CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

CV/MVGQ

A34 A44 B59W G59 G5P K59 G39 K39 G59W G5PW K59W G59F 100 V Relay, PLC PLC Yes Yes Relay, PLC 100 V, 200 V 12 V Terminal conduit PLC 24 V 2-wire 100 V 200 V DIN terminal Grommet Relay, PLC Diagnostic indication (2-color indication) 3-wire (NPN) 24 V 5 V,12 V IC circuit 3-wire (PNP) Grommet 100 V, 200 V 12 V 5 V, 12 V 12 V 5 V 12 V 12 V 5 V, 12 V 2-wire IC circuit Terminal conduit

Vacuum Unit

Note Example Symbol Type E J K L P W Nil Without option V V V V B With DIN rail mounting bracket4 V V V V ZK2C10R5NC1A-08 ZK2C07R5NC1A-08 D With common release pressure supply (PD) port V V V 5 V Cannot be selected ZZK204A-A1P-B when r is N L Manifold individual supply specification V V V 5 V Individual supply port 1 2 3 Stations D side U side 3 When more than one option is selected

ZP

e r t y u i Deep type t Buffer stroke q Vacuum inlet direction w Pad diameter Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral (With barb fitting) 10 10 16 16 25 25 40 40 Stroke [mm] Pad diameter [mm] 10 16 25 40 10 V V V V 20 V V V V 30 V V V V 40 V V V 50 V V V V e Material N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive NBR GS Conductive silicone rubber

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

48 V, 100 V, 110 V, 120 V, 200 V, 220 V, 230 V, 240 V DC 12 V, 24 V Allowable voltage fluctuation 10% of the rated voltage Allowable leakage voltage AC 5% or less of the rated voltage DC 2% or less of the rated voltage Apparent power*4, *5 AC 4.5 VA 8 VA 9.5 VA Power consumption*4 DC 4 W 6 W 8 W Temperature rise*6 AC/DC 70/65C Glossary of Terms Coil specifications *1 Leakage: The value at

Air Cylinder

V V V V V V V V Standard V V V V V V V V V D v v v v v v v V v CM2lF v v v V V v CM2l-l J K V CM2lH V v v V v v v V 10-, 11v v v v v v v 25ANote 6) CM3 CG1 CG3 Note 5) JMB V V V v V v 20Note 4) v v v V v CM2l R V V v V CM2lX v v CM2lM Note 5) MB MB1 v XB6 CA2 v v XB7 v v v v v XB9 v v v v v v XB12 CS1 v v v XB13 CS2 v XC3 v v v XC4 Note 5) v v v XC5 v v XC6 v v v v v XC8

REA/REB

F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit

REA/REB

F7BWV F7BAV 200 V 100 V 12 V Relay, PLC 2-wire 24 V Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) Yes 24 V Diagnostic indication (2-color indication) 5 V, 12 V IC circuit Grommet 2-wire Water resistant (2-color indication) 12 V 4-wire (NPN) With diagnostic output (2-color indication) 5 V, 12 V IC circuit

Slider Type Ball Screw Drive/11-LEFS Series

Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 * Please consult with SMC for

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W W W Dynamic Moment Moment generated by the load equivalent to impact at the stroke end Guide central axis We = WV V = 1.4 Va Average load coefficient Pitch moment Me1 = 1/3. We L Yaw moment Me3 = 1/3.

10

v 25A CG1 v v MBlR V CG3 v v v v v v 10v 20JMB v v XAl MB MB v v v v v v v XB5 v v v v v XB6 MB1 v v v v v XB13 CA2 v v XC3 v XC4 CS1 v v v v v XC5 CS2 v XC6 Note 8) Note 8) v XC7 v v v XC8 v v v XC9 v v XC10 Note 4) Note 4) v v v v v XC11 v v v v v XC12 v v XC14 Note 3) v v v v v XC22 XC26 v v XC27 v v v v XC29 XC30 v v XC35 v XC65 XC68 XC88 XC89 XC91 Dv v v

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

J79W F7BA 200 V 100 V Relay, PLC Yes 2-wire 12 V Connector 24 V Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC 24 V Water resistant (2-color indication) 12 V 2-wire Grommet With diagnostic output

5 Port Solenoid Valve Series SY3000/5000/7000/9000

12 V 100 V 200 V 110 V 220 V Part no.

Integrated Controller

[kg] Work load: W [kg] 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1200 Speed: V [mm/s] EQFS32HA/Ball Screw Drive Horizontal/Lead 16 Vertical/Lead 16 60 55 50 45 40 35 30 25 20 15 10 5 0 15 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 3000 mm/s2 5 5000 mm/s2 10 mm/s2 0 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800 0 Speed: V [mm/s] 100 200 300 400 500 600 700 800

smcmaintenancepartslist

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Cylinder with Lock

Mounting Rod Nil Single rod W Double rod Symbol Description Single rod Double rod B Basic v v L Axial foot v v F Rod flange v v G Head flange v v C Single clevis v D Double clevis v Number of auto switches Pivot bracket Nil No bracket N Pivot bracket Cylinder stroke [mm] Refer to page 10 for standard strokes.

Thermo-chiller

type 0.1 5 to 40 V V V HRS090 Standard type 0.5 5 to 35 V Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V HRSH090 Inverter type 0.1 5 to 40 V Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (400 V as standard, 200 V as an option

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

Environment

1200 Speed: V [mm/s] Speed: V [mm/s] LEFS40/Ball Screw Drive Horizontal Vertical 70 Lead B 60 30 Work load: W [kg] Work load: W [kg] 50 Lead B Lead A 40 20 30 Lead H 20 10 Lead A/Lead H 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 39 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication For the LECP6/LECP1/ LECPMJ

MY1

(L) 5 (Z) Z76 Z73 Y59A Y7P Y59B Y7NW Y7PW Y7BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Reed switch IC circuit 5 V Yes Yes Grommet Relay, PLC 12 V 100 V 24 V Y69A Y7PV Y69B Y7NWV Y7PWV Y7BWV IC circuit 5 V, 12 V Solid state switch Relay, PLC 12 V Grommet 24 V IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 12 V