,

35 45 26 35 45 14 14 Indicator light 3 1 5 Indicator light 5 1 3 39 36.5 Manual override 2-5.5 mounting holes Manual override 39 36.5 44 41.5 2-5.5 mounting holes 44 41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01

VM

Retainer Over travel spring t Brass Stainless steel Plunger Body Polyacetal Aluminum alloy Metallic plated y u w e Spring i Stainless steel Spring Stainless steel Plunger retainer r Aluminum alloy Spool valve Brass Black zinc chromate treated Rubber lined 3.5-26 VM400 Series VM400 Basic/VM430-01-00 JIS Symbol 26N F.O.F. 1.5mm P.T. 2mm O.T. 3.5mm T.T.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Refer to p.1.12-26 for the latching style. Turn the manual override clockwise by 180 to set the E mark to "1" and press it in the direction indicated by arrow, then it will be locked in the ON state. Turn the manual override counterclockwise by 180 to set the E mark to "0", then it will be reset. Connection of Lead Wire (Not necessary if ordering pre-connected model.)

Series PF2W Digital Flow Switch For Water

Panel mount adapter Panel (ZS-26-B) Waterproof seal (accessory) 328

Heavy Duty Stopper Cylinder

Double acting Double acting spring type Single acting Contents Roller pin Lever pin Lever spring Magnet Flat washer 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 Bore size (mm) 50 63 80 RS2H50D-PS RS2H63D-PS RS2H80D-PS RS2H50T-PS RS2H63T-PS RS2H80T-PS Set of nos. above #7 to $0 (excluding #8) Zinc chromated Type C retaining ring for shaft Seal kit includes #7 to $0 (excluding #8).

Compact

Cylinder with Linear Guide MXZ Series (Linear guide) Guide Rod Type Compact Cylinder CQM Series (Slide bearing) Deflection Compact and Space-saving Height/at 10 mm stroke [mm] Depth Width Bore size MXZ MXH MGP CQM 12 44 56.51 53 41.5 16 45 66 59 41.5 20 49.5 78 69 52 25 54 75.5 55.5 Workpiece mounting hole 1 Compared with bore size of 10 Width [mm] Bore size MXZ MXH MGP CQM Height 12 23 201 26

VDW30/40-XF

A B C D VDW30-CP7 26 7 9 14 VDW40-CP10 28 10 10 15 C D 2.50.1 9 or less 1.6 or more 2.5+0.25 0 2.5+0.25 0 D B 120.1 13 17 O-ring 2 or more O-ring dimentions P7 P10 (Nominal no.) A B C E Applicable clip Clip for P7 Clip for P10 Conforms to JIS B 2401 dimensional standard for O-rings for industrial applications.

Thermo-dryer

) 80.6 (27) 82.4 (28) 84.2 (29) 86 (30) F (C) 59 (15) 60.8 (16) 62.6 (17) 64.4 (18) 66.2 (19) 68 (20) 69.8 (21) 71.6 (22) 73.4 (23) 75.2 (24) 77 (25) 78.8 (26) 80.6 (27) 82.4 (28) 84.2 (29) 86 (30) Maximum value of the outlet air set temperature Maximum value of the outlet air set temperature [Note] Select so that it does not exceed the maximum air flow capacity of each model (IDH4: 17.6

EX120/121/122

0 11 Connector (BUS IN) Dimensions 10.7 55.2 47 106 11.5 56.4 22.1 26 Series EX600 How to Order Digital Input Unit EX600 DX N D Digital Input Unit Input type P N PNP NPN Connector, number of inputs, and open circuit detection Connector Symbol Number of inputs Open circuit detection B C C1 D No No Yes No 8 inputs 8 inputs 8 inputs 16 inputs 4 x M12 (5 pins) 8 x M8 (3 pins) 8 x M8 (3 pins)

H/DL/L/LL

DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 Connection thread 26.5 14 DL10-03 17 22 57 DL10-04 27 28.5 100 DL12-02 25 76 17 43 12 19 28.5 DL12-03 17 26 85 DL12-04 27 17 Union Tee: DT H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

MIW/MIS

20 50 8 4 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 26 17 IN 60 51 43 34 85 94 63 OUT 220 188 157 126 314 20 10 71 47 IN 165 142 118 94 236 147 98 OUT 344 295 245 196 491 25 10 124 82 IN 288 247 206 165 412 241 161 OUT 563 482 402 322 804 32 12 207 138 IN 484 415 346 276 691 Mass Standard Stroke Double finger type/MIW (mm) Increase by stroke adjuster (g) Increase by scraper (

MHZA2-6/MHZAJ2-6

Model Gripping force Note) Opening/ Closing (Both sides) (mm) Action Model Bore size (mm) JIS Symbol Double acting Gripping force per finger Effective value (N) External Internal Mass (g) MHZA2-6D MHZAJ2-6D MHZA2-6S MHZAJ2-6S MHZA2-6C MHZAJ2-6C 26 27 26 27 26 27 4 4 4 4 4 4 6 6 6 6 6 6 Double acting 3.3 6.1 Normally closed Normally open 1.9 Single acting Single acting type, Normally open

Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type

Refer to page 26 through to 33 for PCW type with power supply terminal. 10

Refrigerated Thermo-chiller

Error WRN 26 An error has occurred in the DeviceNet communication system of this unit. (Only for DeviceNet communication specification Option D) Stop DNET Comm. Error FLT 27 An error has occurred in the inverter for the refrigerator. The alarm is only for the HRZ010-WS.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

If a bend (R) is used, limit it to R3 or less. 12 Series PFMB7 Dimensions PFMB7201 With bracket/Without flow adjustment valve With bracket/With flow adjustment valve 48 76 36 24 28 28 4 x 3.4 34 26 18 34 26 18 4 x 3.4 36 51.5 (Max. 58.5) 43 43 48 48 18 18 1.2 1.2 DIN rail mounting 18 x n pcs. + 34.4 18 48 43 52.4 1 1 IN 1 IN IN DIN rail is prepared by customer.

KA

15.5 M5 x 0.8 M6 x 1 8 16 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20.5 20 8 14 10 10 4.2 4.2 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 x 0.8 M6 x 1 9 5 6 18 3.5 3.5 8 8 KAL06-M6 16.5 Connection thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 10 6 23.5 1 4 KAL06-U02 10 11.4 11.4 15 Applicable tubing 24.5 23 17 12 1 8 1 4 KAL08-U01 KAL08-U02 25.5 26

Compact Cylinder with Air Cushion and Lock Series RLQ

needle 9 PL Unlocking port Unlocks when pressurized 17 7 77 60 4 x 9 Flat washer 4 pcs. 4 x 14 Depth of counterbore 10.5 depth 4 x 15.6 Depth of counterbore 15 depth 84.5 104 + Stroke 8 55 + Stroke 41 Retraction locking LOCK 30.5 Pc PL Port thread type Rc NPT G 1/8 1/4 M5 x 0.8 Dust cover (Manual unlocking unit) PL Unlocking port Unlocks when pressurized Rod end male thread M18 x 1.5 11 26

Direct Operated

CAT.ES70-26 B Direct Operated 3 Port Solenoid Valve For Air, Water, Oil, Steam Reduced power consumption (DC specification) Reduced Reduced power consumption power consumption (DC specification) (DC specification) 6 6 W 4. 4.5 W 6 W 4.5 W 8 8 W 7 W 8 W 7 W 11.5 1.5 W 10. 0.5 W 11.5 W 10.5 W Series VX31/32/33 3 VX3 New New 3 Reduced power Reduced power consumption consumption (DC specification

58

P (cm) Mounting Applicable max. stroke according to buckling strength (cm) Operating pressure (MPa) Support bracket nominal symbol and schematic diagram Nominal symbol 125 140 160 Foot: L Rod flange: Head flange: 0.3 103 92 113 F G L, F 0.5 79 70 86 W W W 0.7 66 58 72 0.3 45 38 47 G 0.5 33 27 34 0.7 26 22 27 Center trunnion: 0.3 96 83 106 T Clevis: C, D C, D 0.5 71 61 76 W W 0.7 59 50 62

NCM

Maximum Stroke (inch) Max. stroke 12 Standard 16 Maximum 12 Standard 26 Maximum Bore size 3/4, 7/8, 1-1/16 1-1/4, 1-1/2, 2 How to Order Boots are supplied to protect the surface of piston rod and rod seals in harsh or wet environments. Bore size 3/4", 7/8", 1-1/16", 1-1/4", 1-1/2" Double acting only Mounting Bore Stroke Option J NCM Ex.)