Air Cylinder CP Series Cylinder Positioner Assembly

Parenlneses CPA1 BN do Boot with Boot' BORE D E G'GB J K M MM N P H z.

Hydraulic Filters

When washing the element, do not wipe it using a stiff brush or rag.

Compact manifold regulator ARM5 Series

L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

Description Material 20 PDU-8Z 25 PDU-10Z 32 PDU-12LZ 40 PDU-14LZ !

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Type Length 10 m 20 m 50 m 100 m Symbol 10 20 50 100 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

Sine Rodless Cylinder Series REA

Load connection fittings should be designed so that they do not exceed the weights given in the table below.

V100

Lead wire length 2000 mm -+ Socket Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Lead wire Connector Hook For DC V114-5LO SY100-30-4A-20 For AC V114A-1LO SY100-30-1A-20 2.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Piping: Common SUP/Common EXH, Stations: 20 Stations, Bracket: Bracket

Stations: 20, Thread: NPTF

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

Dimensions/20 to 40 Basic/CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G Width across flats B1 I 2-Eh8 D MM AL A F F NA 1.5 1.5 N N K H S + Stroke ZZ + Stroke Boss-cut ZZ + Stroke (mm) A AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8 13 8 41 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 62 116 20

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

For DC 10-V114-5LO SY100-30-4A-20 For AC 10-V114A-1LO SY100-30-1A-20 Crimping area Core wire crimping area Core wire Lead wire Socket 0.2 to 0.33 mm2 Max. cover diameter: 1.7 mm Hook Insulation 646 Series 10-V100 Specific Product Precautions 2 Be sure to read before handling.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

710 670 20 700 230 120 222 2 1 14-13-14

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

20 stations (Max.)

RHC

High Power Cylinder 20, 25, 32, 40, 50, 63, 80, 100 Series RHC How to Order RHC 20 B High Power Cylinder M9BW Made to Order Refer to page 1202 for details. High power cylinder Mounting style Number of auto switches B L F G Basic style Bore size Nil S n 2 pcs. Axial foot style 20 25 32 40 50 63 80 100 20mm 1 pc. Rod side flange style 25mm n pcs.

D. P. Lube (Unit) Series ALD(U)600/900

710 670 20 700 230 120 222 2 1 14-13-14

XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

12 6 24 16 8 30 20 10 lead [mm] Impact/Vibration resistance [m/s2] note4) 50 / 20 Ball screw (LEFS), Ball screw + Belt (LEFSR Actuation type L) Guide type Linear Guide Static allowable moment [Nm] Note5) 10 27 46 110 Mep (Pitching) 110 10 27 46 Mey (Yawing) 207 20 52 101 Mer (Rolling) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less(No condensation) Motor