VFR2000 Series

No.VFR2000-OMH0002-A 5 Port Solenoid Valve PRODUCT NAME VFR2000 Series MODEL/ Series Contents Safety Instructions -2, 3 Precautions on Design -4, 5 Selection -4, 5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -6, 7 Operating Environment -7 Maintenance -7 Specific Product Precautions -8 to 13 Trouble shooting -14 Remedy -15 -1VFR2000-OMH0002-A Safety Instructions These safety

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

Rotary Gripper Series MRHQ

x 0.8 37h9 0 0.062 15 opened 4 11 closed Finger closing port 5 0 0.1 4-M2.5 x 0.45 (mounting screw attachment ) 3 Max. 6.1 4-M4 x 0.7 5.7 12 2.5 Depth 6 (two on opposite side) 34 63 22.5 M5 x 0.8 Finger opening port 5 2 11.5 3-R1.5 23 18 11 25 15.5 41.5 4.5 33 Angle adjustment bolt 2-8 Depth of counter bore 2.5 3-R1.5 11 2-4.5 through 2 3-3H9 + 0.025 0 Depth 4 (one each on three sides)

MHx-OMZ0003

4 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-5. 1.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

MGF

weight m (kg) Load weight m (kg) 30 30 MGF63 10 20 20 MGF63 5 10 10 MGF40 5 4 3 5 4 3 MGF40 MGF40 5 MGF40 2 2 3 5 2 1 1 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 10 50 100 5 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) How to read the graph 1) When the load weight is 70kg, eccentric distance is 60mm, and the maximum speed is 150mm

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

Plate Cylinder with Lock Series MLU

2 @6 t @4 w @8 r !1 @5 @3 @2 e !6 A A C B M(D)LUB25 y !9 i o !5 @0 Extension locking w q Section A-A !

LC6D/LC6C

LJ1 LG1 LC1 LX LC6D/LC6C Switches LC6C Power Connector Cable LC6D Connector Cable Model LC6-1-C2--X252 Model LC6-1-C1--X258 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17

FQ1

1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only for FQ1012 when two L250 elements are used. 84 Model A B P No. of elements 1/2, 3/4 1/2, 3/4, 1 3/4, 1 FQ1010 FQ1011 FQ1012 L125 x 1 L250 x 1 L250 x 2 204 332 593 267 395 656 DRAIN G1/4 Pull-out min. 40 5 Series FQ1 Made to Order Consult

VFM300

2 !3 !4 !5 !6 !7 !8 !

Booster Regulator/Air Tank

Description Piston seal 1 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 6 Mounting screw 12 7 Cover C assembly 1 Grease pack 1 1 2 1 2 The grease pack has 10 g of grease.

SYJ Series

Connector mounting position SYJ300 M1.7 0.12N.m SY3000-37-81A-2-N Single1 to 4stations SYJ500 M2.5 0.45N.m SY3000-37-81A-2-5 Double/3 position : 1 to 4 stations SS5YJ3-21,32SA SY3000-37-81A-1-N Single5 to 8 stations SYJ700 M3 0.8N.m SY3000-37-81A-1-4 Double/3 position : 5 to 8 stations SS5YJ5-20,40,42,43SA SY3000-37-81A-2-N Single1 to 8stations SY3000-37-81A-2-5 Double/3 position : 1 to 8

Single Axis Electric Actuator Serriies LJ1S Slider Guide

MR-JCCBL5M (for encoder) LJ1-1-R05 6 160 5 6 DP9320081-2 (for motor) DP9320089-2 (for encoder) LJ1-1-Y053 DP9320083-2 (for motor/brake) DP9320089-2 (for encoder) LJ1-1-Y05B 149 LXF (AC servomotor by Mitsubishi Electric Corporation) Model Manufacturer part no.

Air cylinder (Series compatible with secondary batteries)

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Air cushion 2-8. Control direction 2-9.Mounting brackets 2-10.Auto switches 3. Maintenance P17 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4.

S Couplers Series KK/KK13

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 8/12 8.5/12.5 11/16 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KK6P-80N -85N -110N KK3S-50N -60N -65N KK4S-50N -60N -65N -80N -85N KK6S-80N -85N -110N 1/8 1/8 1/4 1/4 1/2 1/2 Straight type with One-touch fitting Straight type with One-touch fitting Applicable

CG1x-OM0006N

P6 1-1. 2. P7 2-1. 2-2. 2-3. 2-4. 2-5. 2-6. 2-7. 2-8. 3. P16 3-1. 3-2. 3-3. 3-4. 4. P24 5.

MHx-OMZ0004

No.MH*-OMZ0004 / / JMHZ2-16D-X7400B-ASSISTA(-P) . 2 1. 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. () . 9 3-5. . 10 3-6. . 10 4. . 11 4-1. . 11 4-2. 3 . 12 4-3. . 13 5. . 14 5-1 . 14 5-2. . 14 5-3. . 20 5-4. . 20 5-5. . 20 5-6. . 21 6. . 21 1 - (ISO/IEC)(JIS)*1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power

MHx-OMZ0005

M3x7 0.59Nm 21 - 0.7mm 22 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

Electric Actuators

282 LXPB5SB LXPB2SB LXPB5SA LXPB2BC LXPB5BC LXPB2BD LXPB5BD LXPB2SA LXPB5SB-B LXPB2SB-B LXPB5SA-B LXPB2BC-B LXPB5BC-B LXPB2BD-B LXPB5BD-B LXPB2SA-B 5 phase 240 to 200 2 phase 224 284 to 200 5 phase 238 to 100 2 phase to 30 218 5 phase 234 to 30 294 2 phase 220 to 80 5 phase 236 to 80 2 phase 222 to 100 304 5 phase 248 to 200 284 2 phase to 200 232 5 phase 246 to 100 2 phase 226