Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

Air Slide Table Series MXJ

1 MXW @2 @1 @4 @3 !7 MXJ e t !5 @7 @6 @8 @5 With stroke adjuster MXP Axial piping type MXY MTS !2 Without stroke adjuster. With adjuster on extension end y Description No. Material Component Parts With Magnet, Rail Note Description No.

Modular Type Regulators Series AR

Note 5) Note 5) Note 5) Note 5) Note 5) Z Note 5) Z Note 4) Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.

Multi-Axis Step Motor Controller

1 !2 w e !3 !4 r t y u i !5 !6 No.

IDX-OM-W032

1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 (ADH4000-04) . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4

CE

9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

IDX-OM-W038

IDH*6 1 2 AME-EL350 3 AME-EL250 4 O 5 4.2 46 IDH Series I D XO M W 038 5 5 5. 1 O FF O FFO N 2-3 ( 1 /) ( ) 3-1, 3-2 -5+10% 600m m 2-3 ( 1 /) 4-4 IDH Series 51 5. 1 I D XO M W 038 5 4-1 2 3-1 4-1 6-1 N .

EX500

L dimension L dimension No. 6 7 8 2 3 4 5 1 0 7 185.5 0 98 2 3 4 5 6 7 1 0 0 8 198 1 110.5 6 7 8 4 5 2 3 1 1 9 210.5 123 2 M12 input block (n) 6 7 8 3 4 5 2 2 10 223 135.5 3 L dimensions 6 7 8 9 5 4 3 11 235.5 4 148 9 10 8 7 6 4 12 248 5 160.5 Connector type For M (m + n = 2 to 8) 10 8 9 7 5 173 6 10 11 9 6 11 10 7 12 8 Connector type For T (n = 1 to 8) 1686 Decentralized Serial Wiring (GW

3 Port Solenoid Valve/

release valve X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve with soft start-up function X555 VP 4 1 5 4 5 D Z 03 M Throttle Thread Series Nil Variable throttle 10 1 xed orice 15 1.5 xed orice 20 2 xed orice Nil Rc F G N NPT 5 VP500 7 VP700 Body 2 Body ported 4 Base mounted VP700 only Note) X536 only body ported (option2).

Industrial Filters

6: 1 pc. each FGDT FGDF u, o, !1, !2, !3, !4, !5, !6, !7 : 1 pc. each Note) Only the FGD-CA003 and CA005 includes !8 element guide in the set.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

VR4151/4152

4 NBR y u Brass 5-7-1 Series VR4151/4152 How to Order A 01 5 1 1 VR41 Indicator light 0 No 1 Yes Sub-plate Side piping B A Bottom piping Port size W/o sub-plate 00 Rc 01 1 8 NPT N01 1 8 G F01 1 8 Number of pilot ports Single pilot 2 1 Double pilot Number of ports 5 port 5 Dimensions Side ported Bottom ported Stroke 2 mm Stroke 2 mm Indicator light Indicator light Manual override (Button diameter

Slider Type/Ball Bushing Bearing

6 @4 @1 @8 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

3 Port Solenoid Valve/

Valve with Detection of Main Valve Position VP500/700-X536, X538, X555 How to Order Residual pressure release valve VP X536 2 5 4 5 Z R D 1 03 M X538 VP 4 1 5 4 R 5 D Z 03 M A Dual residual pressure release valve Dual residual pressure release X555 VP 4 1 5 4 5 D Z 03 M valve with soft start-up function Throttle Thread Series Nil Variable throttle 10 1 fixed orifice 15 1.5 fixed orifice 20

Cylinder with Turntable Series MGT

(Tolerance 30%) Hysteresis may fluctuate due to the operating environment. 1 pc. 2 pcs. 1 pc. 2 pcs. 1 pc. 2 pcs. 10 10 5 5 10 15 Auto Switch Mounting Bracket/Part No.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G

EX500-GPR1A.eng

) Ground terminal RxD/TxDN N.C. 3 RxD/TxDN RxD/TxDP RxD/TxDP4 5 Ground 4 +24V 2 +24V Shield 5 Shield N.C. 3 2 N.C. 2 N.C. 3 0V 1 0V 5 4 1 1 Internal circuit 8 0V 7 +24V 6 0V 5 +24V 4 TD 3 TD+ 2 RD 1 RD+ 8 0V 7 +24V 6 0V 5 +24V 4 TD 3 TD+ 2 RD 1 RD+ COM D COM A Common to IN side and OUT side Connect the communication cable with M12 connector to the M12 reverse communication connector.

25

Frequency (Hz), Remote controller IZS40 IZS41 IZS42 Remote controller Remote controller 0 1 2 3 4 5 6 7 8 9 1 3 1 0.1 5 3 0.5 8 5 1 10 10 3 15 15 5 20 20 10 30 30 15 DC+ DC+ 20 DC DC 30 Set when remote controller is used. 429 IZS40/41/42 Series Wiring Circuit/IZS41, 42 NPN specification Shield Ionizer (IZS41, 42) Green F.G. Ground with a ground resistance of 100 or less.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.