Clean Room Regulator/Fluoro Resin Type Series SRF30

Dimensions Tubing/SRF30-T11 2-30 IN OUT 67.7 32.3 52 Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

55 mA or less (at no load) Switch output NPN or PNP open collector output: 1 output ISE70 Max. load current 80 mA Max. applied voltage 30 V (With NPN output) ZSE80 ISE80 Residual voltage 1 V or less (With load current of 80 mA) PS Response time 1 s (0.25, 0.5, 2, 3s selections) Short circuit protection Yes ISA3 1% F.S.

Electro

) ' wlth joint, po1e, hex, nul, and cross rec*sed head screw N IP6 Electro-Pneumatic Pogitionet Electrical Entry 1/2 PF (female) 00 Lever type 10 Cam type Pressure geuge {SUA OUTt) 1 30 PSI (2kg cm'z) 2 45 PSI (3kgtcm') 3 150 PSI {1okg/crn'?)

E/P Pressure Regulator

4 (1000, 2000) 3/8 (2000, 3000) 1 3 5 0.1 MPa 0.5 MPa 0.9 MPa Thread Type Nil N F Rc(PT) NPT NPTF Protocol SEN SMB Ethernet I/P Modbus TCP Porting ETHERNET ITV ETHERNET ITV Supply: 1/2 Out: 1/4 or 3/8 (per order) PWR NS MS PWR NS MS E/P REGULATOR E/P REGULATOR Thread Type: Rc, NPT or NPTF (per order) Dimensions H Length (mm) 52 (N-1) + 88 L G G 2 OUT Height (mm) 173.2 H Width (mm) 70 W Supply

AS

Body size Nil Option 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N 1 If more than one option is required, write option part numbers in the order of S, K, N. 2 M3, M5, and U10/32 are not available with seals. Type 2 3 Elbow Universal Applicable tubing O.D.

AS

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

FH99

1B 1 1/4B None Differential pressure indicator Differential pressure indication switch Note) 0 4 5 1 1/2B 2B Hydraulic fluid 2 1/2B Note) N.C. and N.O. common 0 1 2 N W V Petroleum Water-glycol, Emulsion Phosphoric ester 3B 3 1/2B Relief valve 4B 0 1 With relief valve None Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number.

Thermo-chiller Air-cooled 200 V/400 V Type Inverter Type HRSH090 Series (400 V type only) (Option S only) (UL Standards) (Option S only)

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt xing brackets 2 pcs.

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Number Description PPMW-701-30-FM-B80 N.C., 30 PSI, Flush Mount, Nylon 1/16" ID Barbed Fitting PPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting PPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting PPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Stopper Cylinder Adjustable Mounting Height Type Series RSG

N (Ex.)

Oil Filter FH150 Series

Hydraulic fluid 0 1 2 N W V Petroleum Water-glycol, Emulsion Phosphoric ester Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number. Replacement Element Part No.

Series 55-PA3000/5000

5 3/8 (10A): PA3 1/2 (15A): PA5 3/4 (20A): PA5 3/8 standard 1/2 standard FLUID IN Air operated type Liquid contact body material Thread type 1 2 ADC12 (Aluminium) SCS14 (Stainless steel) T F N Rc NPTF G NPT Diaphragm material 1 PTFE Air operated type 131

ISA3_L

range 3 Conforming to ISO 1179-1 Bracket mounting position 2 stations (Mount to 1st and 2nd stations) Option 1 (Cable) Straight 5 6 Centralized lead wire (Lead wire only) 4 5 Nil 1 2 S Right angle 5 6 n stations (Mount to 1st and nth stations) L Centralized lead wire (With bracket) 4 5 N None 1 2 n 4 Cannot be selected for 1 station One set is provided per manifold.

WRF100

Contents q Cover L (1 pc.) w Cover R (1 pc.) e Top covers (2 pcs.) r Hexagon head bolts (4 pcs.) t Flat washers (4 pcs.) y Cover mounting bolts (8 pcs.)