATION STATUS] screen.

width across flats) AS-D AS-T ASP ASN AQ ASV AK Metric Size Inch Size VCHC Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

ms 50 ms 50 ms 50 ms 7 3-Color Display Digital Flow Switch Series PFMC Construction/Fluid Contact Parts i o !

Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min.

Ejector mounting position U D U side D side [Example: When individual wiring type model 45 for SY3000 is selected] ZZY Y3-45-04D-C6J1U 1SET SY3000 manifold model Ejector valve number Note 1) The combined total of solenoid valve and ejector valve stations is a maximum of 20 stations. (Example: When there are 12 solenoid valve stations, there are 8 ejector stations.)

A to B C to D 500 L 5 to 500 -25 to 525 L/min 1000 L 10 to 1000 -50 to 1050 2000 L 20 to 2000 -100 to 2100 PFMC7 40 to 4000 -200 to 4200 500 L 0.17 to 17.66 -0.90 to 18.50 cfm 1000 L 0.35 to 35.31 -1.80 to 37.10 2000 L 0.70 to 70.63 -3.50 to 74.20 The flow ranges and relationship between the fluid and PD are shown in the figures below.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

code, Plug, Straight 5 m, SPEEDCON compatible EX9-AC010EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 1 m EX9-AC020EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 2 m EX9-AC030EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 3 m EX9-AC050EN-PSRJ Cable with M12 connector, D code-RJ45, Plug, Straight 5 m EX9-AC100EN-PSRJ Cable with M12 connector, D

Standard CE, UL/CSA, RoHS Analogue output Range Rated pressure range A B E For vacuum 0 to -101 kPa 0 -101 kPa 10.1 kPa For compound -100 kPa to 100 kPa -100 kPa 100 kPa For low pressure 0 to 100 kPa 0 100 kPa -10 kPa 0 to 1 MPa 0 1 MPa -0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa -50 kPa Range Rated pressure range C D F For low differential pressure 0 to 2 kPa 0 2 kPa -0.2 kPa

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

Adsorb error detection time setting (Unit: ms, Range: 50..5000ms) Set the time to continuously check the vacuum pressure level.

ANR)] Air consumption [L/min(ANR)] Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure 80 Suction flow 60 40 20 Air consumption 0 0 10 20 40 50 60 30 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-12 ZHP-12 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 100 90 80 70 60 50 40 30 20 10 0 Suction flow [L/min(ANR)] Air consumption [L/min

Parts cannot be shipped separately. 1937 Series VHS20/30/40/50 Dimensions VHS20/30 VHS40/40-06/50 10 I EXH. 10 G F H I SUP. E X H . F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

60 Hz Description Code Specication ECC-PNAL-20MT-D, 28.8V DC 5.0 W ECC-PNAL-20MR-D, 28.8V DC 7.0 W ECC-PNAL-20MR-A, 264V AC~ 8.0 W ECC-PNAL-10MT-D, 28.8V DC 2.0 W ECC-PNAL-10MR-D, 28.8V DC 3.0 W ECC-PNAL-10MR-A, 264V AC~ 4.0 W ECC-PNAL-6MR-A, 264V AC~ 3.0 W 24 V DC < 7.0 Amp ECC-PNAL-***-D 5ms ECC-PNAL-***-D 24V DC, +20% -15% 4 PneuAlpha Hardware Specification 2 Table 2.2: Power Supply Specications

Electrical entry TT is approved for Class I, II, III, Division 1, Groups A, B, C, D, E, F, G. Electrical entry L and LL is approved for Class I, Division 1, Groups A, B, C, D. 4.