Slider Type Ball Screw Drive/11-LEFS Series

upper limit Suction flow rate: 0 L/min 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] LAT Suction flow rate: 20 L/min ISO Class 5 upper limit LZ 10 10 LC3F2 Suction flow rate: 40 L/min ISO Class 4 upper limit ISO Class 4 upper limit 1000 1000 Suction flow rate: 20 L/min Suction flow rate: 50 L/min 100 100 Suction flow rate: 30 L/min 10 10 1 1 0 0.1 0.6 0.5

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Grease Volume Part no. 5 g GR-L-005 10 g GR-L-010 150 g GR-L-150 3. Do not wipe out the grease in the sliding part of the air cylinder.

Flow Sensor Series PFMV

0.0 to 1.0 l/min 0.0 to 3.0 l/min 0.5 to 0.5 l/min 1.0 to 1.0 l/min A 3.0 to 3.0 l/min Mounting screw Analog output (1 to 5 V) Output specification 1 2 L-type brackets (with 2 mounting screws) are included.

POWER CLAMP CYLINDER

Use M12-4 pin socket (female) A cord. 19 - Refer to page 15 and 16 for procedures for changing the stopper bolt and switch positions and for top cover replacement instructions. 20 - 21 - 22 - p. 23 p. 24 p. 23 p. 24 p. 25 p. 26 23 - 24 - 25 - 26 - 27 - Refer to pages 32 and 33 for the weight of clamp arms.

VP4

Regarding VP435 (3 position closed center type) Be aware that when the cylinder is in an intermediate stop state, if the supply pressure to the P port is discharged or decreased, this valve is constructed so that the pressure in the cylinder will be discharged to the P port, causing the cylinder to move. 7.

Voltage Monitor for PFMV5

min 0 to 3 L/min 0.5 to 0.5 -0.05 to -1 to -1 L/min -3 to 3 L/min L/min L/min Display flow range Set flow range -0.025 to -0.05 to -0.15 to -0.525 to -1.05 to -3.15 to Flow 1 0.525 L/min 1.05 L/min 3.15 L/min 0.525 L/min 1.05 L/min -3.15 L/min Minimum setting unit 0.001 L/mim 0.01 L/mim 0.001 L/mim 0.01 L/mim Indication unit Voltage : V Instantaneous flow : L/min, CFH(ft 3/h) 2 Repeatability

Digital Flow Switch (Integrated display type)

min L/min L/min L/min Instantaneous Setting/display flow range 2 0.35 to 4.50 1.7 to 17.0 3.5 to 45.0 7 to 110 L/min L/min L/min L/min flow Min. setting/display unit 0.05 0.1 0.5 1 Flow L/min L/min L/min L/min Setting/display flow range 0 to 9 L Accumulated Flow Min. setting/display unit 1 L Pressure Rated pressure range 0 to 1 MPa Proof pressure 1.5 MPa NPN open collector output, PNP open

LFE-OMZ0011

min 2.5 to 100 L/min 5 to 200 L/min Display flow range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set flow range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit 0.1 L/min 0.5 L/min 1 L/min Accumulated volume per pulse (Pulse width:50ms) 0.1 L/pulse 0.5 L/pulse 1 L/pulse Operating Fluid temperature *3 0 to 85oC (No condensation

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Knuckle pin (Common with double clevis pin) Rod end nut d d Dd9 C m L m l t t H B Metric Threads Metric Threads Bore size (mm) Bore size (mm) Snap ring d H B C t Dd9 l m Part No. Part No.

Digital Flow Switch (Integrated display type)

min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 525 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1.0 2.0 5.0 Flow L/min L/min L/min L/min L/min Setting/display flow range 0 to 9 L Accumulated Flow Min. setting/display unit 1 L Reference condition 3 Standard condition, Normal condition 4 Pressure

HRX-OM-S004

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

(4) L L Cylinder A Cylinder A Auto switch position Auto switch position Dimensions by Mounting Style (1) (2) Cylinder B Cylinder B Bore size (mm) Auto switch model L d L d D-A9, D-A9V 0 15 27 (37) 5 (15) D-M9, D-M9V 0 15 27 (39) 5 (17) d L d L 8 D-F8 0 15 47 25 D-M9W, D-M9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style (1) (2) (3) (4) ( ): Denotes the values of D-A9V, D-M9V and D-M9WV

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

MQQ

M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75, 100 124 12 L FT FX B + Stroke FZ FX (Dimensions except A and L are same as rod side flange style.)

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

mm/s 10 10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle

MQQ

M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75, 100 124 12 L FT FX B + Stroke FZ FX (Dimensions except A and L are same as rod side flange style.)

MTS

(15) D-M9, D-M9V 0 15 27 (39) 5 (17) d d 8 Data D-F8 0 15 47 25 L L D-F9W, D-F9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style ( ): Denotes the values of D-A9V, D-M9V and D-F9WV. (1) (2) (3) (4) Bore size (mm) Auto switch model L d L d L d L d D-A9, D-A9V 0 (15) 0 0 28 28 (43) 18 18 (33) 0 (15) 12 D-M9, D-M9V 10 (17) 0 0 28 33 (45) 18 28 (35) 5 (17) D-F9W, D-F9WV 10 (17) 0 0 28 33 (45

Precision Regulator Series IR1000/2000/3000

min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 4.4 l/min (ANR) or less 11.5 l/min (ANR) or less (At supply pressure of 1.0 MPa) SRF Rc 1/4, 3/8, 1/2 Rc 1/4 Rc 1/4, 3/8, 1/2 Port size Rc 1/4 Rc 1/8 Rc 1/8 (2 locations) Pressure gauge port ARX20 Ambient and fluid temperature 5 to 60C (No freezing) 0.71 0.35 0.64 Mass (kg) 0.30 0.14 VCHR Note 1) With the condition of no flow

Compact Cylinder with Air Cushion Series RQ

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Rolled steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50 Applicable bore size (mm) Snap ring l Part no.

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MGOM.,/Slide bearing MGQL,,/Ball bush bearing MGQL12-25-3O more stroke MGOM'12-2s-Lil . 5 O l O O , MGQM32-1OO t l01ooT P=o.5MPa 1 ,*"1 -Tt r t r . l 080 ; , . d63 t t , 5od ' l4oo o50 E;\ .' !