HRX-OM-R039

Alarm indication and trouble shooting . 6-1 6.1 Alarm Display . 6-1 HRS Series HRX-OM-R039 Contents 6.2 Alarm buzzer stop . 6-2 6.3 Troubleshooting . 6-3 6.4 Other Errors . 6-4 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Control of Circulating Fluid Quality . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months .

Series KP/KPQ/KPG

mm Connection threads R Weight g L2 M D2 L1 Applicable tubing M 4 5 5 6 8 9 13 14 15 18 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 3.5 10.4 3.5 20.7 18 10 D1 6 9 12.8 9 22.8 19.5 D2 L2 A 14 8 12 22

Series KP/KPQ/KPG

mm Connection threads R Weight g L2 M D2 L1 Applicable tubing M 4 5 5 6 8 9 13 14 15 18 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 3.5 10.4 3.5 20.7 18 10 D1 6 9 12.8 9 22.8 19.5 D2 L2 A 14 8 12 22

IDX-OM-W028

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 External Dimensions . 6 3 6 4 Electrical Circuit . 6 4 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 6 Table of Contents 1 Air Dryer Table of Contents Chapter 7 Option Specification C 7 1 Specifications . 7 1 7 2 Precautions for the installation and handling of the product . 7 1 Chapter

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Valve output 14 RXn.F RYn.F Valve output 15 Unit No.0 Reserve RX(n+1).0 RY(n+1).0 Valve output 16 EX600-SCF1 RX(n+1).1 RY(n+1).1 Valve output 17 RX(n+1).2 RY(n+1).2 Valve output 18 RX(n+1).3 RY(n+1).3 Valve output 19 RX(n+1).4 RY(n+1).4 Valve output 20 RX(n+1).5 RY(n+1).5 Valve output 21 RX(n+1).6 RY(n+1).6 Valve output 22 RX(n+1).7 RY(n+1).7 Valve output 23 RX(n+1).8 RY(n+1).8 Valve output

Pin Cylinders Series CJP2/CJP

IY-P006 IY-P010 IY-P015 CT-P006 CT-P010 CT-P015 0.020 0.045 3 0.020 0.045 3 9 2.85 6.2 0.75 0.65 20.4 2.85 17.6 0.75 0.65 Clip C-type 3 Clip C-type 3 6 6 0.030 0.060 0.030 0.060 5 5 13.6 4.8 10.2 1 0.7 23.9 4.8 20.5 1 0.7 C-type 5 C-type 5 10 10 0.030 0.060 0.030 0.060 6 6 15.8 5.7 12.2 1 0.8 31.7 5.7 28.1 1 0.8 C-type 6 C-type 6 16 16 Included Included Mounting nut Rod end cap Flat type

Rotary Table/Rack & Pinion Style Series MSQ

DD 284 Rotary Table/Rack & Pinion Style Series MSQ Construction CRB2 CRBU2 CRB1 MSU CRJ #1 oi @7 @8 t !0 y !6 !7 !8 !1 @5 er w@4 MSQ R (With internal shock absorber) CRA1 @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

Step Motor Controller (Servo / 24 VDC)

number and the combination of IN0-IN5 or OUT0-OUT5. 0 OFF 1 ON 0 OFF 1 ON No IN5 IN4 IN3 IN2 IN1 IN0 Step Step OUT OUT OUT OUT OUT OUT No 5 4 3 2 1 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1 0 0 0 0 0 1 1 0 0 0 0 0 1 2 0 0 0 0 1 0 2 0 0 0 0 1 0 3 0 0 0 0 1 1 3 0 0 0 0 1 1 4 0 0 0 1 0 0 4 0 0 0 1 0 0 5 0 0 0 1 0 1 5 0 0 0 1 0 1 6 0 0 0 1 1 0 6 0 0 0 1 1 0 7 0 0 0 1 1 1 7 0 0 0 1 1 1 8 0 0 1 0 0 0 8

IDX-OM-W019

2 3 6 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 Chapter 5 Troubleshooting . 5 1 Chapter 6 References 6 1 Specifications . 6 1 6 2 Specifications . 6 1 6 3 Dimensions . 6 2 6 4 Electric wining diagram . 6 4 IDFB Series Table of Contents 1 IDX-OM-W019 Air dryer Table of Contents 6 5 Compressed Air and Refrigerant

Vacuum Module Series ZX

Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. ZY 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

VS7-6

AXT512-13 O-ring NBR 2 AS568-022 O-ring NBR 1 AS568-020 O-ring NBR 2 AXT512-5 Gasket NBR 1 AXT512-4 Plate SPCC 1 M4X10 Oval countersunk head screw SWRH3 2 AXT512-6-1 Connection fitting A 2 AXT512-6-4 Connection fitting B 2 AXT512-6-3 Hexagon socket head screw 2 1.19-34

Electric Actuators

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

LJ1H

6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

IZx-OMT0049

Non-standard bar length Separate cable No. of drop prevention cover needed Symbol No. of drop prevention cover needed Symbol for bar for bar IZS40-E3 IZS40-E4 IZS40-E5 IZS40-E3 IZS40-E4 IZS40-E5 length length 28 1 154 5 52 1 1 166 1 1 4 70 2 1 172 1 5 76 1 1 1 178 1 5 88 1 2 184 6 94 3 196 1 1 5 100 2 2 202 1 6 106 1 1 2 208 1 6 118 1 3 214 7 124 4 220 2 6 136 1 1 3 226 1 1 6 142 1 4 238

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

) 4.5 (With stroke adjuster at retraction end) 38 92 89 56 70 FF 38 24.5 F 6H9( ) depth 6 +0.030 0 31 6 x M6 x 1 thread depth 10 N 1 x F 2 +0.030 0 6H9 ( ) depth 6 55.5 2 x M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN 1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN x M8 x 1.25 thread depth 16 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 GA HA Section AA Section BB (mm

CXWM/CXWL

1 !2 !3 !4 !5 !6 !7 !8 !

LJ1H

B A C D 5 6 Standard Motor Series LJ1H10 Motor Output Slide Screw High Rigidity Direct Acting Guide 50W 20mm/20mm lead Horizontal Mount How to Order Stroke LJ1H101 SC 1 F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 1 2 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right

IDX-OM-W029

2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-4 . 6-3 6-5 . 6-5 7 C 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 M 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 R 10-1 . 10-1 10-

IDX-OM-W010

References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 3 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 7 3 Air piping . 7 1 7 4 Air flow capacity . 7 1 7 5 Compressed Air and Refrigerant Circuit / Operation

HRX-OM-K003

mode is switched from DIO REMOTE to LOCAL. . 5-13 5.4.3 Example 3: Alarm signal of contact signal is changed from N/A to ALARM1. . 5-14 Chapter 6 Error Message and Troubleshooting . 6-1 HRW Series TOC-2 HRX-OM-K003 Table of Contents 6.1 Error Message . 6-1 6.2 Troubleshooting . 6-2 Chapter 7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1