Rotary Table

Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 Fig. 8 D-F8 0.10 to 0.20 Set screw Auto switch 29 - Auto switch proper mounting position at rotation end Table 11 Auto Switch Rotation range / Actuation / most sensitive position A A A A B B B B D-M9 D-F8 Magnet Operation range at optimum set position (

LEH_C

a b c d e f g h i j k a ABS INC ABS() / / INC()// b c ) 0.5mm ()/ P.53 8.3 d e f )LEHZ(J)LEHFLEHS 40100% LEHZJ10L, LEHZJ16L 50100% g INP ON P.51 8.3 INP INP ON h 16 - )LEHZ(J)LEHS 550mm/secLEHF10 520mm/sec LEHF203240 530mm/sec /P.50,51 8.3 , i )150% P.52 8.3 j 2 AREA ON INC ABS() k () INP ON() )No.1 5 4 1( ) 17 - (1) a b c d e f g h i j k No.0 0 1<2 INP

High performance type Step Motor Controller (Servo/24 VDC)

Target position (01-149) Posn failed D SVON Input The connection with the higher-level devices is disconnected. A Communication error occurred (01-150) RESET Communi D SVON cation Do not interrupt the connection between the PC and teaching box when the electric actuator is being operated by upper-level devices.

Step Motor Driver （ Pulse input type ）

D SVON input Caution Please refer to the manual or the catalogue of the electric actuator for the method of operation of the electric actuator. The temperature around the power element of the driver is too high.

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

(A,C) Note.5) VXF-26AA VXF-26AC 24.529.5 29.434.3 VXF(A)26A(B,D) Note.5) VXF-26AB VXF-26AD VXF(A)25B(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26B(A,C) Note.5) VXF-26BA VXF-26BC VXF(A)26B(B,D) Note.5) VXF-26BB VXF-26BD VXF(A)26C(A,C) Note.5) VXF-26CA VXF-26CC VXF(A)26C(B,D) Note.5) VXF-26CB VXF-26CD 24.529.5 29.434.3 VXF(A)26D(A,C) Note.5,6) VXF-26CA VXF-26CC VXF(A)26D(B,D) Note.5,6)

EtherNet/IP TM Compatible Fieldbus System

Position code (Order #1 #4, Port A D) Message code #4 #3 #2 #1 D C B A 0 0 1 0 0 0 0 1 0 0 0 1 Message code 0x2 Product No.1 A port Ex.: Short-circuit or over current error with the first slave of COM A port. Message code and corrective action for diagnostic error are shown below.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Confirm the position where the pushing operation starts. a b c d e f g h i j k No.

ASR

Note3) L6 L8 Note 4) A2 M L7 L4 A1 Note 4) Weight (g) Note 5) Note 1) d D3 MAX.

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Instantaneous flow: L/min cfm Accumulated flow: L ft3 L3 IO-Link/ NPN/PNP Analog 1 to 5 V Analog 0 to 10 V*3 ZS-33-D ZS-33-F L4 IO-Link/ NPN/PNP Analog 4 to 20 mA + ZS-33-D *3 1 to 5 V or 0 to 10 V can be selected by pressing the button.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

3 Port Solenoid Valve Series VQ100

Enter in order starting from the first station on the D side.

3 Port Solenoid Valve Series VQ100 1

Enter in order starting from the first station on the D side.

Compact Cylinder Type Pin Clamp Cylinder C(L)KQG32 Series ø 32

(Unclamping side) With lock Bore size Nil Without lock L With lock 32 32 mm Auto switch type Nil Without auto switch (Built-in magnet) C D-P3DWASC E D-P3DWASE N D-P3DWA L D-P3DWAL Z D-P3DWAZ Guide pin diameter Mounting surface position (viewed from top) For guide pin diameter, refer to Table 1 below.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.

Digital Flow Switch (Integrated display type)

(example: If the flow switch with output impedance of 1 k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) x1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V).

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

A Input/output specifications 22 30 62 70 NPN open collector 2 output + Analog output Bracket D NPN open collector 2 output + Auto shift input Refer to the dimensions for the difference between brackets A and D. D PNP open collector 2 output + Analog output PNP open collector 2 output + Auto shift input Optional Note) Auto shift input is used for the auto shift function.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D