ARJ310

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Serial Network

Note 2) Can set pressure with 4096 resolution, corresponding to the maximum setting pressure 100%. Note 3) Can monitor pressure with 4096 resolution corresponding to the maximum output pressure 100%. Glossary of Terms SERIAL NETWORKS SMC Serial Network Systems SERIAL NETWORKS SOLENOID VALVE MANIFOLDS What exactly is the difference between an open network and a closed network?

NAME

Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.

Precision Clean Regulator

120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

VXF2

F G H J K L M N P Q R S T U V W 65A 5 100 VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor 100 VAC 7 8 90A B Flange type 110 VAC 100A 200 VAC 230 VAC 24 VDC Conduit terminal 100 VAC with surge voltage suppressor 110 VAC 200

VXS

F C37 1/2 15 G Stainless steel B 100 VAC Grommet With surge voltage suppressor C 110 VAC 5 20A N.C. H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

In-line Air Filter ZFC Series

Metric size 2 3.2 3.2 4 4 6 6 8 10 12 Inch size 1/8" 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" 3/8" 0.8 Fluid Air, Nitrogen 0.6 Operating pressure 100 kPa to 1.0 MPa (at 20C) Flow rate (Positive pressure) [L/min] *1 15 45 50 80 100 200 250 450 550 650 0.4 Flow rate (Vacuum pressure) [L/min] 2 5 7 10 10 20 30 70 80 100 0.2 Proof pressure [MPa] 1.5 (at 20C) Operating and ambient temperature range

AC Servo Motor Driver (MECHATROLINK-III type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

ATX-OM-F003E

212 37 704 138 165 257 245 215 206 254 90 120 60 120 150 4.5 12 1 1/2 3/4 3/4 359 371 HAW37-14 1354 893 258 80 1056 170 216 315 264 219 234 305 100 140 66 140 139 6.0 18 1 1/2 3/4 1 380 431 HAW55-20 1612 1038 366 150 1203 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW75-20 2112 1538 366 150 1703 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375

IDX-OM-M051

NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

Membrane Air Dryer

When there are large quantities of dust (solid foreign matter), install an air filter or main line filter to the inlet side of the mist separator. e. Install a regulator on the outlet side of the membrane air dryer. Dehumidification performance will be reduced if a regulator is a regulator is installed on the inlet side of the membrane dryer. f.

AMX-OM-Q018E

For low dew point air, use stainless steel or fluoropolymer piping. e. Installation of Differential Pressure Gauge Please attach by a customer.

Fieldbus system CC-Link compatible SI unit

Ignores excess current per unit for 100 msec. after inrush. Disable Does not ignore excess current Enable Ignores excess current.

Miniature Regulator Series ARJ310

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Ambient Dryer Series AMG

. compressor sizes ranging from 1 100 horse Povtrer.

Miniature Guide Rod Cylinder Series MGJ

5 e !1 No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

suppressor With light/surge voltage suppressor Types S, Z Types R, U 38 or less 2 position single 33 or less 31 or less 30 or less 2 position double 28 or less 27 or less 56 or less 3 position 50 or less 50 or less Solenoid Specifications Grommet (G), (H), L type plug connector (L), M type plug connector (M), DIN terminal (D) Note 1) Electrical entry 24, 12, 6, 5, 3 DC Rated coil voltage V 100