0.01 Throttle needle SUP port SUP port Rc, NPT, G 1/4 P U L L Rc, NPT, G 1/4 6 118 143 144 0.1 0.1 0 MP 0 178 162 DIN connector 64.4 Manual lock DIN connector 25 43.6 41.6 Conduit terminal 82 Conduit terminal 97 With regulator + 2 port solenoid valve With 2 port solenoid valve SUP port on the right 97 Conduit terminal 82 Conduit terminal DIN connector DIN connector 0 T E S 9 0.3 133 128 0.4 103
Fine particles are generated due to wear of emitters and motor sliding during operation. 26 IZF10/IZF10R Series Dimensions 96 82 80 79 39 37 110 121 96.5 94 103 Holding bolt Bracket 60.3 6.5 46 1 Power supply switch LED indicators Balance adjustment trimmer IZF10R 98.9 Air flow adjustment switch 64.1 Without bracket (39) 30 3 x 5.5 through 33.5 1.5 4 23 25 24.5 (46) 50 12.5 66.8 5.5 5.5 30
120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal) 86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E-02-X367 (103
Relation between Operating Temperature and Maximum Operating Pressure Particulate Generation Classifications 105 1.2 Particle concentration (Particles/m3) Maximum operating pressure MPa ISO class 6 1.0 104 ISO class 5 0.8 103 ISO class 4 0.6 102 ISO class 3 0.4 10 0.2 0.1 0.5 1 1 0 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to SMC Pneumatic Clean Series (CAT.E02
MPa) 100 to 10 psig (0.7 to 69 MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750 psig (5.1 MPa) 1200 psig (8.2 MPa) 2250 psig (15.5 MPa) 3750 psig (25.8 MPa) 6000 psig (41.4 MPa) 9000 psig (62.1 MPa) 15000 psig (103
M16 x 2 Thread depth 30 M16 x 2 Thread depth 30 280 145 140 273 210 80 120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103
Vespel is a registered trademark of DuPont. 103 Air operated type (For high pressure) Diaphragm Valve for Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet)
plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103
Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page
D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103
Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page
Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard
HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!
J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread
S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103
VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly. Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.
(L) 3 postion 157 Double 149.5 3 position 172.2 Double 165 Single 114.5 300 (Lead wire length) Single 99 300 (Lead wire length) With light/surge voltage suppressor Plug connector (M) DIN terminal (D) With light/surge voltage suppressor 3 position 176 Double 168.5 Single 108.5 300 (Lead wire length) 3 position 171.5 Double 164 Single 106 MAX.10 79 With light/surge voltage suppressor Pg7 103
How to Calculate the Load Energy Moment of Inertia and Rotation Time E = 2 x 103, = 2 2 1 t 0.006 Moment of inertia (kgm 2) 0.005 E : Kinetic energy(mJ) I : Moment of inertia(kgm2) : Angular velocity(rad/s) : Rotation angle(rad) 180 = 3.14 rad t : Rotation time(s) 40 Selecting range 32 Selecting range 0.004 0.002 0.0025 0.003 0.001 The that is obtained here is the terminal angular velocity
hole 8-O Counter bore Load carrying direction L q CZ CT CT Y V U CD Conveyor lower limit position T R H B Stroke 2-Rc(PT)P D QA FT A GA Pressure port at rear side Pressure port at front side QB 2-Plug WB GB E W (Diagonal I) (mm) I B GB P QA CD QB CT CZ D E FT FX FZ GA H Stroke A L Bore (mm) N O 1 8 1 4 1 4 50 14 depth 5 85 93 16 10 20 7 8 36 32 64 20 73 93 16 128 30 221 45 9 63 18 depth 6 103
Load Mass (Horizontal Mounting)(kg): 1~4.9, Table Size Length L(mm): 103, Table Material: [Aluminum] Aluminum Alloy, Guide: [Rolling Guide] Cross Roller Guide Shape, Table Size Width W(mm): 50, Table Size Height H(mm): 32, Table Surface Treatment: [Anodize] Hard Anodize, Environment: General Purpose, Maximum Load(kg): 2, Port Screw Type: M screw, Cushion: Rubber cushion, Adjuster Option: