HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

IDX-OM-W032

R 10-1 . 10-1 10-2 . 10-1 10-3 . 10-1 10-4 . 10-2 10-5 . 10-2 11 T 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 11-6 . 11-3 12 V 12-1 . 12-1 12-2 . 12-2 12-3 . 12-3 12-4 . 12-3 13 13-1 . 13-1 2 IDX-OM-W032 i i i 1 () OFF 3 ON OFF i 1 1 3 IDFA Series i-1 i 1 IDX-OM-W032 i i 2 5 i 2 1 IDFA Series i-2 i 2 IDX-OM-W032 i i 2 2 i 2 3 50 i 2 4

HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-S010

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Flow sensor

polarity protection) Power consumption 16 mA or less Enclosure IP40 Operating fluid temperature 0 to 50 oC (no freezing or condensation) Environment Operating temp. range Operating: 0 to 50 oC Storage: -10 to 60 oC (no freezing or condensation) Operating humidity range Operating, storage: 35 to 85%R.H.

Pressure Sensor for General Fluids

Enclosure IP65 Ambient temperature range Operation: -10 to 60 oC, Storage: -20 to 70 oC (No condensation or freezing) Environ ment Ambient humidity range Operation, Storage: 35 to 85%RH (No condensation) Withstand voltage 250 VAC, 1 minute, Between lead block and case Insulation resistance 50 M or more at 50 VDC Between lead block and case Temperature characteristic 2% F.S. or less (0 to

Clamp Cylinder

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Min. operating pressure 0.05 MPa Ambient and fluid temperature -10 to 60oC (No freezing) Lubrication Non-lube +1.0 mm Stroke length tolerance 0 Cushion Unclamping side (head side): With air cushion Speed controller At both ends Piston speed 50 to 500 mm/sec W a r n i n g ~ Confirm the specifications

ML1

Model M1 M2 M3 W1 W2 W3 W4 ML1C25 14.7 4.90 4.90 20 12 3 10 ML1C32 29.4 9.80 9.80 32 19 5 16 ML1C40 58.8 19.6 19.6 50 30 8 25 Design Consideration ML1C/M1 Allowable moment and Max. payload Allowable moment and Max. payload varies depending on mounting orientation, piston speed etc. Therefore, use the cylinder within the range shown in the graph corresponding to operating conditions.

HRX-OM-M091

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. 4 High circulating fluid return temp. 5 High circulating

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 9.5 4 Section AA B D Mounting base side +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2 x M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6 x M3 x 0.5 depth 4 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 11-/22-MXP10-10 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-20 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 835 MXP/MXPJ6 1122Air Slide Table

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating

Low-Speed Rotary Actuator

Body pin hole Size Tightening torque 10 0.2 to 0.3Nm 15 0.3 to 0.5Nm 20 4.2 to 5.2Nm 30 4.2 to 5.2Nm 40 7.2 to 8.7Nm Size 10 , 15 Cover Assembly End cover Assembly Body pin hole Hexagon socket head bolt Fig.22 Size 20 , 30 , 40 (6) Perform operation test after assembling and check external leakage.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W Z Model 8 32 52.4 20 20 21 6.5 32 14 10 44 40 60 11-/22-MXP10-10 20 50 82.4 36 36 39 7.5 50 20 20 74 65 90 11-/22-MXP10-20 102 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP12 Z 3

SI Unit for Vacuum Manifold

Settable range : 10...988 (1.0 kPa...98.8 kPa) Combination conditions with other parameters : 10 H1 P1-1 (50) ... ... ... ... ... 16 2 R/W 0x0032 Vacuum confirmation hysteresis (H1) of CH15 (50) 3.4.3. Pressure P2 (Index 66) Table 3-11.

AIR FILTER

HOW TO ORDER AF 30 03 BD 1N A 1 3 4 5 2 1 Symbol Description Body size 10 20 30 40 50 60 Meter thread (M5) Rc N NPT F G Thread type Nil 2 M5 M5 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Port size 3 Nil Without mounting option B With bracket a Mounting Option 4 Nil Without auto drain C With float type auto drain (N.C.)

S070

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

3 Port Solenoid Valve

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

KT10

) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.

MIST SEPARATOR

Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 10 NPT3/8" Note 2 Option Semi-standard Semi-standard Port thread Part no. Rc G NPT AD47N-8(Z)-A AD47-8-A B External appearance drawing and part no. Applicable tube external DIA. 10 NPT3/8" 10 NPT3/8" 17 Note 2 Note 2 Option Semi-standard Semi-standard Semi-standard Part no. Part no.

Check Valve Series AK 1

Description POM Valve 19033 19014 19024 e Stainless steel Spring 19037 19015 19025 r NBR O-ring 20 x 17 x 1.5 t NBR Ring 19016 19026 y Brass, NBR Seat ring 19013 19023 u Dimensions Model Port size L1 H B AK2000-01/02 22 25 1/8, 1/4 50 AK4000-02/03/04 36 36 1/4, 3/8, 1/2 67 AK6000-06/10 50 50 3/4, 1 95 Caution Be sure to read before handling.