[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal Lubrication Manual override Impact/Vibration resistance (2) Enclosure VV061 Non-locking push type 150/50 m/s2 VT325-C VV100 Dustproof Note 1) Based on dynamic performance test, JIS B 8419: 2010.
Standard supply pressure Nil A Side/Bottom entry Side entry Vacuum switch electrical entry M S 0.35 MPa 0.45 MPa 0.5 MPa H Body style Nil L C CL CN Nil L Grommet type, with 0.6 m lead wire (ZSE1) Grommet type, with 3 m lead wire (ZSE1) Connector type, with 0.6 m lead wire (ZSE1) Connector type, with 3 m lead wire (ZSE1) Connector type, without connector assembly Grommet type, with 0.5 m lead
LEC6 DC24 0V Shutdown is lifted Switch Ry Stop Switch Gateway EMG + Surge suppressor Ry Unit EMG Power supply plug (1st. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (2nd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Power supply plug (3rd. unit) BK RLS EMG Ry C 24V Controller input power 24V 0V 0V M 24V Caution When the stop signal
IODD file 1 D-MP025A/B/C SMC-D-MP025-ymmdd-IODD1.1 2 D-MP050A/B/C SMC-D-MP050-ymmdd-IODD1.1 3 D-MP100A/B/C SMC-D-MP100-ymmdd-IODD1.1 4 D-MP200A/B/C SMC-D-MP200-ymmdd-IODD1.1 : "ymmdd" indicates the file preparation date. y is the year, mm is the month and dd is the date.
For connector with mark C, one piece of cylinder side connector (male) is enclosed. CE1 without connector can be directly connected to terminal block of counter. CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 3.
PF3W511/521 (Vinyl chloride piping) -38No.PF-OMN0010-J Flow characteristics of the flow rate adjustment valve PF3W504S PF3W520S PF3W540S -39No.PF-OMN0010-J Analogue output Analogue output (Flow) (PF3W504/520/540) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA (PF3W511) A B C Voltage output 1 V 1.4 V 5 V Current output 4 mA 5.6 mA 20 mA (PF3W521-12/14) A B C Voltage output
r e\ " f = ; C ; i r _ , i o q m l r a 6 d . t o a d J o r . \\.:j+_ | aq6 oe.orr qredrasa I | -! swirch stumedoFF,and _ .";i I I Ta u! oardvrs,k. \_, 1_l Whe. 1wo switchos ar6 ANDcoiiecled.loadma f uncl o may r6urt b@use oJ flie toad voll aged@Pwhe. the swilchs ae luffed ON. l?piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!
S IN OUT T IN OUT V G Plate thickness AR20K to AR30K: Max. 3.5 AR40K: Max. 5 L Pressure gauge (option) B Pressure gauge port size M Bracket (option) N Q K P F J E AR50K, 60K Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port size M Port size Bracket (option) N Q K P F J E Standard specification Accessory specification With pressure
r e\ " f = ; C ; i r _ , i o q m l r a 6 d . t o a d J o r . \\.:j+_ | aq6 oe.orr qredrasa I | -! swirch stumedoFF,and _ .";i I I Ta u! oardvrs,k. \_, 1_l Whe. 1wo switchos ar6 ANDcoiiecled.loadma f uncl o may r6urt b@use oJ flie toad voll aged@Pwhe. the swilchs ae luffed ON. l?piLl lanp lighls wh6n hlo swilches a turned ON Eran0e P$s!
10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H
Endurance 10 G; X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24-M3 x 0.5 B phase J A B C D A COM COM COM B 12 VDC GND F.G.
24 V Grommet Yes 3-wire (NPN) IC circuit Diagnostic indication (2-color display) 5 V, 12 V 3-wire (PNP) 12 V 2-wire Lead wire length symbols: Auto switches marked with are made to order specification. 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Note 1) Take note of hysteresis with 2-color indication type switches.
Fluid temperature [C] 382 A Digital Flow Switch PF2D Series For Deionized Water and Chemical Liquids How to Order Remote Type Monitor Unit PF2D3 A 0 M 0 Unit specification Nil M With unit switching function Fixed SI unit Note) Output specification 0 1 NPN open collector 2 outputs PNP open collector 2 outputs Note) Fixed units: Real-time flow rate: L/min Accumulated flow: L A Mounting Panel
[February 2020] C: Contents are added. [February 2021] D: Contents revised in several places.
(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.
(Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Note 1) Assembly includes a bracket and set nuts.
Panel adapter B ZS-22-02 Output specifications 0 1 NPN (2 outputs) PNP (2 outputs) Specifications Model PFW300-m PFW301-m PFW310-m PFW311-m PFW321-m PFW320-m 0.5 to 4l/min (0.02 to 0.14SCFM) [Setting is 0.6 to 4l/min (0.02 to 0.14SCFM)] 0.05l/min (0.002SCFM) 5 to 40l/min (0.18 to 1.41SCFM) 2 to 16l/min (0.07 to 0.56SCFM) Flow rate range measurement and setting Minimum setting unit 0.5l/min
Circulating FluidTypical Physical PropertyValues Fluorinated Fluids Density [kg/m 3] Physical property value Temperature 10C 20C 50C 80C Specific heat C [J/(kg K)] 1.87 x 10 3 0.87 x 10 3 1.80 x 10 3 0.96 x 10 3 1.74 x 10 3 1.05 x 10 3 1.67 x 10 3 1.14 x 10 3 Water Density : 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 133 Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A