CJ5-S

6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 Up to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38

C76

..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 60 15 60 + 45(n 2) 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

C76

..) ( n2 2 15 + 45 (n = 2, 4...) ( n 2) 2 15 10 10 60 60 + 45(n 2) 15 6-10-21 22 Series C76 Construction [First angle projection] Single acting, Single rod C7632/40-50S Spring return 50 mm stroke or less !

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 60 60 D-M9A 20 15 2 pcs. (Different surfaces) 15 15 1 pc. 15 15 10 2 pcs. (Same surface) 35 35 35 D-M9AV 2 pcs. (Different surfaces) 15 15 15 1 pc. 10 10 10 2 pcs. (Same surface) 60 70 D-Z7/Z80 2 pcs. (Different surfaces) 20 20 1 pc. 20 20 2 pcs. (Same surface) 60 65 D-Y59/Y69 D-Y7P/Y7PV 2 pcs.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Bore size (mm) 10, 20, 30, 40, 50 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75, 100 Standard stroke 6 10, 15 20, 25, 32 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

21

20 25 32 40 6.8 15 30 30 37 3.2 18.4 59 139 9 15 40 40 50 4 28 75 161 9 15 40 40 50 4 28 75 174 Use a thin wrench when tightening the piston rod.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Positioning Operation Pushing Operation ON OFF ON OFF IN IN Input Input 15 ms or more Output the step data no. 15 ms or more Output the step data no.

Air Cylinder Series CS1

35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces D-A44 n 150 + 50(n2) (n = 2, 4, 6, 8 ) 110 + 50(n2) (n = 2, 4, 6, 8 ) 55 + 55(n2) Same surface 150 1 15 110 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W 2 (Different surfaces, Same surface) 1 115 110 105 15 115 + 40 (n4) 2 110 + 40 (n4) 2 105 + 40 (n4) 2 15 + 40 (n2

CRBB-OM00004

-1M P611070-1 15 P811020-3 15 P211090-10 15 P611090-1M P611090-1 20 P811030-3 20 P211060-10 20 P611060-1M P611060-1 30 P811040-3 30 P211080-10 30 P611080-1M P611080-1 40 P811050-3 40 P211010-10 40 P611010-1M P611010-1 3 2.

0.55

15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 tp 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) 22 to 102 (0.15 to 0.7) 15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 to 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) Single Double Single Double Single Double 20 12 23 15 20 12 30 23 15 33 30 15 50 33 18 53 45 12 48 15 45 12 55 48 15 58 55 15 75 58

AC

For AF/AL For AFM/AFD For AR B340 B240 Mounting thread Model Applicable model A B C D F H J K L M N R t Bracket/ For AF, AL, AFM, AFD, and AR M4 X 8 l AF2000, AL2000 AFM2000, AFD2000 B240A 18 27 8.4 33 3 2.7 27 26 5.4 40 2.3 4.5 14 (Round head Phillips screw) Model File M4 X 8 l (Hexagon socket head cap screw) SAC2000, #15 SAC2503, #15 SAC4000, #15 SAC4006, #15 SAC5000, #15 B240 B340 B440

Fluoropolymer Piping Equipment

1/4" 3.6 LQ1L5H-Ml 3/4" 3/8" 34 39.5 36 53 40 49 8 8 LQ1L6A-Ml 1" 3/4" 35 39.5 36 68.5 46 49 16 16 LQ1L6B-Ml 3/4" 15 LQ1L6C-Ml 1" 1" 22.5 21.2 LQ1L6D-Ml 3/4" 15 LQ1L6E-Ml 1/2" 37 29 26 60 47 39 9 LQ1L6G-Ml 1" 3/8" 34 39.5 36 53 40 49 8 8 1/2" 10 3/4" 16 29 26 54 40 39 10 10 LQ1L52-Ml 12 9.4 LQ1L53-Ml 19 15 LQ1L54-Ml 12 9.4 LQ1L55-Ml 10 20 17 44 39.5 23 7.4 LQ1L56-Ml 8 5.5 LQ1L57-Ml 6 3.6

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

0.4

(+) () 19 Station 10 (+) () 20 17 16 15 14 2 1 Plug terminal no.

V

4.5 ZP13B B13 13 15 4 13 14.2 18.5 8.7 19 7.5 ZP40U U40 40 43 7 18 13.7 18.5 6.5 ZP16B B16 16 18 4 13 15.7 20 9.9 21 8.5 ZP50U U50 50 53 7 18 14.7 19.5 7.5 ZP20B B20 20 22 4 15 19 23.5 121.4 25 10.5 ZP25B B25 25 27 4 15 19.5 24 15.6 28 10.5 ZP32B B32 32 34 4 15 24.5 29 18.9 37 14 ZP40B B40 40 43 7 18 29.2 34 24.4 48 16 D I M E N S I O N S ZP VA C U U M PA D S ZP50B B50 50 53 7 18 33.2 38

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

HRX-OM-R026

Ambient temperature: 43 oC 6 Ambient temperature: 45 oC 4 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [] Fig. 9-5 Cooling capacity(HRSH090-A-20-) 9.4.2 HRSH090-A-4012 10 Ambient temperature: 32 oC Cooling capacity [kW] 8 6 Ambient temperature: 43 oC 4 Ambient temperature: 45 oC 2 0 5 10 15 20 25 30 35 40 Circulating fluid temperature [] Fig. 9-6 Cooling capacity(HRSH090-A-40-