Lubrication Manual override Non-locking push type Mounting orientation Unrestricted 150/50 m/s2 Shock/Vibration resistance (2) Dustproof Enclosure Grommet, Conduit, Conduit terminal, DIN terminal 100, 200, 24 , 48 , 110 , 220 , 240 Electrical entry DC AC (50/60 Hz) Coil rated voltage (V) 24, 6 , 12 , 48 , 100 Allowable voltage fluctuation 15 to +10% of rated voltage 19 VA (50 Hz), 16 VA
Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 2 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.
The LECP6 controls NPN or PNP step motors.Motor controller: Step motor (servo/24 VDC), Servo motor (24 VDC)?
The LECP6 controls NPN or PNP step motors.Motor controller: Step motor (servo/24 VDC), Servo motor (24 VDC)?
The LECP6 controls NPN or PNP step motors.Motor controller: Step motor (servo/24 VDC), Servo motor (24 VDC)?
Body mounting bolt tightening torques Mounting bolt Tightening torque Bore size (mm) Size Nm No. 20 32 40 50 63 80 100 3 M5 x 0.8 2 3 M5 x 0.8 4 3 M5 x 0.8 4 6 M6 x 1 4 11.5 M8 x 1.25 4 24 M10 x 1.5 4 34 M10 x 1.5 4 37 Compact Hydraulic Cylinder Double Acting/Double Rod: 3.5MPa Series CHQWB Mounting Bolts for CHQWB Mounting: Through hole type mounting bolts are available.
22 19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 32 M14 x 1.5 (mm) Boss-cut ZZ Bore size (mm) 20 25 32 40 103 107 109 138 10
Dimensions (mm) 1in = 25.4mm Scale: 80% With auto switch: MDSUA3-S 1) 24 : When using D-90, 90A, S99, S99V, S9P, S9PV, T99, T99V 30 : When using D-97, 93A 2) 60: When using D-90, 90A, 97, 93A 69: When using D-S99, S99V, S9P, S9PV, T99, T99V 15.5 45 29 Angle adjustment bolt 2-M5 x 0.8 (Port position: Side port type only) A port B port 1 24 2 60 (69) 18.5 34 D-97, 93A 15 30 6 Series MSUA Rotary
L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20
28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5
V DC relay and PLC Applicable load 5, 12, or 24 V DC (4.5 to 28 V DC) Power voltage 10 mA or less Current consumption Load voltage 24 V DC (10 to 28 V DC) 28 V DC or less 40 mA or less Load current 2.5 to 40 mA 0.8 V or less Internal voltage drop 4 V or less 100 A max. at 24 V DC Leakage current 0.8 mA or less Indicator light Red LED lights when ON.
25 32 40 50 Description Material Aluminum alloy Aluminum alloy Aluminum alloy Special resin Special resin Special resin Stainless steel Chromium molybdenum steel Chromium molybdenum steel Chromium molybdenum steel Special resin Special resin Special resin Stainless steel Chromium molybdenum steel 63 16 Note Hard anodized Hard anodized Hard anodized No. 1 2 3 4 5 6 7 8 9 10 11 21 22 23 24
ax mum stalion: 8 (Note 2) (+) and (-) iid cale lhe d rction ol DC soleno d va ve w th lrghl surge voLlage sumiessor lNoie 3) Sres VFS3o0HOM is aso possible Cable clamp 206138-1...1 pc Socket 66105-2...24 pcs. Nippon AlvlP's cable Cable clamp 206128-1...1pc Sockel 661 05'2. . .24pcs.
Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.
For DC voltages other than 12, 24 incorrect wiring will cause damage to the surge voltage suppressor circuit. (Wrong polarity will cause damage.) Solenoids, whose lead wires have been pre-wired, are positive side red and negative side black.
solenoid) Pressure center Exhaust center Series Closed center C3 C4 C8 C6 Dual 3 port valve (3.2) (4) (8) (6) Single SQ130 Metal seal SQ131 Rubber seal SQ230 Metal seal SQ231 Rubber seal 3.2 (0.18) 4.5 (0.25) 11.7 (0.65) 14.8 (0.82) 18 Series SQ1000/2000 How to Order Manifolds SS5Q 3 (-00T) JD0 1 08 D N Series P, R port inch bore size Symbol Series SQ1000 SQ2000 1 2 Options Symbol 02 to 24
3 port valve 77.1 83.7 2 position C4 4 One-touch fitting SZ360--C4 3 position 87.6 4 position 84 73.5 80.2 2 position C6 6 One-touch fitting SZ360--C6 84.1 3 position 4 position 81 68.3 75 2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD U1 2 [With external pilot] (Pitch) P = 10.5 2n1-M5 x 0.8 [4(A), 2(B) port] 24
For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector
46 0.35 44 39 31 60 0.45 54 48 38 74 0.05 11 11 9 16 0.15 24 22 18 33 4 0.25 34 32 27 48 0.35 46 42 35 62 0.45 57 52 44 76 0.05 12 11 9 16 0.15 25 24 20 33 6 0.25 37 34 30 47 0.35 49 45 39 63 0.45 61 56 48 77 3 39 - No.ZQ-OM01401-B 12. 12.1 12.2 0 40 - No.ZQ-OM01401-B 12.3 Assy ZQ VQ100 3 2 Assy Assy Assy () ZQA-K15LO--2 ZQA-K25LO--2 ZQA-J15LO--1 ZQA-J25LO--1 ZQA-Q15LO--1 ZQA-Q25LO
ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U