C76

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

C76

1 !2 !3 !4 !5 !6 !7 !8 !9 @0 q w e r t y u i o !

MNB

8 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/8 1/8 1/8 1/8 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 13 13 14 14 20 20 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 3 3 2 2 4 4 10 10 12 12 16 16 72 83 100 115 126 150 38 46 52 62 63 75 87 101 120 135 153 178 56 65 77 92 100 120 54 63 75 90 102 116 Bore size (mm) 32 40 50 63 80 100 K MM N P Q H S T V W ZZ VA GA GB GC GD J GL GL1 GR GE GF 8.5 10 12.5 17.5 22 25

Fieldbus System

Stations 1 station Symbol 01 I/O Unit stations 16 Note) 16 stations Nil None 1 station Note) Max. number of stations depends on the wiring specifications. 1 9 9 stations Note 1) Without SI Unit, the symbol is nil. Cylinder port size Note 2) SI Unit is not included in I/O Unit stations.

KQ2

13.5 10.5 13.5 11 17.5 14.5 11.5 7 1 8 15.5 2.5 1 4 1 8 10 6 5 32 16 3 1 4 10 Applicable tubing 1 8 1 4 7 3 16 16 3.5 9 1 8 14.29 12.7 9 1 4 3 8 1 4 17 4.6 11 17.46 16 1 8 15.5 20.5 12 14.29 1 4 3 8 5 16 18.5 6 9 13.5 17.46 16 Connection thread 1 4 19 17.46 22 28 3 8 1 2 3 8 21 7 16 14 22 22.23 30 22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

MGG

9 is type L only. r!1!6!7!8!9@0@1@2@3@6@9#0#1#3#4#5#6#7 -XC6A 63, 80, 100 !7 is type L only, #1 is type B only, #9 and $0 are type F only. r!0!5!6!7!8!9@0@1@3@4@7@8@9#1#2#3#4#5#9$0 20, 25, 32, 40, 50 #1 is rod side only. r!1!7@0@1@2@3#1#5 -XC6B 63, 80, 100 @9 is rod side only. r!0!5!8!9@0@1@9#3 20, 25, 32, 40,50 r!1@0 -XC6C 63, 80, 100 r!0!

Series VQ Base Mounted Metal Seal/Rubber Seal

1> 0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0 -0.036 0 -0.043 0 -0.043 2H9 6 7 9 11 12 MRHQ 3H9 8h9 4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7 7.5 8 O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 UB 6 7.5 10 9 12 VA VB 3 4 4 5 6 WA

0.4

2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 VF Station 1 Station 2 15 14 3 2 1 VP4 VV5Q21 17 16 25 24 13 Station 3 23 18 12 4 VQ 1/2 VQ 1/2 26 22 19 Station 4 11 5 21 20 10 9 8 7 6 Station 5 VQ 4/5 The total number of stations is tabulated starting from station one on the D-side.

HRX-OM-Y098

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.4 2.2 3.0 Control method PID control Ambient temperature C 2 to 45 Circulating fluid1 CH1 : Clear water,DI water (pure water)9 / CH2 : Clear water,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 9 1 8 19 1 8 26 1 8 Heating capacity3 kW 1.5 1 4.5 1 6.5 1 Temperature

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

Programless controller Step motor (servo 24 VDC)

Brown 2 A B-1 Cable length (L) Red 1 A A-1 Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A / COM B-3 A 10m *1) Blue 4 COM-B / A-3 B 15m *1) Shield Cable color Terminal no. C 20m *1) Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 *1) Produced upon receipt of A A-5 Black 6 order. B B-6 Orange 9 Only Robotic type cable can be selected.

Modular Design with Uniform Body Style

V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 110 35.5 50 75.2 40 55 9 18 7 50 65 AC40-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 110 35.5 50 80.2 40 55 9 18 7 50 65 AC50-V-D 3/4, 1 1/8 1/

CNG

9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

VQ5000

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

Valve Single Unit

Common connector assy for manifoldRefer to page 1-6-9.

VQ4000

1 A SMC A 4 2 Indicator light R4.5 Stations 12 X (External pilot port) Rc 1/8 9 9 12 106 10 16.5 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 (Pilot EXH port) Rc 1/8 SMC 1 P 5 3 R2 R1 42 17.5 PE 18 18 38 72 L n Dimensions Formula L1 = 25n + 63, L2 = 25n + 198 n: Stations In the case of DI unit, 1 pc., 54 mm is added per 1 pc. 9 288 423 10 313 448 7 238 373 11 338 473 6 213 348 12 363

Valve Single Unit

Common connector assy for manifoldRefer to page 1-6-9.

Compact Manifold Regulator Series ARM5

Regulator Block Stations 1. Manifold Mounting ARP Direct mount B A Stations Symbol 1 2 3 4 5 6 7 8 9 M Symbol IR 1 station DIN rail mount How to mount 1 station 2 stations 3 stations 2 stations IRV 3 stations 4 stations VEX1 5 stations Appearance 6 stations SRH 7 stations 8 stations SRP 9 stations 10 stations SRF 4. Accessory 3.