Digital Flow Switch (Integrated display type)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

Air Preparation Equipment

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Magnetically Coupled

XC57 With floating joint 2 6 (1/4") Minimum Operating Pressure 0 25 50 75 100 0 25 50 75 100 Supply pressure (PSI) Supply pressure (PSI) 50, 60 30 600 23 23 23 23 22 25 Minimum operating pressure (PSI) 20 500 20 17 17 17 Theoretical thrust (Ibf) 63 (2-1/2") 15 400 10 300 5 200 0 6 (1/4") 10 (3/8") 50 (2") 15 (5/8") 20 (3/4") 25 (1") 32 (1-1/2") 40 (1-1/2") 50 (2") 63 (2-1/2") 100 Bore size

MLGP

Example Data Theoretical Output Minimum Stroke for Auto Switch Mounting OUT IN (N) (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W No. of auto switches mounted 314 283 251 220 188 157 126 94 63 314 OUT D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL 10 20 236 212 189 165 142 118 94 71 47

VK300

[Option] Electrical entry D: DIN terminal DO : DIN terminal (Without connector) G: Grommet (Lead wire length: 300 mm) H: Grommet (Lead wire length: 600 mm) Rated voltage Valve option Rated voltage Nil V Y W E DC AC CE-compliant 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz For the connector part number, refer to page

Pressure Sensor

to 50 kPa.

PSxx-OMU0002CN

5) () (01 MPa 0.001 MPa 1/1000) () () F // () -14No.PS-OMU0002CN-D (38L(2 ) 0.50.05 Nm ,, A(ZS-46-A1) 38L A B(ZS-46-A2) 38L B -15No.PS-OMU0002CN-D (a)(a) (b) (ZS-46-B) +(ZS-46-D) () 90 -16No.PS-OMU0002CN-D (-M5) 1/61/4 11.5 Nm (ZS-46-N) -01-N01 23 35 Nm -C4H-C6H-N7H-C4L-C6L-N7L 1/61/4 11.5 Nm -17No.PS-OMU0002CN-D -18No.PS-OMU0002CN-D FG () () No.

Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Fieldbus system EtherNet/IP TM compatible SI unit

marking, UL (CSA) , RoHS Weight 300 g 1: All unused connectors must have a seal cap fitted. 2: The UL compliant temperature is 0 to 50 oC. -29No.EX-OMN0032-D Dimensions (in mm) -30No.EX-OMN0032-D End plate Model Indication and How to Order EX600-ED End plate at D side Mounting method Symbol Content Connector Nil No DIN rail bracket Symbol Content 2 With DIN rail bracket 2 M12 (5 pin) 3 With

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

D-DN

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-95 5 Dimensions L5 Elbow type D3 H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 D1 Model Model AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Reuse AS-FE Nominal thread size Chamfered dimension D Min.

Dual Speed Controller with One-touch Fitting Series ASD

When used in a balance control circuit, there are instances in which the check valve cannot release, even though the pilot pressure is 50% of the operating pressure. In these cases, the pilot pressure should be the same as the operating pressure. 3. Use in load factor less than 50%. Speed control under normal operations may not function. Series AQ 2.

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

For D-A93, only outward electrical entry (D dimension) is available. Dimensions in parentheses apply to 12-CXSJ6. CXSJ10 / CXSJ10 11122122Note 2) D B Note 3) (mm) D-M9 34 (35.5) 3.5 (2) 24 (25.5) 6.5 (8) D-A93 30 (31.5) 25.5 (27) 5 (6.5) Symbol A B C D Note 1) The above mentioned values are indicated as a guide for auto switch mounting positions for stroke end detection.

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order Without auto switch 30 20 CQ2 B D 12 to 25 Without auto switch CQ2 B 32 30 Z D 32 to 100 30 32 Z M9BW B CDQ2 D With auto switch Auto switch With auto switch (Built-in magnet) Nil Without auto switch Mounting Refer to the below table for applicable auto switches.

AHC System Series MA

Without D-sub connector D-sub connector entry With D-sub connector With robot cable Without D-sub connector D-sub connector entry With D-sub connector With robot cable Nil Robot adapter Applicable shaft diameter 8 10 11 AHC unit 14 15 20 24 25 M3 M5 Tool adapter Port MA310 1 MA320 1 MA210 Electric specifications Without D-sub connector Without D-sub connector D-sub connector entry With D-sub