VZ1000

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 1000 Hz. Test was performed at both energized and deenergized states in the axial direction and at the right angles to the main valve and armature.

Stainless Steel 316

1) L2 M Weight (g) A D L1 L1 Applicable tubing M KQGL04-M5 KQGL04-01S KQGL06-M5 KQGL06-01S KQGL06-02S KQGL08-01S KQGL08-02S KQGL08-03S KQGL10-02S KQGL10-03S KQGL12-03S KQGL12-04S 3.5 18 16 18.3 M5 x 0.8 4 18 10.6 20.5 4.2 20 19.5 1/8 20.8 D 10 A 3.5 25 17 20.5 M5 x 0.8 L2 6 18.8 9 26 20.5 23 13 1/8 22.1 H Connection thread 35 24.5 25 1/4 14 37 21.9 25.4 1/8 12 (In case of R) 8 20.9 21.6 45

3 Port Solenoid Valve Series VQ100

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

3 Port Solenoid Valve Series VQ100 1

(Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz. Test was performed at both energized and de-energized states in the axial direction and at the right angles to the main valve and armature.

MXW

(N) MTS Symbol Specifications Operating pressure (MPa) Piston area (mm2) Bore size (mm) Rod size (mm) Operating direction -X7 -X9 -X11 -X33 -X39 -X42 -X45 PTFE grease 0.2 0.3 0.4 0.5 0.6 0.7 Grease for food R 20 30 40 51 61 71 101 Adjusting bolt, long specification (Adjustment range: 15 mm) 8 4 Without built-in auto switch magnet L 15 23 30 38 45 53 75 Fluororubber seal R 45 68 90 113 136

■Specifications ■How to Order

Center A Right Model Arm opening angl CKZT25-105-DCL781EL 105 B CKZT25-90-DCN7018N CKZT25-45-DCN7017N 90 45 30 CKZT25-30-DCN577NN Left C

AP500

+ Passivation 35 0.24 Hastelloy C-22 316L SS 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) Elgiloy 316L SS 25 0.17 PTFE (Option: PCTFE) PTFE (Option: PCTFE, Vespel) 20 0.14 Dimensions inch (mm) 15 0.10 AP500 10 0.07 1.00 (25.4) 5 0.03 Max. 3.32 (84.3) 0 0.00 0 2 4 6 8 10 Flow rate (slpm, N2) 0.82 (20.8) 0.44 (11.2) AP500HF 75 psig (0.52 MPa) 30 psig (0.21 MPa) Inlet pressure: 45

Soft start up valve with lock out

(0.3) Ambient and fluid temp. 32 to 140F (0 to 60C) 30 (0.2) 113 20 122 37 61 1(P) to 2(A) 2(A) to 3(R) Effective area (mm2) 132 24 141 49 76 15 (0.1) 1.14 (0.64) 1.63 (0.74) 2.21 (1.00) 4.19 (1.90) 4.06 (1.84) Weight manual/solenoid lb (kg) 0 15 (0.1) (0.2) (0.3) (0.4) (0.5) (0.6) (0.7) (0.8) (0.9) (1.0) 30 45 60 75 90 105 120 135 150 Weight manual lb (kg) 1.15 (0.52) 1.37 (0.62) 1.94 (

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Grease pack (10 g) 1 pc. 84.8 IN 25 42 59 CQSY16-PS 12 6 113 OUT 34 57 79 CQSY20-PS REA 151 IN 45 75 106 CQSY25-PS 16 8 201 OUT 60 101 141 When only grease for maintenance is necessary, please order by the following part numbers.

ø 50, ø 63 Series CKZ3N Power Clamp Cylinder Complies to NAAMS standard Model Selection CKZ3N North American Type Made to Order European Type CKZ3T

60 75 90 105 120 135 None 15 30 Arm mounting position 45 R Right L Left D 60 Both sides 75 90 105 120 135 Refer to Other Clamp Cylinders on page 12 for 80.

ø 50, ø 63 CKZ3N -X2742A -X2568  NAAMS Standards Compliant Power Clamp Cylinder

45 60 60 75 75 90 90 105 105 120 120 135 135 Clamp arm position L (Left side mounting) R (Right side mounting) R L D Right Left Both sides Switch cassette Switch cassette * Proximity switch mounting surface viewed from the front.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

, 50 M5 x 0.8 M5 x 0.8 Double acting Single rod 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 12, 16: 0.07 MPa, 20, 25: 0.05 MPa Without

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Air cushion 1/4 Double acting Non-lube (Both sides

Compact Cylinder: Plate Type Double Acting, Single Rod Series CQU Size: 20, 25, 32, 40

Size Rod end thread 20 25 32 40 Piston area equivalent to 20 mm Piston area equivalent to 25 mm Piston area equivalent to 32 mm Piston area equivalent to 40 mm Rod end female thread Rod end male thread Nil M Cylinder stroke (mm) Size Stroke 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 20, 25 32, 40 Applicable Auto Switches/Refer to pages 13 through

HAA

Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

HAW

(Refer to the instruction manual for details on the cleaning.) 42 47 49.5 40 39.5 43 44.5 34.5 35.5 36 38 40 41.5 10 12000 14000 HAW75 45 48.5 52 45 41 43 45.5 34.5 35.5 36 39 40 42.5 15000 18000 20 HAW110 Conditions: Air pressure 0.7 MPa, Cooling water temperature 30C. Inlet air temperature 50C is saturated air. At 70C or more, it is humid air with dew point 67C. 16

Series PF2W Digital Flow Switch For Water

Symbol 4 16 40 100 03 04 06 10 3/8 1/2 3/4 1 PF2W704, PF2W720 PF2W720, PF2W740 PF2W740, PF2W711 PF2W711 Output specifications 27 67 NPN open collector 2 outputs PNP open collector 2 outputs Specifications PF2W720 PF2W704 Model PF2W740 PF2W711 Measured fluid Flow rate measurement range Set flow rate range Rated flow range Minimum set unit Water 1.7 to 17.0 L/min 7 to 110 L/min 3.5 to 45

Thermo-chiller

Model HRS200-Am-46-mS Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.65 Control method PID control Ambient temperature/Altitude1, 7 C Temperature: 5 to 45, Altitude: less than 3000 m Circulating uid1, 2 Tap water, 15% Ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity3, 7 kW 20.5 Heating capacity4 kW

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

6.86 15.98 5 to 60 32 RB1412 19.6 12 1500 45 6.86 15.98 25 RB1007 5.9 7 1500 70 4.22 6.86 Applicable bore size (mm) Shock absorber model Maximum energy absorption (J) Stroke absorption (mm) Maximum collision speed (mm/s) Maximum operating frequency (cycle/min) Extended Retracted Spring force (N) Operating temperature range (C) 710