MHZ2/MHZJ2

No setting 1 4 2 5 7 2 5 3 2 2 3 5 3 1 MHZ2-16 No setting 3 2 4 1 MHZ2-20 MHZ2-25 MHZJ2-10 No setting No setting MHZJ2-16 No setting No setting 3 2 1 MHZJ2-20 MHZJ2-25 Note) "" in the table indicates a skip with no dimension.

17

pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 5 Note 1) 10 Note 1) 5 10 5 10 D-A9 D-A9V D-M9V 5 Note 1) 5 D-M9 10 Note 1) 10 5 Note 2) D-M9W 10 Note 2) 10 5 Note 2) D-M9WV D-M9AV 10 5 Note 2) D-M9A 10 Note 2) 15 15 D-P3DW Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

Free Mount Cylinder for Vacuum Series ZCUK

Applicable cylinder bore (mm) 10 16 20 25 32 NTP-010 NTJ-015A NT-015A NT-02 NT-03 WCS4 x 0.7 WCS5 x 0.8 WCS6 x 1 WCS8 x 1 WCS10 x 1 9.2 11. 5 15. 0 19. 6 8 10 13 17 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 5 5 6 7.8 9.8 12. 5 16. 5 1261

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts No. Description No.

CXS

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !

MTS

8 @5 @1 i @8 !4 !5 !2 @9 !3 w Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Note 8 12 to 40 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 Note Clear anodized Clear anodized Hard anodized Chromated Chromated 8: Quenched Description Material Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Material No. q w e r t No. Aluminum alloy !

S Couplers Series KK/KKH/KK13

1 r !6 t y !2 e !4 !5 !4 !5 !

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

method setting unit 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150

Stainless Steel 316

(inch) Model KQGH03-00 KQGH07-00 KQGH09-00 KQGH11-00 KQGH13-00 5/32 KQGU03-00 KQGU07-00 KQGU09-00 KQGU11-00 KQGU13-00 5/32 1/4 1/4 5/16 5/16 3/8 3/8 1/2 1/2 Male Elbow Male Elbow Bulkhead Union Bulkhead Union Applicable tubing O.D. (inch) Connection thread Model Applicable tubing O.D.

PFxx-OMX0002

For example, when analogue output is 1 to 5 V, F.S. = 5 [V] 1 [V] = 4 [V]. (Reference: 1%F.S. = 4 [V] 1% = 0.04 [V]) F.S. (full span/ full scale) H Hysteresis The difference between ON and OFF points used to prevent chattering. Hysteresis can be effective in avoiding the effects of pulsation.

K35-OMW0030

Switch No. 0 (Default) 1 2 3 4 5 6 7 8 9 Slower (Speeds up gradually.) Faster 6-4-1.

Digital Gap Checker

L 1 ISA-5-1 73.0 2 ISA-5-2 135.5 3 ISA-5-3 173.0 4 ISA-5-4 210.5 5 ISA-5-5 248.0 6 ISA-5-6 285.5 1.25 8 4.5 7.5 5.5 35 35 With 3 tapping screws (3 x 8) Bracket for centralized lead wire ISA-20 Lead wire with connector ZS-31-B ZS-31-C Straight 5 m Right angle 5 m Centralized lead wire ISA-19-m Stations Part no. 2 ISA-19-2 3 ISA-19-3 4 ISA-19-4 5 ISA-19-5 6 ISA-19-6 15 3-Color Display

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Metric size Inch size 100 200 205 M5 standard 1/8 standard 1/4 standard 3.2 4 6 8 23 04 06 08 01 03 05 07 09 1/8" 5/32" 3/16" 1/4" 5/16" Use 1/8" tube.

Process Pump

Class Symbol PAF341S 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 PAF541S PAF341S PAF541S tubing size (mm) tubing size (inch ) SMC SMC SMC 4 4 5 5 6 6 1 2 1 2 1 2 4 4 5 5 6 6 A B A B A B 1/2" x 3/8" 3/8" x 1/4" Panel mount union U P 3/4" x 5/8" Union 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC Note) Select the fitting after confirming the IN / OUT side fitting size and fitting type.

o

: ( 5 ! 0.14 {3.51 Dia. P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

o

: ( 5 ! 0.14 {3.51 Dia. P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

1 !2 !3 !4 !5 !6 !7 !8 !

K35-OMW0031

operation No signal operation Calibration position 1-3-5-3-3 Stay 0 (Slow) 1 2 3 4 5 6 7 8 Maximum piston rod speed Max speed 1-3-5-3-4 9 (Fast) Emergency stop E-Stop off OFF 1-3-5-4-1 ON Calibration Calibration OFF 1-3-5-4-2 ON Stop JOG operation JOG operation 1-3-5-4-3 Extend Retract 7 6.

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.