Gun Type Ionizer

186 q Installation Distance and Discharge Time p. 182 Alarm p. 186 w Static Neutralization Range p. 183 Mode Switch Setting p. 187 e Pressure Flow Rate Characteristics p. 184 Wiring p. 187 Dimensions p. 188 How to Order p. 185 Accessories (for Individual Parts) p. 185 Related Products p. 189 Specifications p. 186 AC Adapter Specifications p. 186 Specific Product Precautions p. 190 Parts

KS/KX

<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Coolant Valve

VCC 0.4 0.3 TQ 0.2 0.1 0 1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 Operating pressure (MPa) 619 A VNC Series Construction N.C. i i o o t t r w r w Port 12(P1) Port 10(P2) u u In the case of 32A to 50A y y N.C.

lPSMt

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

lPSMt

Steel) IP300 . 1P3100 DIMENS'ONS MODEL 1P300 (Lever Type) tu O O r o r n N ^ " n o r7a <6,69) (LEVER TYPE) MODEL 1P3100 (Rotary Type) O N / (2) t/4 t,tPt J o o iJ5 [8 so]]NVOLUTE SPL]NE 5HA:T 4 9 2 1 [ 1 2 s 0 0 ] r r81 lJ oool oo zzo fr ool r 1 3 T H P U H O I E S \ \ o o L O O N 0 945 I 24 001 2 7ss [7r oo] N O World Wide Ag{C Support...

ZSE30/ISE30

Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 Specifications ISE30 0 to 1MPa 0.1 to 1MPa 1.5MPa 0.001MPa Air, Inert gas, Non-flammable gas ZSE30 100 to 100kPa 101 to 101kPa 500kPa 0.2kPa Rated pressure range Regulating pressure range Proof pressure Setting/Display resolution Fluid Power supply voltage Current consumption Switch output Note 1) 12 to 24VDC 10%, Ripple (p-p

VXA31/32

Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

VVXA21/22

LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.) Port P Port P Port P Model Manifold base model Individual port Rc VVXA211-stations Common port Rc Port A 1 8 1 4 3 8 1 8 1 4 VVXA212-stations VVXA221-stations VVXA222-stations Manifold Manifold Stations B mount 2 to 10 stations 17-3-97 2 The VX series will be revised shortly.

Clean Regulator/Fluororesin Type

y t y r i r u i !

LG1H

ball screw Slide screw 10 20 10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations 100 LG1 21 H F 2 G X10 1 P

VXF

Start-up speed = PM x 0.9 t MPa/ms 17-3-74 5 The VX series will be revised shortly.

Floating Joint/Stainless Steel Type Series JS

JS20, 32, 40, 63 M M U U D J F H B E G P A Rod end nut (mm) 30 Description H B C D d: Nominal thread size d Nut for JS10 M4 x 0.7 3.2 7 8.1 6.8 Nut for JS16 M5 x 0.8 4 8 9.2 7.8 Nut for JS20 M8 x 1.25 5 13 15 12.5 D C Nut for JS32 M10 x 1.25 6 17 19.6 16.5 Nut for JS40 M14 x 1.5 8 22 25.4 21 H B Nut for JS63 M18 x 1.5 11 27 31.2 26 (mm) Max. tension and compression N Allowable eccentricity

ISO Standard Hydraulic Cylinder

7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Command pulse (maximum 225/kpps) P Class 3 ground Ground resistor 100 or less Incremental encoder P Deviation counter clear signal (active high) 2CN PG P Be sure to treat the shielding wire terminals. +12 to 24V Note) 4.7k 13 14 5mA Servo ON 1Ry 0V SV-ON 1Ry ON for servo ON 2Ry Proportional control (P actuation) Reverse drive suppression 15 P-CON 2Ry ON for proportional control N-LS 16 N-OT

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES OFF P-1 P-2 GPM gal (US) Real-time flow rate GPM = gal (US)/min "P" Window comparator mode H : Hysteresis Note ) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.

VFRA3000

+ 0.1) to 0.9, P: Operating pressure 0.1 to 0.9 3 position (0.6 x P + 0.1) to 0.9 P: Operating pressure Ambient and fluid temperature (C) 10 to 60C (No freezing.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 61 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3 SCREEN HI PRECISION DIG PRESS SWITCH, PRESSURE SWITCH, ISE1-6, N59, 32.00000 lb

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple., 3-Screen High Precision Dig Press Switch, PRESSURE SWITCH, ISE1-6, N59, 61 lb