3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

85.5 30.5 43.5 75 85.5 62 75 100 110.5 72.5 85.5 112.5 123 83 96 125 135.5 93.5 106.5 137.5 148 104 117 137.5 148 114.5 127.5 150 160.5 125 138 162.5 173 135.5 148.5 175 185.5 146 159 187.5 198 156.5 169.5 200 210.5 167 180 200 210.5 177.5 190.5 212.5 223 188 201 225 235.5 198.5 211.5 237.5 248 209 222 250 260.5 219.5 232.5 262.5 273 51.5 64.5 87.5 98 L1 L2 L3 L4 4-14-14 15 Body Ported 3

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

position 0.1 MPa (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/ Vibration resistance Enclosure Rated coil voltage 10 to 60C (1) VK None Push type (Tool required) 1 (P) 5 (R1) 3 (R2) VZ 2 position double (rubber) 150/50 m/s2 (2) (A) 4 (B) 2 VF IP65 (Dust/Splashproof type) 12 VDC, 24 VDC 15 to +10% of rated voltage Equivalent to Class B 1.8 W DC (75

KJ

Lock 15-2-75 4 Series KK Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Port size Part no.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

85.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180 200 210.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 3 41 54 75 85.5 4 51.5 64.5 87.5

ZX

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Pitch 10 Manifold base Ejector + Silencer End plate Lead wire length 300 Supply valve Release valve Vacuum switch Filter unit Release flow rate adjusting needle Pitch = 21 Common EXH port (PV port) Common air supply pressure port Stations (mm) 6 159 171 176 7 180 192 197 8 1 54 66 71 2 75

-- NCM seies

a) .250 \-24 0.50 .624 .621 0.25 0.86 0.38 it-l6 .251 .zfi 0.75 0.25 o.34 It.oo o.75 o.62 o.12 # 1 8 o.75 1-?

MU

MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4

Compact

CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12 MXZ12Standard (Pilot port location: Front) 4 x 6 4 x M3 x 0.5 depth 5 17 14 14 2 x 3.4 (Through holes for

NCA1

5.00 1.31 1.32 3.13 3.25 3.000 1.63 8.88 800 (8") 1.375 1-14 1.63 2.000 1.530 1.000 8.50 3/4 NPT .75 5.13 1.31 1.32 3.25 4.25 3.000 1.63 9.00 Note: Pivot and cotter pins are included.

CH

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

AC Servo Motor Driver (Pulse input type)

No Initial value Recommended value Number of command input pulses per revolution *3 PA05 0 0 Electronic gear numerator *3 PA06 1 32768 65536 32768 65536 32768 65536 32768 Electronic gear denominator *3 PA07 1 150 75 75 150 75 75 250 125 125 200 100 50 Regenerative option PA02 0 0 (Non)/ 0002 (LEC-MR-RB-032) 1 1 0 0 Rotation direction selection *4 PA14 0 (+Counter (+Counter (+Counter (+Counter

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

In this case, keep the ambient temperature within 0 C to 45 C or use the driver with 75% or less of the effective load ratio.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

49) 98 (64) 109 (75) 0.79 0.83 0.32 0.21 0.21 0.19 2 position Double 0.86 1.1 [0.60] 0.72 0.34 0.20 0.28 0.26 0.18 0.18 0.80 0.71 0.99 [0.47] Closed center 1/8 1/8 SYJ540--01 0.24 [0.44] 0.38 0.26 [0.18] 0.18 111 (77) 153 (119) 85 Exhaust center 3 position 0.29 [0.38] 0.24 [0.12] Pressure center Note 1) [ ]: denotes the normal position.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

Environment

OA OB PA PB Q S T U PC W X Y Without lock With lock Without lock With lock Motorless 25 15 to 100 8 37 38 15.4 8.2 28 46 92 1 15.4 123 173 145 195 51 101 to 400 LAT 32 20 to 100 10 37 38 15.4 8.2 28 60 118 1 15.9 123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75

Integrated Controller

Type EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Specifications Model Selection EQFS H Series EQY H Series Auto Switch Electric Specifications Wiring Examples Operation Data Setting Options Specific Product Precautions Model EQFS16H EQFS25H EQFS32H EQFS40H Stroke [mm]1 50 to 500 50 to 800 50 to 1000 150 to 1200 Work load [kg]2 Horizontal 10 15 18 15 26 40 40 39.5 50 68 68 26 60 75

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 2 x M12 1/4, 3/8 [4(A), 2(B) port] One-touch fitting [X: External pilot port] Applicable tubing O.D.: 6 1/4" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 6 1/4" 3/8 [1(P), 3/5(E) port] U side D side (L4) L3 L5 30.1 (5.4) 4 x 6.2 (For mounting) [For Rc 1/4, 3/8] 13.3 DIN rail holding screw (For DIN rail mounting) 81.7 75

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

3 position 0.51 [0.38] 0.14 [0.10] 54 73 58 81 75 115 53 71 0.69 0.44 0.39 0.12 0.39 0.18 Body ported Base mounted 2 position C4 0.69 0.56 0.57 [0.41] 0.43 0.41 [0.41] 0.41 0.40 0.12 0.40 0.40 0.19 0.15 M5 x 0.8 (4 Onetouch fitting) 10-SYJ523--C4 84 72 126 0.37 [0.37] 0.37 0.10 [0.11] 0.10 82 3 position 0.4 [0.37] 0.15 [0.10] 54 73 58 81 75 115 53 71 0.70 0.47 0.40 0.12 0.36 0.19 2 position

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

(mm) Model CXS32-10 S SS ZZ Z 10 104 134 40 20 114 144 50 30 124 154 50 40 134 164 50 21-/2210-/11-/12CXS32-20 CXS32-30 CXS32-40 CXS32-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 144 174 60 21-/2210-/11-/12100 194 224 90 CXS32-75 CXS32-100 75 169 199 70 21-/2210-/11-/1221-/2210-/11-/12859 Dual Rod Cylinder CXSL 1221CXS / 10-/1122Specific Product Precautions Air Preparation Equipment

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)