Compact Vacuum Ejector Series ZQ Please refer to the catalogue to confirm the sizes of the fittings to be used. n: Number of stations (mm) Dimensions 5 6 1 26 52 2 36 52 3 46 62 4 56 72 5 66 82 6 76 92 7 86 102 8 96 112 n L1 L2 EXH EXH P PE P PE V V V V Circuit ZQ13M-K1-D ZQ13M-K2-DK ZQ13M-J1-F ZQ13M-Q1-FK 9 Series ZQ Manifold Exploded View 6 3 6 4 6 b b view 4 6 2 a 5 a 5 5 Component Parts No.
VXA 8 15 5 VN M5,1/8 1 (IN) port M5,1/8 2 (N.C.) port 8.5 (6.3) LVC 6 12.8 LVA 1/8, 1/4 1/8, 1/4 2-M3 x 0.5 thread depth 5 1 (IN) port Dimensions inside ( ) are for port size 1/8. 2 (N.C.) port LVH LVD LVQ 2-M4 x 0.7 Thread depth 6 LQ LVN Bracket assembly part no.
LC6D Connector Cable LC6C Power Connector Cable Model LC6-1-C1--X258 Model LC6-1-C2--X252 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17 18 Interface cable 7 9 8 Power cable
Diagnostics map Error code Description Item Bit no. 1 Detection of a short circuit of US1 or US2 6 or 7 2 Detection of the range upper limit 3 3 Detection of the range lower limit 2 6 Detection of unconnected load 5 System diagnostic 1 7 Detection of the user setting upper limit 1 8 Detection of the user setting lower limit 0 9 Detection of the upper limit of the ON/OFF cycles 4 16 Detection
CK1 CLK2 CLKG Graph (1) Graph (2) 4 6 101 CKQ CLKQ MK50 200 MK63 Note) CK CLK 2 MK32,40 MK50, 63 4 6 102 CKQ 100 MK20,25 MK32, 40 80 Moment of inertia [kgm2] MK16 2 MK20, 25 Arm length [mm] 4 6 103 60 40 MK12 2 MK12, 16 4 6 104 MK63 Note) 20 2 Operating range Operating range 4 6 105 10 2 50 0 100 82 150 200 0.45 0.55 0.2 0.4 0.6 0.1 1 Maximum piston speed Note) [mm/s] Operating pressure [
[F 1] OUT1 28 No.LFE*-OMY0008 1. 1. 1. 1. [F 1] [oUt1] 30 () 2. 2. 2. 2. (ON-OFF ) 29 No.LFE*-OMY0008 3. 3. 3. 3. a. ([n_1]) (33 ) b. ([n1L]) [P1H] or [n1H] ([n1H]) (33 ) 30 No.LFE*-OMY0008 c. ()/() ( [n1AH]) ( [n1dH]) () 31 No.LFE*-OMY0008 ( ) 3 6 3 1 3 6 6 1 1 1 32 No.LFE*-OMY0008 4. 4. 4. 4.
Specifications 5 gal/min Symbol OUT1 OUT2 6 Yes Yes gal/min A NPN NPN 7 Yes gal/min B PNP PNP C NPN Analogue 1 to 5V D NPN Analogue 4 to 20mA Thread type Port size Symbol Content Rated flow range Symbol Port size Nil Rc 1 2 3 N NPT 3 3/8 Yes F G 4 1/2 Yes 6 3/4 Yes 8 1 Yes -11No.LV50***-OMQ0002-G Lead wire With M12 connector and no lead wire With lead wire and M12 connector Bracket None
For manifold type 30, 31 VP Standard type (Cv: 0.008) SY1 3 5 L 1 M3 : Body ported VG VP Standard type (Cv: 0.008) 5 1 SY1 4 M : Base mounted S070 3 port VQ Port size Rated voltage For DC Nil: Without sub-plate M3: With sub-plate VKF 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC VQZ VZ Sub-plate style For manifold type S41 For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC VS (With gasket and screws)
1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZF ZP SP ZCUK Add or deduct the mass shown in the table on the left for order materials.
absorber) 2 8 Compact hexagon nut 2 7 Pinion 1 6 Piston 2 5 End cover 1 4 Seal 1 3 Plate 1 2 Cover 1 1 Body 1 No Description Qty Note . 19 - MSQB70200 (Adjustment bolt type, Internal shock absorber type) 30 Product label 1 29 Plug 2 28 Steel ball 2 27 Seal washer 2 26 Parallel key 1 25 Type CS retaining ring 2 24 Hexagon socket head cap screw 8 23 Hexagon socket head cap screw 6 22 Hexagon
Product Specifications 3-1.How to order 6 - 3-2.
1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts No. No. Qty Description Material Remarks Description Material Remarks Qty 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Rod cover Cushion spear A q o 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Head cover Cushion spear B w !
Flow Rate and Effective Area Flow Direction Symbol on Body AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 1.5 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 2 6 8 1/4" 5/16" 460 7 6 10 8 10, 12 6 JIS symbol Inch size Tube O.D. 5/16" 5/32" 1/4" 1/4" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 660 10 290 4.5 390 6 920 14 920 14 1390 21 20 0.3 130 2 230 3.5 Controlled flow (Free flow) Effective
Body size Proper tightening torque Nm 0.3 1 1.5 4 10 M5 1/8 1/4 3/8 1/2 6 Series AS-FPQ/FPG Specific Product Precautions 2 Be sure to read before handling. Installation and Removal of Tubing Maintenance Warning Caution 1. Installation of tubing 1) Using tube cutters TK-1, 2 or 3, take a tube having no flaws on its periphery and cut it off at a right angle.
24 VDC 12 VDC 6 VDC 5 VDC 3 VDC There are only 24 VDC and 12 VDC types for type U.
) 3 Individual 1 8 1 4 , 1 4 1 8 VZ Note) For more than 6 stations, supply air both sides of P port.
Models Note 1) Action Model Cylinder bore (mm) Opening/closing stroke (mm) Rotation angle () Weight g (lb) 306 (0.67) 90 MRHQ10D 4 10 305 (0.67) 180 598 (1.32) 90 MRHQ16D 6 16 596 (1.31) 180 Double acting 1055 (2.32) 90 MRHQ20D 10 20 1052 (2.32) 180 1561(3.44) 90 MRHQ25D 14 25 1555 (3.43) 180 307 (0.68) 90 MRHQ10S MRHQ10C 4 10 306 (0.67) 180 MRHQ16S MRHQ16C 600 (1.32) 90 6 16 598 (1.32) 180
ASS ASR ASF Male thread Proper tightening torque Nm Width across flats mm Nominal size of adjustable angle wrench mm M5 1/6 turn after hand tightening 8 100 12 17 19 24 7 to 9 12 to 14 22 to 24 28 to 30 1/8 1/4 3/8 1/2 150 200 200 200 Lock Nut Tightening Torque Caution 1. The proper tightening torque for the hexagon lock nut is as shown in the table.
4 inch face seal (Female) 1/4 inch face seal (Male) 1/4 inch tube weld 3/8 inch face seal (Female) 3/8 inch face seal (Male) 3/8 inch tube weld 1/2 inch face seal (Female) 1/2 inch face seal (Male) 1/2 inch tube weld Code Code 1 to 30 psig (0.007 to 0.2 MPa) Delivery pressure Bonnet Standard Panel installation 6) Short type 7) Code FV4 MV4 TW4 FV6 MV6 TW6 FV8 MV8 TW8 02 No code P SC Sub-atmospheric