Model: 10S (Side Ported), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 8 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 10S (Side Ported), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 3 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting)

Model: 10S (Side Ported), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 3 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10S (Side Ported), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 3 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)

Model: 10S (Side Ported), SI Unit Specification: ZE (EtherNet/IPâ„¢), Input Block Stations: 3 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 5 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting)

Series: 2 (VQZ2000), Configuration: 1 (2 Position Single), Seal Type: 0 (Metal Seal), Function: B (High Speed Response 0.9W - DC Only), Coil Voltage: 5 (24VDC), Lead Wire: Y (DIN Terminal), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: C6 (ø6 One-touch Fitting), Thread: F (G), Foot Bracket: F (Bracket)

Model: 51 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 12 Stations, P,E Port Location: D Side, A,B Port Size: C6 (ø6 One-touch Fitting, Fixed), Thread: F (G)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 3 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 14 Stations, P,E Port Location, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting

Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 5 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate w/o Station Number

Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 14 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate w/o Station Number

Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 13 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate w/o Station Number

Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: F (Negative Common, M8, 4 Inputs), Valve Stations: 13 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A, B Port Size: N3 (ø5/32" One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate w/o Station Number

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

AU

None Float type auto-drain 00 11 q Replacement Parts AU100 has no auto-drain type. Element Bowl guard Material Model Port size Description No.

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

Floating Joint

Applicable model P215420-07 For JT20 7 Dust cover P215432-07 For JT32 P215440-07 For JT40 Dimensions JT20 to 40 M, P D M E F C G A B H Standard Pneumatic: Up to 0.7 MPa [mm] Model Connection thread M A B C D E F G Width across flats H Maximum thread depth P Weight JT20 M8 x 1.25 19.2 8 11 (25.4) 23 10 13.6 22 9.5 22 g JT32 M10 x 1.25 23 10 13.4 (30.6) 28 12 16.3 27 11.5 38 g JT40 M14 x 1.5

Large Flow Lubricator AL800/900 Series

IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B J A C D E F G H I , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3 x M5 x 0.8 x depth 6 3 x M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 1046

Function: 1 (2 Position Single), Body Option: 00 (Plug-in Type Sub-plate, Standard), Pilot Type: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: F (Plug-in Conduit w/Terminal), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (Sub-plate Plug-in Terminal 1, Non Plug-in Standard 1), Thread: F (G), CE Compliant: Q (CE-compliant)

IDX-OM-W094

(REFRIGERANT) IDFA60-23 W R 0001 (2018 4 ) W R 0001 o 1 Z 12 o P Q R A Z 1 2 3 4 W X y Z 2018 2019 2020 2021 IDFA60/70/80/90 Series 1-4 IDX-OM-W094 1.3 HFC 1-4 IDFA60/70/80/90 Series 1-5 IDX-OM-W094 1.4 / 1 1.5 () IDFA60/70/80/90 Series 1-6 IDX-OM-W094 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFA60/70/80/90 Series 2-1 IDX-OM-W094 () IDFA60/70/80/90 Series 2-2 IDX-OM-W094 3