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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 48.5 41 39 39 3.5 3.5 8.5 8.5 13 2-3.5 Mounting hole 2-3.5 Mounting hole Piping port M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 Dimensions/Base Mount Type: ZSE2-0R Grommet type: ZSE2-0R-15 Connector

https://www.smcpneumatics.com/pdfs/smc/70pszse2.pdf

VXA21/22

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 170 0.5 1.0 0.6 0.2 0.1 1.0 0.6 0.2 0.1 0.1 4.5 15 0.61 2.5 10.45 0.75 1 4 250 (8A) 26 41 46 15 26 41 58 58 1.1 1.7 1.9 0.61 1.1 1.7 2.4 2.4 3.3 6.4 8.8 2.5 3.3 6.4 11 11 0.50 0.40 0.40 0.45 0.50 0.40 0.38 0.38 1.1 1.8 2.3 0.75 1.1 1.8 2.8 2.8 6 8 1.5

https://www.smcpneumatics.com/pdfs/smc/70pvvxa21p.pdf

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ISO 9002] SMC Taiwan [ISO 9002] SMC UK [ISO 9001/ISO14001] SMC US [ISO 9001] 15 Table of Contents Page Page Actuators Valves Pin Cylinder/Series CJ1 38 Gas and Chemical Liquid Valve/Series LVM 17 Miniature Cylinder/Series CJP 39 High Purity Chemical Valve/Series LV 18 Mini Free-Mount Cylinder/Series CUJ 40 Ultra Compact Valve. 3 Port Solenoid Valve 19 Electric Actuator/Series LG, LJ, LX 41

https://www.smcpneumatics.com/pdfs/smc/70vmedical.pdf

Series SYJA300 3 Port Air Operated Valve

SS3YJA5-40-031-01 SS3YJA7-41-031-01 SYJA714 1 pc. 2 pcs. 1 pc. 1 pc. 2 pcs. 1 pc. SYJA514 SYJ500-10-3A . SYJ700-10-2A .. Pilot Pressure Range 0.6 Pilot pressure (MPa) Pilot pressure range 0.5 0.4 Caution 0.3 Be sure to read before handing.

https://www.smcpneumatics.com/pdfs/smc/70vsyja3.pdf

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. 0.2 SS5YJA3-41-03-M51 pc. SYJA3140 1 pc. SYJA3240 1 pc.

https://www.smcpneumatics.com/pdfs/smc/70vsyja4.pdf

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-41 41 Date issued: Photo copying this page is recommended.

https://www.smcpneumatics.com/pdfs/smc/70vsysperi.pdf

2/3 Port Valve

Use 2 port valve VNH33. 4.2-33 VNH Dimensions Dimensions (mm) Model Main port 2 port 3 port Pilot port H I A C B D E F G 3 8 3 8 Rc(PT) 1 8 2-Rc(PT) 2-Rc 3-Rc(PT) 3-Rc 50 60 79 90 77 95.5 111 119 60 80 100 115 235.5 265 300 319.5 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 1 2 3-Rc 3 4 3-Rc1 Rc1 4 Rc1 4 Rc1 8 1

https://www.smcpneumatics.com/pdfs/smc/70vvn.pdf

%silltr

+o.o (s6.7) 48.3 71 .5 84.9 342.5 50.9 25.4 67 .4 a a 7 4.4 2.2 1 . 1 0.55 ls.s 22 1 1 40 250 125 oc .tc 54.6 47.6 52.4 72.4 39 (86) 46.3 /oa ll 46.6 55.8 27.9 73.9 37 3.9 2 78 39 20.3 10.9 50 400 200 100 50 EA (87) 43.5 (e6.5) 48.3 71 .3 35.7 84.8 42.4 50.8 25.4 (ee.2) 51.6 27.4 68.3 36.8 1 0.5 79.9 40 20 0 63 650 300 150 75 (e4.4) 47.2 82.3 41 .1 (s1.2) 45.6 67.4 33.7 80.1 40.1 4A 24 31

https://www.smcpneumatics.com/pdfs/smc/basic_pneumatics.pdf

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5 . , ' , . i u , , MGQbll2 Slide bearing 0.24 0.24 o.32 0.35 0.39 MGOLI2 Ball bush bearing o.23 0.26 0.29 0.35 0.38 16 vepr,lrol Slide bearing 0.36 o.41 o.47 0.52 0.57 vcbr-ro Ball bush bearing 0.3s o.3s o.44 o.52 o.57 n MGOM20 Slide bearing 0.56 0.63 0.70 o.77 0.s6 1.10 MGOt20 Ball bush bearing 0.54 o.60 0.70 o.90 1.04 ,' .is MGOM25.

https://www.smcpneumatics.com/pdfs/smc/mgq.pdf

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41"ry19e: 4-position dual 3-port valves for \ \ ..;'r..:.. independent control of ' .:1-.i/-9-.A & B ports Availabe conf igurations [N.C./N.C ]. I N I n / N l / . \ I n i r N l a / N l ^ l : , ! . : ' : ) ' , + . .

https://www.smcpneumatics.com/pdfs/smc_now_catalog/low_res/smc_now.pdf

SMC VVX311Z-06-1 mfld base, vx3100 series, VVX* MANIFOLD VX SERIES

1/41/8, 1/41/4C37PPSStainless steelNBR FKM EPDMAir, Oil--

https://www.smcpneumatics.com/VVX311Z-06-1.html

SMC VVX321-08-1 mfld base, vx3200 series, VVX* MANIFOLD VX SERIES