Sine Rodless Cylinder Series REA

Stroke (mm) Bore size 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm Specifications Fluid Air Proof pressure 1.05MPa (150psi) Maximum operating pressure 0.7MPa (101psi) Minimum operating pressure 0.18MPa (26psi) Ambient and fluid temperature 10 to 60C (14 to 158F) (without freezing) Piston speed 50 to 300mm/s (2 to 12in/s) Lubrication Non-lube +1 0 +1.4 0 +1.8 0 0 to 250st: , 251 to1000st: , 1001st

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Features 2 Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Pressure sensing range High pressure [0 to 1MPa] Vacuum [0 to 101kPa] Low pressure [0 to 101kPa] Compound pressure [101 to 101kPa] 0 1 2 3 Option Without cable Nil Sensor cable (3m) M5 Port size L M5 Options Sensor cable (3m) + Connector (1 pc.)

Compact Vacuum Ejector Series ZQ

0 4 6 8 10 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ107 Exhaust characteristics ZQ107 Flow characteristics Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 30 -60 -60 20 Vacuum port 1 2 3 4 5 6 7 8 -40 -40 Air consumption ZQ1053M-K1Y5L-D31C ZQ1103M-K1Y5L-D31C 10 -20 -20 Maximum suction flow 5 0 10 15 0.1 0 0.2 0.3 0.4 0.5 0.6 Suction flow (l/min

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Valve leakage 0 Valve leakage 0 to 50oC 0 to 50oC Fluid and ambient temperature Fluid and ambient temperature Free Mounting Free Mounting 24VDC Coil rated voltage 24VDC Coil rated voltage 10% of rated voltage Allowable voltage 10% of rated voltage Allowable voltage Class B Coil insurance Class B Coil insurance 1.5W Power consumption Inrush: 2.5W; Holding: 1W Power consumption PEEK Body

VY511, VYU5

SW RESET RUN2 RUN1 OV INPUT 6 7 5 8 4 + 9 3 SET UP A 2 B 1 0 C D 1 E F 0 to 10V V R 1 OUTPUT SET UP BALANCE CONTROLLER VYU5-D 2 V R 2 OV ERR.

ZQ

0 4 6 8 10 0.1 0.2 0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) Misc.

E,R.L.

I.th Aato 0..1n (Flo.t tp.)

VCC

Manifold C C 1 V V V C C 1 0 0 Valve Specification Sheet Fill in the symbol for stainless steel fitting. For others, mark necessary items with a circle.

80

VDW Z 1 0 A 1A VDW Z 1 0 A A VDW XB Enter standard product number. Enter standard product number. Enter standard product number.

PSE57  Series Pressure Sensor for General Fluids

Pressure Sensor for General Fluids RoHS PSE57 Series How to Order PSE57 0 01 Option (Lead wire) Sensor range 0 Positive pressure [0 to 1 MPa] 3 Compound pressure [100 to 100 kPa] 4 Positive pressure [0 to 500 kPa] 5 Positive pressure [0 to 2 MPa] 6 Positive pressure [0 to 5 MPa] 7 Positive pressure [0 to 10 MPa] Nil Lead wire and M12 connector (3 m), Straight L Lead wire and M12 connector

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

to 1000 150 to 700 150 to 700 21 19.5 19.5 15.5 14 12 10 8 20-0.033 56.2 46.5 37.5 33.5 7 5.5 5.5 5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26.5 22 20 20 51 42.5 34.5 30 181 159 146 146 M26 x 1.5 M26 x 1.5 M20 x 1.5 247 217 204 200 1/8 40 32 25 20 24 22 22 18 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 32-0.039 0 8 10 M32 x 2 1011Axial foot (L): RECL G H G F Width across flats B2 A K 2

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 IY-G02 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 0.2 0.4 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 IY-G03 10 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04 Y-G04 32, 40 10

Series 11-MXJ Air Slide Table

(Through) Note 1) 3 +0.05 0 depth 1.5 6 3.5 10 3 +0.03 0 depth 1.5 Note 1) (Through) 2 x M1.7 x 0.35 thread depth 1.5 42.5 27.5 8 1.5 3 9.5 Vacuum port M3 x 0.5 Operating port 2 x M3 x 0.5 (Plugged when the product is not a symmetric type.)

Intrinsically Safe Valve

Do not install in Zone 0 (as defined in IEC 60079-101:2008) or Zone 20 (as defined in IEC 60079-10-2:2009) Zone 0 area classification: An area in which an explosive gas atmosphere is present continuously or for long periods or frequently.

EX500-GEN2_eng

Accessory 0 0 Remote control (DHCP) 0 16 Refer to the product catalog or SMC website (URL http://www.smcworld.com) to obtain more detailed information about product specifications. 0 0 0 0 1 2 Provide grounding to assure the safety and noise resistance of the Serial System. Individual grounding should be provided close to the product with a short cable.

EX600-WEN_WSV.eng

4 0 V (Output) 4 0 V (Output) Boschring 13-15, 63329 Egelsbach, Germany Not used 5 (4) EX600-ED5-# PWR IN: M12 4-pin Plug, A-code GREECE (30) 210 271 7265 Red LED flashes.

EXxx-OMV0028.eng

4 0 V (Output) 4 0 V (Output) Boschring 13-15, 63329 Egelsbach, Germany Not used 5 (4) EX600-ED5-# PWR IN: M12 4-pin Plug, A-code GREECE (30) 210 271 7265 PWR OUT: M12 5-pin Socket, A-code Red LED flashes.

LFE-OMZ0012

0 0 5 10 15 20 0 20 40 60 80 100 Flow rate [L/min] Flow rate [L/min] LFE3 0.02 Pressure loss [MPa] 0.015 0.01 0.005 0 0 50 100 150 200 Flow rate [L/min] -26No.LFE*-OMZ0012 Straight pipe length (reference value) Straight pipe length Straight pipe length Change of accuracy [%F.S.]

3-Position Rotary Table

3 @0 !7 @5 !1 #0 t u r w @3 !9 MSZAA (High precision type) $1 e $0 @7 @1 @9 !0 !2 #2 !6 !4 @4 #3 !8 #7 #8 o #6 q #9 y i $2 @3 @2 #1 @6 #4 #5 Component Parts Note Anodized Nickel plated Chromated Note No.