Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Indication symbol Symbol AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8"

MQQ

1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

8, 1/4" 18 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 28 20 [mm] 28 20 Model A P Q PF2M705/710S-C4(-L) 87.1 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S -C6(-L) 87.9 2.8 depth 8.4 2.5 depth 6 8 8 PF2M725/750S-N7(-L) 95.5 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P

MXH Series Compact Slide

m(kg) Weight m(kg) 20 16 10 6 1 20 20 16 0.01 0.1 16 10 10 6 6 0.001 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L(mm) Overhang L(mm) Overhang L(mm) 1 kg = 2.2046 lb 1 kg = 2.2046 lb 1 kg = 2.2046 lb Graph 6 Load eccentricity 200mm Graph 9 Load eccentricity 200mm Graph 12 Load eccentricity 200mm 1 10 10 0.1 Weight m(kg) Weight m(kg) 1 1 Weight m(kg) 20 16 20 16

Cylinder with Lock Series CLS

Unlocked condition (when air is supplied.) 788 Double Acting, Single Rod Series CLS Cylinder with Lock Construction @7 @4 @8 @6 %8 @2 %9 @7 !0 i o @1 @0 @3 q w !9 %7 $1 $2 $3 $6 %2 %3 %4 %6 $8 $9 ^6 $0 #3 y u !1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !

MQQ

B C D H NTJ-010A NTJ-015A NT-02 NT-03 SNKJ-016B SNLJ-016B SN-020B SN-032B M12 x 1 M4 x 0.7 6, 10 17 6, 10 7 19.6 4 8.1 3.2 M14 x 1 M5 x 0.8 16 19 16 8 21.9 5 9.2 4 M20 x 1.5 M8 x 1.25 20 26 20 13 30 8 15 5 M26 x 1.5 M10 x 1.25 25 32 25 17 37 8 19.6 6 T-bracket 4-TC TH 7 +0.2 0 TU -0.1 -0.3 TN TK TX TV 12 TD H10 TT TY TW Part no.

Digital Flow Switches

1 2 3 4 7 3 Load +0.5 0 Brown 19.4 6 2 + 36 Blue 5 1 12 to 24VDC 5 6 7 8 Series PF2W5 PF2W31-A The applicable panel thickness is 1 to 3.2mm.

VZ3000

for 4 Rc 1/8 G B3 One-touch fitting for 5/32" 20 20 stations 4(A), 2(B) port 1(P) port NPT Rc 1/8 How to Order Flat ribbon cable type 41P Applicable solenoid valve VV5Z3 41P 05 M5 1 3 5 6 1 3 5 6 VZ343MOZ Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 4(A), 2(B) port 03 VZ353MOZ 3 stations M5 x 0.8 M5 M5 x 0.8 Rc Nil F N Z NPTE Applicable blanking plate assembly DXT192-13-

EXxx-OMU0020CN

General diagnostics 2 . 5-3 General diagnostics 2 Bit 0 Module 1 error 0Module 1 1Module 1 1 Module 2 error 0Module 2 1Module 2 2 Module 3 error 0Module 3 1Module 3 3 Module 4 error 0Module 4 1Module 4 4 Module 5 error 0Module 5 1Module 5 5 Module 6 error 0Module 6 1Module 6 6 Module 7 error 0Module 7 1Module 7 7 Module 8 error 0Module 8 1Module 8 5.1.1.3.

MHY2/MHW2

6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Model Selection 1

P. 17-5-101 6 VN 1 2 LVC 3 LVA Male 4 LVH 5 Elbow LQ1L P. 17-5-102 6 LVD 1 LVQ 2 LQ 3 Female 4 LVN 5 TI/ TIL P. 17-5-103 6 PA 1 2 PAX 3 PB Male 4 5 Run tee LQ1R P. 17-5-104 6 1 2 3 Female 4 5 P. 17-5-105 6 Note) Basic size With reducer 17-5-93 22 Series LQ 1 2, LVN, TL/TIL Port size Tubing O.D.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

MHF2

2.3 4 2-3H9 +0.025 0 depth 3 6 16 16 7.5 7.5 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 56 18 Series MHF2 Dimensions MHF2-20D1 Scale: 50% 66 5H9 +0.030 0 depth 4 5H9 +0.030 0 depth 4 2-M6 x 1 thread depth 15 Mounting thread 6 99 6 Finger closing port M5 x 0.8 2-M6 x 1 thread depth 6 Mounting thread 114 62 84 33 E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

PF2A/PF2W

ZSM PF2 Terminal block number 5 6 7 8 IF 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

CJ5-S

6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38

CJ5-S

6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38