ISO Cylinder

: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke [mm] (40)1 0.7 34 30 23 50 63 1 The data in ( ) are limited by max. stroke length

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Station 11 SOL.b Station 8 SOL.b 22 16 SOL.a SOL.a 21 15 Station 2 SOL.b Station 2 SOL.b 4 4 SOL.a SOL.a 3 3 Station 1 SOL.b Station 1 SOL.b 2 2 SOL.a SOL.a 1 1 Triangle mark Triangle mark This circuit is for the double wiring specification with up to 9 stations.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

Electric Actuator

1 @6 @7 o @4 !5 !0 !6 @0 B A !9 !8 y q w t !7 r e i u !3 @3 !4 D 25 32 In-line motor type/LEY !6 u @3 #4 #3 When rod end male thread selected !0 #0 #1 #2 #1 @9 Component Parts No. Description Material Note No.

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Rotary Actuator/Vane Type

9 i @0 !9 !6 q w !4 !2 w !4 o !0 !7 !1 q !5 !1 Double shaft type Single shaft type Single shaft type Component Parts Double shaft type DNo. Description Material Note No.

SYJ300/500/700

+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

Filter Regulator

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port (9) Part No. (9) Part No. thread ty pe thread ty pe Rc Rc AD47-2-A AD47-D G G NPT AD47N-2(Z)-A NPT AD47N(-Z)-D Appearance and part No.

Battery-less

9 o @1 @2 !1 !9 @0 !8 @0 !0 !8 !4 u u !2 !3 i e !5 r t w q y !6 !

NCQ8

Applicable bore size 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2"), 250(2 1/2") 300(3") 400(4") Applicable bore size Part no.

CNG

8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

Electric Actuator

Dot color 1 2 3 4 5 6 7 8 9 10 11 Insulation color Dot mark Pin no.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 @6 @7 Description No. Part no.

MB

8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 Dimensions with mounting support is same as the basic style (Double acting single rod).

Step Motor Controller

. 1 2 3 Circuit Cable color U V W Red White Black Connector D terminal no. 12 13 7 6 9 8 11 10 3 Connector A2 terminal no.

Ｍ icro Mist Separator Regulator

C Note 1) C Note 1) Option symbol Semi-standard symbol 6 2 Semi-standard: 2 Semi-standard: Piping port thread ty pe (9) Part No. Piping port thread ty pe (9) Part No. Rc G NPT AD37N-2(Z)-A Rc G NPT AD37N(-Z)-D AD37-2-A AD37-D Appearance and part No. Semi-standard: 6 Piping port thread ty pe (9) Part No.

Mist Separator Regulator

C Note 1) C Note 1) Option symbol Semi-standard symbol 6 2 Semi-standard: 2 Semi-standard: Piping port thread ty pe (9) Part No. Piping port thread ty pe (9) Part No. Rc G NPT AD37N-2(Z)-A Rc G NPT AD37N(-Z)-D AD37-2-A AD37-D Appearance and part No. Semi-standard: 6 Piping port thread ty pe (9) Part No.

Table of Contents

ZR1 W 20 S 1 Ejector exhaust Nozzle diameter 2 Individual exhaust 1 Built-in silencer 10 13 1.0 mm 1.3 mm Port size: RC 1/8 (Nozzle dia. 1.0 to 1.5 mm) RC 1/4 (Nozzle dia. 1.8, 2.0 mm) 15 1.5 mm 18 1.8 mm 20 2.0 mm Maximum vacuum pressure S L 84 kPa 53 kPa 13-3-9 9 Series ZR Ejector Unit/Standard Type (S): Max.

NCM

A CAT.IBD20-2 Air Cylinder Series NCM Stainless Steel Body Cylinders 7/16", 9/16", 3/4", 7/8", 1-1/16", 1-1/4", 1-1/2", 2" Bore Now available in Now available in 7/16" and 9/16" bore 7/16" and 9/16" bore Now available in 7/16" and 9/16" bore Double Rod/Double End Mounting Non-rotating Rod Option Auto Switch Capable Nonrotating rod Auto switch capable With bumper Actuation Actuation Actuation