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Tap water: Standard of The Japan Refrigeration And Air Conditioning Industry Association (JRA GL-02-1994) Deionized water: Electric conductivity 1 S/cm or higher (Electric resistivity 1 Mcm or lower) 2 q Ambient temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: CH1 20C/CH2 25C, r Circulating fluid flow rate: Rated flow, t Power supply: 200 VAC 3 q Ambient

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less Quoted from the standard JRA-GL-02

[] -3No.PS-OMS0004CN-D () () () () -4No.PS-OMS0004CN-D () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMS0004CN-D * (Nm) R1/8 35 R1/4 812 (50N ) () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMS0004CN-D * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMS0004CN-D 0 01 PSE57 / M12(3m) 0 (01MPa) L M12(3m) 3 (-100100kPa) N 4 (0500KPa) (1~5V) 01 R1/8(M5) 28 (4~20mA) 02

Stations 02 03 2 stations 3 stations Station 3 2 1 D side U side 20 20 stations Note) Maximum of 20 stations Electrical entry Grommet/Plug lead C How to Order Valves S070 A 5 B G Electrical entry Body type Body type Base mounted with clips G C Grommet Plug lead with light/surge voltage suppressor Symbol A Coil voltage Power consumption Pressure specification Flow rate 5 6 V S R 24

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SS3Y1 31 05 Stations 02 2 stations P R 20 20 stations R port M5 x 0.8 P port M5 x 0.8 Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

Valve stations 02 2 stations VK A port size (Base mounted) 20 20 stations VZ Max. 20 01 02 common exhaust/individual exhaust 1 8 individual exhaust 1 4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Please indicate manifold base type, applicable manifold valve

How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

28 {58) 1961 8.35 1212\ 2.05 ts2) 11.2\ 2.AO (66) 803 8 6 6 :220\ 4.O2 (l 02) 307 t7B) 0 9 3 (25) 2.05 (s2) 0.55 (14) 0.83 t 2 1 l n 1 2 t 1 7 a 1.43 i.B9 M2211.51.46 137) c 7 9 (201t 1 r 6 l 1 . 1 0 (24) 1 24 :8;li' 3 r . 5 : l i i I 2.80 (71) 9.25 (235) 1 0 0 9 (25s) 2.56 (65) 0.49 r 2 5 ) 3 . 1 5 (80) 9 6 1 1244\ t0.39 :264\ 1 5 7 t 1 1 6 ) 3 6 2 t92l 0 9 8 (30) 2.05 (52) 0.83 i21l n 1

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

Double solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T) JD0 1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02

For Water 30 20 VX2 60-02 10 VX234.5 VX2 46 VX2 6010 VX2 50 8 3 2 04 03 3 2 3 2 VX223 10 3 2 VX2112 5 4 3 Flow rate Q l/min 2 1 0.001 (0.0018) (0.0054) 0.01 (0.017) 0.05 (0.07) 0.1 Pressure differential P = (P1 P2) MPa How to read the graph When a water flow of 2 l/min is generated, lP 0.017 MPa for a valve with 3 orifice (VX212, 222, 232).

3.6 (0.2) 5.4 (0.3) 5.4 (0.3) 12.6 (0.7) 14.4 (0.8) 14.4 (0.8) 16.2 (0.9) 62 Series VQ1000/2000 How to Order Manifolds VV5Q 1 08 C6 GU0 2 Options Series Stations Symbol Nil VQ2000 specifications None Back pressure check valve on all stations Note 2) VQ1000 specifications None Back pressure check valve on all stations Note 2) Symbol Nil Symbol Stations 1 2 VQ1000 VQ2000 Symbol Stations 02

ZQ 05 1U A-K15LO B-VA M W-3 3-N (1) (2) (3) (4) (5) (6) (7)(8) (9) (1) (6) 05 0.5 07 0.7 W (2m) 10 1.0 (7) (V ) (8) (P ) (2) 1U 0 (M5x0.8) 3M 1 3.2 () 0 (M5x0.8) 2 4 () 2 4 () (3) 3 6 () 3 6 () 4 3.2 () 5 4 () B 5 4 () 1) (9) (4) ( [kPa] VA -100 to 100 NPN1 + VB PNP1 + N 1) ZFC (5) 2) M SI (kPa) 2) (99 10 ) ZZQ108A-B S C-A (1) (2) (3) (4) 1 (1) 2) 01 1 S () 02

How to order SFD 1 1 0 C08 Option Symbol Option Nil None B Bracket Port size Symbol C04 4 C06 6 C08 8 02 N02 F02 Connection size Clean One-touch fittings (KP series) Rc1/4 NPT1/4 G1/4 7 Document No.DOC1018377 4. Construction and Replacement parts SFD110-C** SFD110-*02* Component Parts No.

43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D LCD () SET UP DOWN 4 24 ()OUT1ON LCD 4 UPON/OFF DOWNON/OFF SET -27-67 (-27-67 OUT2()) -9No.PS-OMH0002CN-D 7 7 "8"7 "-"(

NARM 2500 05 A 02 G1 Optimal for central pressure control. Accessory Regulator for manifold Pressure easily set using the new handle. One-touch lock system.

PSE570/573/574-01 PSE570/573/574-02 PSE575/576/577-02 Port size R1/8 M5 x 0.8 R1/4 M5 x 0.8 R1/4 M5 x 0.8 Piping port: C3604 + Nickel plating Pressure sensor: Al2O3 (Alumina 96%) Square ring: FKM Piping port: C3604 + Nickel plating Pressure sensor: Al2O3 (Alumina 96%) O-ring: FKM + Grease Materials of parts in contact with uid Without lead wire and M12 connector 88 g 95 g 103 g Weight With