0.5

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

Dedicated Controller

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Sensors (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 11.2 3 3(R) 9 0.3 3.8 10.9 3.5 5.5 9.1 2 x mounting hole 33.5 28.5 37 38 1(P) 1(P) 5.5 12 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 598 4 Port Direct

Round Type Hydraulic Cylinder

Bore size (mm) Y NN P S X ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 320 Round Type Hydraulic Cylinder: 3.5 MPa CHM Series Rod flange type: CHMF Width across flats B2 CHQ Width across flats B1 CHK N GA GB Rc P N Rc P 4 x FD H1 H2 2 x NN CHN CHM CHM I IA D FY B CHS MM Effective thread CH2 K F NB Width across flats

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

F G H SMC P . U S C E Padlock mounting position D C Padlock mounting position D SUP. SUP A B A B IN OUT IN OUT 2 1 3 EXH. EXH.

Refrigerated Air Dryer

-P.4 Rc1/2 IDF Rc3/4 IDU3E IDU4E IDU6E High inlet air temperature Saturation: 55C 0.7MPa 0.37 0.57 0.82 Rc3/8 Rc1/2 Rc3/4 0.32 0.52 0.75 2.2 3.7 5.5 HFC134a P.5-P.7 IDU 2 Series IDF/IDU E Selection Method IDF selection example IDU selection example Reading correction factor 1 Correction factor Note) Correction factor Data symbol Data symbol Note) Condition Condition Obtain the correction

REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.

Process Pump

PAB*-OMY0018 PRODUCT NAME Process Pump MODEL / Series / Product Number PA5010 Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 9 Applicable Fluids P.10 Specifications P.11 Performance Curve P.12 to 13 Working Principle P.14 Maintenance Parts P.14 Piping and Operation P.15 Dimensions P.16 1 Safety Instructions These safety instructions are intended

Process Pump

PAB*-OMY0027 PRODUCT NAME Process Pump MODEL / Series / Product Number PA5013 Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions -P.5 to 9 Applicable Fluids P.10 Specifications P.11 Performance Curve P.12 to 14 Working Principle P.15 Maintenance Parts P.15 Piping and Operation P.16 Dimensions P.17 1 Safety Instructions These safety instructions are intended

Process Pump

PAB-OM-E002-F PRODUCT NAME Process Pump MODEL / Series / Product Number PA(P)3313 Series Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 9 Applicable Fluids P.10 Specifications P.11 Performance Curve P.12 to 14 Working Principle P.15 Maintenance Parts P.15 Piping and Operation P.16 Dimensions P.17 1 Safety Instructions These safety instructions are

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

C95

Refer to p.0-39 through 0-46 for Safety Instructions, actuator precautions and auto switch precautions. With Non-rotating Rod (Double Acting: Single Rod) Adjustment Warning Operating Precautions Caution q Do not open the cushion valve above the stopper.

Table of Contents

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

Lubrication Equipment

Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products in this catalog, and refer to p.1.0-1 and 1.0-2 for precautions on every series. AC AV Design Warning AU qEpoxy resin containing glass fiber and polycarbonate is used in some parts of the D.P. Lube and the D.P. Lube Unit.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to "Flow Characteristics" (p.4.6-9) and figure of "Max. air flow" (p.4.6-8).

PSE100

OUT1 OUT1 OUT2 OUT2 Refer to p.3.1-8 "Channel selection" for further information. ON YES PHysteresis mode OFF P-1 P-2 > = P Pressure/Vacuum Up H H H (fixed hysteresis) =2% F.S. ON PWindow comparator mode NO OFF P-1 P-2 Pressure/Vacuum Up OUT1 Output mode ON YES OUT2: Same as OUT1. PHysteresis mode OFF n-1 n-2 Pressure/Vacuum Up > = n H (fixed hysteresis) =2% F.S.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold

Interface Regulator for VQ4000 5 Port Solenoid Valve

Interface regulator SMC 1 P 5 3 R2 R1 PE How to Order Applicable interface regulator model Reduced pressure port Solenoid valve model ARBQ4000-00-A-1 A VQ40 (plug-in type) ARBQ4000-00-B-1 B ARBQ4000-00-P-1 P ARBQ4000-00-A-5 A VQ45 (plug lead type) ARBQ4000-00-B-5 B ARBQ4000-00-P-5 P Circuit Diagrams Reduced pressure port: A Reduced pressure port: B Reduced pressure port: P SMC Pneumatics,

Series VCS

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 OR-1400-178P P: PTFE F: FKM OR-2670-178P P: PTFE F: FKM For VCS30, 40 OR-1717-178P When the loosened clip is pulled out in direction using pinchers, etc., the coil can be removed and replaced in direction .

Heavy Duty Stopper Cylinder

Transfer direction Transfer direction P R Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.