0.4

Manifold base recommended dimensions Lead wire Base mounting hole 1 (IN) 2 (OUT) 1 (IN) 9.5 or more Valve mounting pitch 2 (OUT) A A M3 x 0.5 Thread depth 5 2 (OUT) port 1 (IN) port 3 M3 x 0.5 Thread depth 5 Electrical entry can be on the either side, right or left. 2 (OUT) port 3 11 11 40 Sectional view A-A (2:1) 4 4 46 or more RZ12.5 1 (IN) port 510 High Speed 2 Port Valve SX10 Series Control

Series HAW Water Cooled Aftercooler 1

Rc 1/2 Rc 11/2 Rc 2 3B flange Rc 11/4 Rc 1 32 67 78 Rc 1/2 Rc 1/2 Rc 3/4 Rc 3/4 Rc 1 Rc 3/4 Weight (kg) Coating color Drain valve (1 pc.) 9.7 11.5 59 95 High efficiency drain Drainage is efficiently removed by built-in drain separator. Visible outlet air temperature Outlet air temperature is easily checked by thermometer, resulting in easy maintenance.

MHx-OMZ0005

: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 () 3 - (610) 1 (M623) 4 1 1 1 (M410) 4 MOTOMAN-HC10DT 1 MOTOMAN-HC10 1 JMHZ2-16D-X7400B-HC10DT-(*) JMHZ2-16D-X7400B-HC10-(*) (M6x12) 4 (610)1 (M48) 2 2 (M46) 2 2 4 M8-Molex 1 (TU0425BU-100) 2m 4 - 2.

HEC-OM-U015

ERR02 System error 2 #1 and #2 change when [ ] or [ ] is pressed. Indicates control operation mode during normal operation and set values during setting mode selection.

VF1000-OMP0001

) ) ) ) PE 1) 1) 1) 1) 2) 2) 2) 2) PE PE (AMC ) 3 3 3 3 (A,B) (N.C.)N.O.3 3 B (CYL.1) A (CYL. 2) N.C.

AKH/AKB Series Check Valve with One-touch Fitting

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

EX600-SEN_eng

Description Function 1 10 2 6 9 Displays the status of the unit. 4 3 8 7 11 5 DIN rail mounting groove 4 1 Intermediate reinforcing brace (EX600-ZMB2) 12 Intermediate reinforcing brace (EX600-ZMB1) DIN rail 2 Valve plate (EX600-ZMV ) 1 End plate bracket (EX600-ZMA2) 2 3 4 Refer to the SMC website (URL http://www.smcworld.com) to obtain more detailed information about setting and adjustment

1

In the case of a switch with 2 outputs, the Output 2 is using calibration points P3 and P4. Reversal Mode reverses above operation. Window Comparator Mode can be applied in situations where the supply pressure has to be within a certain range. Vacuum L = Effective area H = Fixed hysteresis (2% F .S.)

EX600-SPRA_eng

Seal cap (2 pcs.) Mounted on to unused connectors (BUS OUT and PCI). 12 11 10 9 8 6 5 3 1 7 4 2 Direct mounting (1)When joining six or more units, fix the middle part of the complete EX600 unit with an intermediate reinforcing brace (EX600-ZMB1) before mounting using 2-M4x5 screws. Tightening torque: 0.7 to 0.8 Nm. DIN rail mounting (Available for series other than SY series.

MHx-OMZ0003

No.MH*-OMZ0003 / / JMHZ2-16D-X7400B-TM . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. () . 10 3-6. . 11 3-7. . 12 4. . 13 4-1. . 13 4-2. 3 . 14 4-3. . 15 5. . 16 5-1 . 16 5-2. . 16 5-3.

Multistage Ejector

Remove the four round head combination screws (M2.5 x 53) (1). 2. Remove the two sound absorbing materials A (3) and sound absorbing material B (4) which are integrated into the end plate (2), and integrate the spare part (ZL212-SP01). 3. Reassemble the four round head combination screws (M2.5 x 53) (1).

Regulator

IR20-OM00010 PRODUCT NAME Regulator MODEL / Series / Product Number IR2200-A IR2210-A IR2220-A Contents Safety Instructions 2 to 6 2. Specifications 7 1. Application 7 3. Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8.

PFxx-OMK0003CN

*2) 1. 2. 3. 1. 2. 3. 4

AC Servo Motor Driver (Parameter Configuration using Setup software (SigmaWin+ TM ))

The Edit Parameters window will be displayed. 2. Select the Load from file. 3. Click "OK". "Open" window will be displayed. 1 2 1 2 3 18 - 4. Please specify location of the file. 5. Please select the file you wish to import parameters [.usr]. 6. Click Open. The "Parameter Editing" window will appear, parameters will be read. 7.

Precision Regulator

IR-OM09 PRODUCT NAME Precision Regulator MODEL / Series / Product Number IR2000-A IR2010-A IR2020-A Contents Safety Instructions 2 to 6 1. Application 7 2. Specifications 7 3. Construction and Operation Principles 8 4. How to order 9 5. Bracket, gauge and switch assembly (optional) 10 6. Panel mounting 11 7. Troubleshooting 12 8.

ZCUK

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

Low Maintenance Filter Series FN1

4 4.5 100% 0 2 4 4.5 100% 0 2 4 4.6 102% 0 2 4 4.4 98% 0 2 4 4.5 100% Time it takes to clog the filter (min) The values in percentage indicate the percentage of times when the time it took to clog the filter for the first time is set to 100% Introduce a certain concentration of dust and back-flush the filter when the pressure loss reaches 0.2 MPa.

Multistage Ejector Series ZL

G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

EX600-SEN3_4_eng

Please keep this manual handy for future reference. 11 Connect the M12 connector cable. The M12 SPEEDCON connector connection method is explained below. (1)Align mark B on the metal bracket of the cable connector (plug/socket) with mark A. 7 10 8 1 9 (2)Align with mark C on the unit and insert the connector vertically.