HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

MIW/MIS

, D-F8P, D-F8B Auto Switch Specifications Grommet D-F8P D-F8N D-F8B Auto switch part no.

Multi-Axis Step Motor Controller

A B-1 A A-1 B B-2 B A-2 COM-A/COM B-3 COM-B/ A-3 Cable type Nil Robotic cable (Flexible cable) S Standard cable Cable color Connector D terminal no.

PSxx-OMU0005CN

.() -0.100 1.000[MPa]F.S.=1.000(-0.100)=1.100[MPa] (1F.S.=1.1000.01=0.011[MPa]) R.D. 1.000[MPa]5R.D.1.000[MPa]50.05[MPa] 0.800[MPa]5R.D.0.800[MPa]50.04[MPa] ON/OFF () (34 ) ON OFF 34 75 75 ON OFF Hysteresis / () () 25[]ON-OFF () -11No.PS-OMU0005CN-C NPN () () ()()( ) () ON ON 0 (1k1MA/D 5V A/D 5(V)1(M)/(1(k)+1(M)) 4.995(V)0.005V ) 34 ON-OFF ON ( )(P1L~P1H) ON (34 ) () "digit

Escapements Series MIW/MIS

, D-F8P, D-F8B Auto Switch Specifications Grommet D-F8P D-F8N D-F8B Auto switch part no.

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

direction as solenoid Type S42 Manifold Grommet: G DIN terminal: D 49.5 11.5 8.5 L1 L2 5 P = 19 14 24.5 (mounting holes) 49.5 11.5 8.5 2 18.5 R P R P 11.5 18 37 11.5 18 37 67.5 59 Max .10 71.5 Pg.7 Manual override (non-locking) 4Rc(PT) 1/8 (ports P, R) 18 25 31 53.5 Approx. 300 (lead wire length) Light (DZ type only) 4Rc(PT) 1/8 (ports P, R) 75.5 83 Manual override (non-locking) nRc(PT)

PFxx-OMS0001CN

min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_1] OUT1 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [ CoL] OUT1 [SoG] ONOFF [ oU2] OUT2 2 [ HYS] [ 2ot] OUT2 2 [ 2_P] [ 250] 250 L/min(PFMC7501) [ P_2] OUT2 2 [ 500] 500 L/min(PFMC7102) 37 [F 2] [ 1000] 1000 L/min(PFMC7202) [ 25] 25 L/min(PFMC7501) [ H_2] OUT2 2 [ 50] 50 L/min(PFMC7102) [ 100] 100 L/min(PFMC7202) [F 3] [ rES] [ 1. 0] 1

PF-OMN0009_C

34 62.5 18 13.6 2.7 10 19 6 PF3W540S 142 71 75.25(Max. 81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W504S 56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0009CN-F PF3W504/520/540(+) A AA D K S PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71 105.5 90 89 -45No.PF-OMN0009CN-F PF3W511-U25/PF3W521-U30(PVC ) 2X A B D E F J K L N P Q 25 A 154 46 77

Vacuum Equipment

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Output type Load voltage Lights when ON 2 color indicator Relay, PLC D-F9N D-F9NV NPN type 8mA or less 0.4V or less 28VDC or less 10A or less at 24VDC D-F9NW D-F9NWV D-F9P D-F9PV 12mA or less 24VDC (10 to 28VDC) 50mA or less Lights when ON 2 color indicator 10mA or less PNP type 1.5V or less D-F9PW D-F9PWV Lights when ON 4.5V or less D-F9B D-F9BV 1mA or less at 24VDC 24VDC (10 to 28VDC) 24VDC

PS-OMH0005CN

-2No.PS-OMH0005CN-D 1 1.5 3) *3) 1 1 () -3No.PS-OMH0005CN-D () () -4No.PS-OMH0005CN-D ( ) * (10 10 ) * (13 ) FG (50N 25N ) -5No.PS-OMH0005CN-D *() 6 33 2 () () 10m DC(-)() * ( ) ( ) CE -6No.PS-OMH0005CN-D -5~50 * ON , 20~30 1% 18~27 LCD * -7No.PS-OMH0005CN-D PSE20 2 0 NPN5 + 1 PNP5 + 4C (4 ) 1 A B + 1 M SI 2 1 2 kPa MPa / ZS-26-A 2 m ZS-28-C 1 ZS-26-B (M38L 2

AR Series Modular Type Regulator

A : Max. 3.5 AR20-A to AR25-A : Max. 4 AR30-A to AR40-06-A : Max. 8 Model Standard specifications Optional specifications Round type pressure Round type pressure gauge gauge (with color zone) Bracket mount Panel mount P1 P2 A B C D F J H J H J M N Q R S T U V W Y Z AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 25 28 30 4.5 6.5 40 2 18 18.5 AR20-A 1/8, 1/4 1/8 40 67.4 23.5 22

Order made options for this series include adjustable air cushions, heavy duty guide rods, copper free, high temperature, and low speed.Compact guide cylinder , Bore size: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 * , Strokes: 10mm through 400mm, depending upon bore size , Variety of switches with a variety of wire lead lengths, MGP, Compact Guide Cylinder, GUIDED CYLINDER, 0.996 lb

Order made options for this series include adjustable air cushions, heavy duty guide rods, copper free, high temperature, and low speed.Compact guide cylinder , Bore size: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 * , Strokes: 10mm through 400mm, depending upon bore size , Variety of switches with a variety of wire lead lengths, MGP, Compact Guide Cylinder, GUIDED CYLINDER, B89, 2.336 lb

Order made options for this series include adjustable air cushions, heavy duty guide rods, copper free, high temperature, and low speed.Compact guide cylinder , Bore size: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 * , Strokes: 10mm through 400mm, depending upon bore size , Variety of switches with a variety of wire lead lengths, MGP, Compact Guide Cylinder, GUIDED CYLINDER, 3.866 lb

Order made options for this series include adjustable air cushions, heavy duty guide rods, copper free, high temperature, and low speed.Compact guide cylinder , Bore size: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 * , Strokes: 10mm through 400mm, depending upon bore size , Variety of switches with a variety of wire lead lengths, MGP, Compact Guide Cylinder, GUIDED CYLINDER, B89, 2.05600

Order made options for this series include adjustable air cushions, heavy duty guide rods, copper free, high temperature, and low speed.Compact guide cylinder , Bore size: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 * , Strokes: 10mm through 400mm, depending upon bore size , Variety of switches with a variety of wire lead lengths, MGP, Compact Guide Cylinder, GUIDED CYLINDER, B89, 2.05600

Order made options for this series include adjustable air cushions, heavy duty guide rods, copper free, high temperature, and low speed.Compact guide cylinder , Bore size: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 * , Strokes: 10mm through 400mm, depending upon bore size , Variety of switches with a variety of wire lead lengths, MGP, Compact Guide Cylinder, GUIDED CYLINDER, B89, 4.746 lb

Order made options for this series include adjustable air cushions, heavy duty guide rods, copper free, high temperature, and low speed.Compact guide cylinder , Bore size: 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 * , Strokes: 10mm through 400mm, depending upon bore size , Variety of switches with a variety of wire lead lengths, MGP, Compact Guide Cylinder, GUIDED CYLINDER, B89, 8.016 lb

Cylinder, Air, COMPACT CYLINDER W/LINEAR GUIDE, O14, 0.234 lb