SMC Corporation of America
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With One-touch fitting 3 Series VR1211F Application Circuit Example Output 3 When "A" and "B" having different pressure conditions are turned ON, output 1 and output 2 go ON. Output 3 goes ON if "C" is turned ON, only when output 1 and output 2 are in an ON state. If either "A" or "B" is OFF , output 3 does not go ON even if "C" is turned ON.

(IR1000:F.S.=0.2MPa,IR1010:F.S.=0.4MPa,IR1020:F.S.=0.8MPa) ) F.S. (2) (3) (4) 0.010.8MPa(IR1000 0.005MPa) 1 IR1000 IR1010 IR1020 [MPa] MAX. 1.0 [MPa] () 0.05 [MPa] 0.0050.2 0.010.4 0.010.8 0.2% 0.5% 4.4L/min(ANR) [1.0MPa ] -560 Rc1/8 Rc1/8 [2 ] 0.14kg (1) (0.05MPa) (2) IR1000:0.2MPa (3)2 ON-OFF () (4) -4- (C)2 (C) (A) (A) (C) (A) (C) BLEED SUP(1) OUT(2) SUP N

Standard Features General purpose pre-filter AFW30-N03-E1 AFW30-N03-E1 AFW30-N03-E1 AFW30-N03-E1 AFW30-N03-E1 AFW30-N04-E1 AFW60-N04-E1 AFW60-N04-E1 Simplex Simplex Simplex Simplex Simplex Simplex Duplex Duplex B C Inlet flow rate Model CFM 6 8 10 15 22 33 44 66 168 222 282 420 624 930 1248 1866 Connection size Model 3/8"NPT 3/8"NPT 3/8"NPT 3/8"NPT 3/8"NPT 3/8"NPT 1/2"NPT 1/2"NPT Pipe size

Use the appropriate pliers (C-type snap ring mounting tool) for installation and removal of the snap ring. 2. Take precautions even when using the appropriate pliers (C-type snap ring mounting tool). The snap ring may slip off the end of the pliers (C-type snap ring mounting tool) and spring out, causing bodily injury or damage to nearby equipment.

How to Order Standard B 20 30 D C CQSY B 20 30 D C F9BW S CDQSY With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

45 80 86 101 35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107

-2VEX-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VEX-OMV0001 VEX1 Series / / C-R ( )C-R SDS DC VEX1101, VEX1201, VEX1301 2% () VEX1501, VEX1701, VEX1901 3% AC VEX1101, VEX1201, VEX1301 20% VEX1501, VEX1701, VEX1901 15% (SSR)AC 1) (C-R ) OFF () 2)() P2 N.O.() ZNR 1V 0C () 4 VEX-OMV0001 VEX1 Series / () DC 1(P)2(A) 1 ()ISO VG32 1) 2 ( )ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,

(Rated voltage 125 V, Plug JIS C 8303, Inlet IEC 60320-C13) *1 Measured with a high pressure probe of 1000 M and 5 pF *2 Measurement value based on a charged plate (Dimensions: 150 mm x 150 mm, Capacitance: 20 pF) as defined in the U.S.

Pin Clamp Cylinder C(L)KQG32 Series Compact Cylinder Type 32 How to Order Clamping height LOW type KQG C X2081 B L 32 075 R A L C X2082 KQG C Clamping height HIGH type B L 32 075 R A H C Number of auto switches Nil 2 pcs. S 1 pc.

C (F) note 2 -5~+50 (+23~+122) -20~+60 (-4~+140) Max.

DCDIN No.1 +No.2 1) () 2) 3) , 4) DIN DIN DIN DIN DIN GDM2B 2. 2. 2. 2. 1) 2) 3) Y )0.5Nm15% a b O 1.25 3.5 Y 1.25 4 c 612mm 912mm 1. 2. 3. 3. 3. 3. 3. 1 ) 2) 3) )0.5Nm20% AC100V AC200V DC + DC DC 7 VT315**-OMH0005-A V V V VT315 Series/ T315 Series/ T315 Series/ T315 Series/ 1. 1. 1. 1. 1 1 1 230 1 18VA50Hz 16 P R 2PR 3/8 AC AC100V110V200V220V50/60Hz O P8 4 DC DC12V24V48V100

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

2 No. Description Note 1 Stud ZK2 2 Strainer 3 Mounting bracket !1 ZQ 4 Lock nut 2 pcs. included for male thread mounting (Not included for female thread mounting) y ZR 5 Lock pin 6 Check valve ZB 7 Lock plate !5 ZA Replacement Parts ZX No. Description Part no.

VK300-82-2-01 VK300-82-2-02 VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 1578

G3/8 15 to 20 G1/2 20 to 25 (2) Insufficient tightening may cause seal failure, or loosen the threads. Precautions for use with non-SMC Caution (1) When using the KFG2H*-C series with tubing other than those from SMC, the products are not subject to warranty. Tube Body 8 - 3.

Symbol Terminating resistance FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + 1 1 1 2 2 2 9 9 9 5 SG 5 SG 5 SG Figure1-1 Communication Connection (RS-485) Host Computer Thermo-con RS-232C RS-232C Symbol Pin No.

-2No.VQ1000V-OMV0001 / / / / 1 1 1 1 1.5 1.5 1.5 1.5 * * * *3) 3) 3) 3) * * * *3) 3) 3) 3) 1 1 1 1 1 1 1 1 () -3No.VQ1000V-OMV0001 VQ1000/2000 VQ1000/2000 VQ1000/2000 VQ1000/2000 5 5 5 5 / / / / 0.1 2 C-R () C-R DC 3 AC 8% (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) / / / / () 3 (C-R ) OFF 3 2)() 3) AC ,, SSR SSR 1) 2) ,1V -10 EXH Assy ( ( ( ( ) ) ) ) () 3 () 4 No.VQ1000V-OMV0001