MB1

When replacing brackets, use the hexagon wrenches shown below. ) m m ( e z i s e r o B t l o B s t a l f s s o r c a h t d i W e u q r o t g n i n e t h g i T 0 4 , 2 3 7 4 2 1 C 8 4 2 3 B M 4 1 . 5 3 6 , 0 5 9 4 2 1 C 8 4 0 5 B M 5 1 1 0 0 1 , 0 8 t o o F 1 5 2 1 C A 8 4 0 8 B M 6 5 2 r e h t O 1 5 2 1 C B 8 4 0 8 B M 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA CHINA

Large Size Vacuum Module: Series ZR

Nil Air operated Nil Note) Air operated 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC ( Hz) 110 VAC ( Hz) Filter specifications (F) L LN Lead wire length 0.3 m L plug connector type 5 6 V S R Nil No setting Without lead wire Unit specifications LO Without connector M Lead wire length 0.3 m Digital pressure switch for vacuum (ZSE30A) specifications (D) M plug connector type Nil M P With unit switching

IDX-OM-W032

3/h 273 m 3/h 390 m 3/h 660 m 3/h m 3/min (ANR) 1 7 oC 231 m 3/h 347 m 3/h 432 m 3/h 720 m 3/h 10 oC 254 m 3/h 382 m 3/h 510 m 3/h 822 m 3/h 0.7MPa 35 oC 25 oC 230V 50Hz 550 oC 0.15MPa 1.0MPa 24085% AC230V10 50Hz (4) (2) 4.3A 6.1A 7.9A (2) 760W 1390W 1700W (3) 10A 20A R407C(HFC) 42010g 73010g 55010g 67010g R1 R1-1/2 R2 10mm 1 2 54kg 62kg 100kg 116kg 1ANR 2065% 2 3 30mA

Step Motor Driver （ Pulse input type ）

R 30 - PNP type (LECPAP-) Power supply for pulse signal Positioning unit side Inside of the driver Current limiting resistor R NP+ <3> 1k NP<4> 120 Current limiting resistor R PP+ <5> 1k PP<6> 120 Caution Be sure to install a current-limiting resistor R according to the pulse-train signal voltage.

C95

Nil (Example) A53 3 m L (Example) A53L 5 m Z (Example) A53Z : Manufactured upon receipt of order.

KR

17 18.5 17 26.5 10 23 K 25.0 35.2 1 2 KRL10-04S 37 63 28 38 22 Connection thread (With seal) 1 4 3 8 KRL12-02S KRL12-03S 35.5 37 M 17 24 39.7 50.2 17 28.5 1 2 KRL12-04S 20.9 39.5 65 12 22 H Reference dimensions after R thread installation.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket

Refrigerated Air Dryer

0.4 [9 to 11 mm]) Drain tube (O.D.: 0.4 [10 mm], Length: 39.4 [1.0 m]) J P L K 4 to 0.5 [4 to 13 mm] M N Dimensions Unit: inch [mm] A B C D E F G H J K L M N P Q R Model Port size 31.5 [800] 34.2 [868] IDFB55E 2 18.5 [470] 33.7 [855] 5.0 [128] 17.9 [455] 4.3 [110] 9.8 [250] 2 [50] 0.5 [13] 19.7 [500] 3.0 [75] 27.6 [700] 20.7 [526] 20.4 [519] 1.4 [36] 35.4 [900] 38.1 [968] IDFB75E 2 96 Series

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket

3 Port Solenoid Valve Series VQ100 1

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.

3 Port Solenoid Valve Series VQ100

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.

3 Port Solenoid Valve Series VQ100 1

VVQ100-12A-1 VVQ100-12A-2 VVQ100-12A-3 L dimension 1.5 m 3 m 5 m Mounting direction D side mounting U side mounting D U Note) The number of manifold stations cannot be changed.

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

M max is the allowable moment. 2 = M/M max MY 2. Static moment CY 3 = Me/Me max Review Me1, Me3. Me max is the allowable moment. 3.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

M max is the allowable moment. 2 = M/M max MY 2. Static moment CY 3 = Me/Me max Review Me1, Me3. Me max is the allowable moment. 3.

IDX-OM-W034

3/h) (273 m 3/h) (384 m 3/h) (510 m 3/h) Air FlowRate (ANR)(Note 1) 120SCFM 173SCFM 258SCFM 353SCFM At Expected Outlet Press.Dew Point of 45 oF (7.2 oC) (205 m 3/h) (294 m 3/h) (438 m 3/h) (600 m 3/h) 130SCFM 181SCFM 297SCFM 406SCFM At Expected Outlet Press.Dew Point of 50 oF (10 oC) (221 m 3/h) (308 m 3/h) (504 m 3/h) (690 m 3/h) Operating Pressure 100psig (0.7MPa) Condition Rated Inlet

reduces flow setting time

NPT thread r !

4-channel Flow Monitor ( compatible)

) 0x1F88 (8072) 1 R Rated range lower limit N S16 2 R Rated range upper limit N S16 3 R Measurable range lower limit N S16 0x1F9A (8090) 0x1F9B (8091) 0x1F9C (8092) 0x1F9D (8093) 4 R Measurable range upper limit N S16 5 R Settable range lower limit N S16 6 R Settable range upper limit N S16 1: "R" means Read and "W" means Write.

Air Cylinder Series CA2

7 r !4 !8 !6 !2 t u !5 o !1 !

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181