Flow ranges (lpm): 0.5-4, 2-16, 5-40, 10-100; Piping sizes (Rc, NPT, or G): 3/8, 1/2, 3/4, 1; Temperature range (°C): 0 to 90; Accuracy (flow): ±3% F.S.; Repeatability (flow) ±2% F.S.; Accuracy (temperature): ±5% F.S.

(e), UR16(e); URCap software downloadable; Standard ISO9409-1-50-M6

Inc.; Compatible with TM5, TM12, and TM14; TMComponent software downloadable; Standard ISO9409-1-50-M6.

Integrated vacuum ejector, air supply/release valve, pressure sensor, and cups; Cup shape variations: flat, flat with rib, bellows, thin flat, multi-stage bellows, 2.5 bellows, 5.5 stage bellows or without cup; Cup material: NBR, silicone rubber, urethane rubber, FKM, FDA compliant silicone rubber; Cup diameter sizes (mm): 8, 10, 13, 16, 20, 25, 30, 32; Standard ISO9409-1-50-M6

Integrated vacuum ejector, air supply/release valve, pressure sensor, and cups; Cup shape variations: flat, flat with rib, bellows, thin flat, multi-stage bellows, 2.5 bellows, 5.5 stage bellows or without cup; Cup material: NBR, silicone rubber, urethane rubber, FKM, FDA compliant silicone rubber; Cup diameter sizes (mm): 8, 10, 13, 16, 20, 25, 30, 32; Standard ISO9409-1-50-M6

Integrated vacuum ejector, air supply/release valve, pressure sensor, and cups; Cup shape variations: flat, flat with rib, bellows, thin flat, multi-stage bellows, 2.5 bellows, 5.5 stage bellows or without cup; Cup material: NBR, silicone rubber, urethane rubber, FKM, FDA compliant silicone rubber; Cup diameter sizes (mm): 8, 10, 13, 16, 20, 25, 30, 32; Standard ISO9409-1-50-M6

Body Class: 4 (Class 4, Orifice ø12), Valve Type: 0 (Normally Closed), Fitting Type: D (w/Double Ferrule Fittings), Applicable Tube Size: 13 (1/2), Pilot Port Thread Type: M5x0.8 (or Rc 1/8), Material: AD (Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE)

Body Class: 4 (ø10 Orifice), Tube Size: 13 (1/2"), Breathing Port Thread: Threaded, NPT1/8, Handle: 1 (90 Degree Turn Type), Option: N (For Ammonium Hydroxide)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: R (Thread Type 1/8 Rc)

Body Class: 4 (Orifice Dia. ø10), Valve Type: 0 (N.C.), Applicable Tubing Size: 13 (1/2"), Port B (OUT) Different Dia. Size: Ports A & B Same Size, Pilot Port Thread Type: 2 (M5X0.8), Pilot Port Position: None (Position 1), Material: Standard, Option: 3 (With Flow Rate Adjustment & By-Pass)

Size: 4 (Size 4), Type: U (Nut Insert Bush), Tubing Size: 13 (1/2" x 3/8"), Packaging: 1 (Standard Packaging Equivalent to Class M5.5)

Body Class: 5 (ø16 Orifice), Valve Type: 2 (Double Acting), Fitting Type: V (LQ1, Body Class: 2, 3, 4, 5, 6), Tube Size: 13 (1/2"), Output Tube Size: None, Pilot Connection: N (Thread Type 1/8"NPT)

Body Class: 4 (ø10 Orifice), Fitting Size: 13 (Tubing O.D. 1/2), Breathing Port Thread: Threaded, NPT1/8, Handle: 1 (90 Degree Turn Type)

Body Class: 4 (ø10 Orifice), Valve Type: 2 (Double Acting), Fitting Size: 13 (1/2"), Pilot Port Thread: R (Thread Type 1/8 Rc)

Body Class: 4 (ø10 Orifice), Tube Size: 13 (1/2"), Breathing Port Thread: Threaded, NPT1/8, Handle: 1 (90 Degree Turn Type)

Body Class: 5 (ø16 Orifice), Valve Type: 0 (N.C.), Fitting Size: 13 (1/2"), Pilot Port Thread: R (Thread Type 1/8 Rc)

Body Class: 5 (ø16 Orifice), Valve Type: 2 (Double Acting), Fitting Size: 13 (1/2"), Pilot Port Thread: R (Thread Type 1/8 Rc)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Tube Size: 13 (1/2"), Pilot Port Thread: N (Thread Type 1/8"NPT)

Body Class: 4 (ø10 Orifice), Valve Type: 0 (N.C.), Fitting Size: 13 (1/2"), Pilot Port Thread: R (Thread Type 1/8 Rc)

Body: 4 (Orifice Size ø12), Fitting: 13 (1/2"x 3/8", Class 4), Pilot Port Type: N (Thread Type; NPT 1/8")